Abstract: A micro-electromechanical systems (MEMS) transducer (100, 700) is adapted to use lateral axis vibration to generate non-planar oscillations in a pair of teeter-totter sense mass structures (120/140, 720/730) in response to rotational movement of the transducer about the rotation axis (170, 770) with sense electrodes connected to add pickups (e.g., 102/107, 802/807) diagonally from the pair of sense mass structures to cancel out signals associated with rotation vibration.

Abstract: Systems and methods are provided for monitoring operation of MEMS accelerometers (100). In these embodiments a control loop (112) having a forward path (114) is coupled a MEMS transducer (110), and a test signal generator (124) and test signal detector (126) is provided. The test signal generator (124) is configured to generate a test signal and apply the test signal to the forward path (114) of the control loop (112) during operation of the MEMS accelerometer transducer (110). The test signal detector (126) is configured to receive an output signal from the control loop and detect the effects of the test signal in the output signal. Finally, the test signal detector (126) is further configured to generate a monitor output indicative of the operation of the sensing device to provide for the continuous monitoring of the operation of the MEMS accelerometer (100).

Abstract: Systems and methods are provided for monitoring operation of MEMS accelerometers (100). In these embodiments a control loop (112) having a forward path (114) is coupled a MEMS transducer (110), and a test signal generator (124) and test signal detector (126) is provided. The test signal generator (124) is configured to generate a test signal and apply the test signal to the forward path (114) of the control loop (112) during operation of the MEMS accelerometer transducer (110). The test signal detector (126) is configured to receive an output signal from the control loop and detect the effects of the test signal in the output signal. Finally, the test signal detector (126) is further configured to generate a monitor output indicative of the operation of the sensing device to provide for the continuous monitoring of the operation of the MEMS accelerometer (100).

Abstract: A micro-electromechanical systems (MEMS) transducer (100, 700) is adapted to use lateral axis vibration to generate non-planar oscillations in a pair of teeter-totter sense mass structures (120/140, 720/730) in response to rotational movement of the transducer about the rotation axis (170, 770) with sense electrodes connected to add pickups (e.g., 102/107, 802/807) diagonally from the pair of sense mass structures to cancel out signals associated with rotation vibration.

Abstract: A device structure is made using a first conductive layer over a first wafer. An isolated conductive region is formed in the first conductive layer surrounded by a first opening in the conductive layer. A second wafer has a first insulating layer and a conductive substrate, wherein the conductive substrate has a first major surface adjacent to the first insulating layer. The insulating layer is attached to the isolated conductive region. The conductive substrate is thinned to form a second conductive layer. A second opening is formed through the second conductive layer and the first insulating layer to the isolated conductive region. The second opening is filled with a conductive plug wherein the conductive plug contacts the isolated conductive region. The second conductive region is etched to form a movable finger over the isolated conductive region. A portion of the insulating layer under the movable finger is removed.

Abstract: A device structure is made using a first conductive layer over a first wafer. An isolated conductive region is formed in the first conductive layer surrounded by a first opening in the conductive layer. A second wafer has a first insulating layer and a conductive substrate, wherein the conductive substrate has a first major surface adjacent to the first insulating layer. The insulating layer is attached to the isolated conductive region. The conductive substrate is thinned to form a second conductive layer. A second opening is formed through the second conductive layer and the first insulating layer to the isolated conductive region. The second opening is filled with a conductive plug wherein the conductive plug contacts the isolated conductive region. The second conductive region is etched to form a movable finger over the isolated conductive region. A portion of the insulating layer under the movable finger is removed.

Abstract: A method and apparatus are described for fabricating a high aspect ratio MEMS device by using metal thermocompression bonding to assemble a reference wafer (100), a bulk MEMS active wafer (200), and a cap wafer (300) to provide a proof mass (200d) formed from the active wafer with bottom and top capacitive sensing electrodes (115, 315) which are hermetically sealed from the ambient environment by sealing ring structures (112/202/200a/212/312 and 116/206/200e/216/316).

Abstract: To transmit data which is supplied by a rotational speed sensor in the form of an alternating signal as well as additional data via a signal line, a sequence of current pulses of a predetermined duration is derived from the alternating signal, the pulse intervals or interpulse periods containing the information on rotational speed. The additional data is transmitted in the interpulse periods, and transmission of the additional data is synchronized by the individual rotating signal sensor pulses. Preferably, the method is employed for active sensors, and both the sensor pulses and the additional data are transmitted in the form of current signals. During standstill, in the absence of a sensor pulse, transmission of the additional data is triggered by auxiliary synchronization pulses.

Abstract: System and method for improving the dynamic range of an A/D converter in which operation the A/D converter is monitored, and an offset signal is combined with an analog input signal to maintain the operation of the A/D converter within the dynamic range.

Abstract: The present invention describes a sensor assembly for detecting movements, wherein a sensor signal is produced in an active sensor (1) by an encoder (E) acted upon by the movement, and which includes a first device (2, 3, 4, 5) that permits converting the sensor signal, along with at least one additional information, into an output signal which can be transmitted to an evaluating device, and which is in particular characterized in that a second device (1a) is provided by which a signal voltage that depends on an air slot (d) between the active sensor (1) and the encoder (E) is detected and sent to the first device (2, 3, 4, 5) for transmission as additional information.

