Abstract: A measuring device (10) and method for measuring a surface profile of a workpiece. A measuring carriage (15) is moved in a straight line at a distance from the workpiece surface in a moving direction (x), without accelerating a carried probe tip (25). The free probe end (40) of the probe tip (25) rests on the workpiece surface (11) with a measuring force (Fm) and is deflected during the measurement in a measuring direction (z), transverse to moving direction (x), the surface profile causes a track-dependent deflection (zT) of the probe end (49). A measured value receiver (45) detects the deflecting value (s) describing the deflection of the probe end (40) in measuring direction (z). In an analyzing unit (21), a measuring force change value describing the change of the measuring force (Fm) between the probe end (40) and the workpiece surface (11) is formed for detecting measuring errors/inaccuracies.

Abstract: A measuring device (10) and method for measuring a surface profile of a workpiece. A measuring carriage (15) is moved in a straight line at a distance from the workpiece surface in a moving direction (x), without accelerating a carried probe tip (25). The free probe end (40) of the probe tip (25) rests on the workpiece surface (11) with a measuring force (Fm) and is deflected during the measurement in a measuring direction (z), transverse to moving direction (x), the surface profile causes a track-dependent deflection (zT) of the probe end (49). A measured value receiver (45) detects the deflecting value (s) describing the deflection of the probe end (40) in measuring direction (z). In an analyzing unit (21), a measuring force change value describing the change of the measuring force (Fm) between the probe end (40) and the workpiece surface (11) is formed for detecting measuring errors/inaccuracies.