Abstract: The present invention relates to a method of transmitting data in pulse intervals of a rotational speed signal, wherein the maximum number of the transmittable data is determined from the period of time which is required for transmitting an information and from a time, which corresponds to the length of the pulse interval, and the maximum number of the data transmittable in a pulse interval is adapted by setting as time, which corresponds to the length of the pulse interval, a value that results from at least one recently measured pulse interval in consideration of a maximum value of the wheel acceleration. The present invention also relates to a circuit arrangement for implementing the method.

Abstract: An arrangement for sensing the rotational speeds of a wheel or any other rotating member includes a sensor module with a sensor element, a controllable current source with a modulator and a signal conditioning and evaluating circuit. The modulator controls the current source in response to the signals of the sensor element and/or external signals and, as an output signal of the sensor module, delivers a current signal representative of the rotational behavior with status or additional signals superposed on the current signal. The evaluating circuit of the sensor module includes at least two different signal-conditioning networks which, by way of a control network, in dependence on predetermined criteria or conditions, are connected between the sensor element and the modulator controlling the current source and take care of signal conditioning.

Abstract: A shielded housing for accommodating electronic circuits or components which are sensitive to electromagnetic interference fields or radiate interference fields, is fitted with an electrical connection in the form of a connecting cable, connecting plug or the like. This housing includes a shielding in the form of a closed metallic coating (of a conductive material) and, moreover, includes filter devices which are active against interference fields in particular in the area where the connection enters or penetrates the housing. In accordance with this invention, at least in the area of entry or lead-in, filter devices with capacitors are provided which are embodied as integral components of the connecting elements and of the shielding and, possibly, of the housing walls, also.

Abstract: The invention discloses a system, preferably for influencing the performance of a motor vehicle, comprising a sensor unit with an electric-mechanical transducer and a mechanical-electric transducer with signal recording amplifier, wherein such sensor unit is connected to an A/D signal converter by way of an output and to a b/A signal converter of a digital signal processing unit by way of an input.

Abstract: An arrangement for determining the rotational behavior of a rotating body or encoder (3) includes a sensor module (1) which comprises a sensor element (2; 2.1 to 2.4), a controllable power source (4) supplying a load-independent current representative of the rotational behavior, a modulator (5) that controls the power source (4) as a function of signals of the sensor element (2; 2.1 to 2.4) and of signals supplied by an external signal source through an additional port (K5), and an evaluating circuit (9). The sensor module (1) is magnetically coupled to the encoder (3). The output signal of the sensor module (1) is a signal, representative of the rotational behavior, with a superimposed status signal and/or additional signal.

Abstract: The present invention provides an arrangement for detecting and evaluating yawing movements of an automotive vehicle, serving as an input quantity of an automotive control system, comprising yaw rate sensors (GRS) and electronic circuits (SCU) for processing and evaluating the information obtained by the yaw rate sensors (GRS) and representing the yawing movement of the automotive vehicle, and for generating control signals. Moreover, one or more electronic compass systems (KB, KH) are provided that detect yawing movements of the vehicle independently of the information obtained by the yaw rate sensors (GRS). By comparing the information supplied by the compass systems (KB, KH) to the information supplied by the yaw rate sensors (GRS), the operation of the measuring systems or measuring channels (KB, KH, GRS) is monitored.

Abstract: In so-called active sensors which transmit an output signal to an electronic controller, the amplitude of the output signal depending neither on the speed of the encoder nor on the distance between the sensor and the encoder, the problem is that the output signal does not permit identifying whether the air slot size set between the sensor and the encoder is chosen sufficiently small to ensure an appropriate amplitude of the input signal, generated in the sensor, even when dynamic increases in the air slot occur. If the input signal induced by the encoder in the sensor is too low, a sensor-inherent hysteresis threshold is not exceeded, and no output signal is generated. To prevent the sensor from being inadvertently operated at the limits of its maximum permissible air slot, according to the present invention, the sensor-inherent hysteresis threshold is changed over to the higher hysteresis threshold for testing purposes.

Abstract: A circuit configuration for controlling a major number of consumers (5) such as the electromagnetically operable multi-directional valves of an anti-lock control system (MWV1-MWVn) comprises a control unit (2, 3) whose output signals can be fed to the consumers (5) via amplifier stages (4). The individual amplifier stages (4; VS1-VSn) are designed as so-called “intelligent power drivers” and essentially consist of a power amplifier (18) with integrated electronic controls and monitors. The control unit (2, 3) and the amplifier stages (4; VS1-VSn) are interconnected to form a closed loop or chain. Data transfer is performed from a synchronous serial interface of the control unit (2, 3), via the individual amplifier stages (4; VS1-VSn) and back to a serial entry of the control unit (2, 3).

Abstract: In normal operation, a sensor element emits information only as to whether two or more field-sensitive components are located in peripheral zones of identical or different electromagnetic field strengths of a pulse generator. In order to permit sensor elements of this type determining immediately upon activation of a supply voltage whether an identical electromagnetic field strength on both components corresponds to a zone of low (L) or high (H) field strength, according to the present invention, the sensor element, upon activation of the supply voltage, is initially operated so that the absolute field strength is measured for a given time. If there is a difference circuit between two field-sensitive components (3, 4), the measurement is carried out because one of the components is temporarily switched off, both components are connected in parallel, or both components are connected in series.

Abstract: A rotational speed sensor system which uses the sensor and a sensor electronic circuit to test the air slot between the speed sensor and an encoder to determine if the air slot falls within acceptable limits.