Patents by Inventor Hele Savin

Hele Savin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230420585
    Abstract: This disclosure relates to a radiation sensor element comprising a semiconductor substrate, having a bulk refractive index; a front surface; a back surface, extending substantially along a base plane; and a plurality of pixel portions. Each pixel portion comprises a collection region on the back surface and a textured region on the front surface. The textured regions comprise high aspect ratio nanostructures, extending substantially along a thickness direction perpendicular to the base plane and forming an optical conversion layer, having an effective refractive index gradually changing towards the bulk refractive index to reduce reflection of light incident on said pixel portion from the front side of the semiconductor substrate.
    Type: Application
    Filed: September 7, 2023
    Publication date: December 28, 2023
    Applicant: ELFYS OY
    Inventors: Antti HAARAHILTUNEN, Juha HEINONEN, Mikko JUNTUNEN, Chiara MODANESE, Toni PASANEN, Hele SAVIN, Ville VÄHÄNISSI
  • Patent number: 11810987
    Abstract: This disclosure relates to a radiation sensor element comprising a semiconductor substrate, having a bulk refractive index; a front surface; a back surface, extending substantially along a base plane; and a plurality of pixel portions. Each pixel portion comprises a collection region on the back surface and a textured region on the front surface. The textured regions comprise high aspect ratio nanostructures, extending substantially along a thickness direction perpendicular to the base plane and forming an optical conversion layer, having an effective refractive index gradually changing towards the bulk refractive index to reduce reflection of light incident on said pixel portion from the front side of the semiconductor substrate.
    Type: Grant
    Filed: May 26, 2020
    Date of Patent: November 7, 2023
    Assignee: ELFYS OY
    Inventors: Antti Haarahiltunen, Juha Heinonen, Mikko Juntunen, Chiara Modanese, Toni Pasanen, Hele Savin, Ville Vähänissi
  • Publication number: 20220216354
    Abstract: This disclosure relates to a radiation sensor element comprising a semiconductor substrate, having a bulk refractive index; a front surface; a back surface, extending substantially along a base plane; and a plurality of pixel portions. Each pixel portion comprises a collection region on the back surface and a textured region on the front surface. The textured regions comprise high aspect ratio nanostructures, extending substantially along a thickness direction perpendicular to the base plane and forming an optical conversion layer, having an effective refractive index gradually changing towards the bulk refractive index to reduce reflection of light incident on said pixel portion from the front side of the semiconductor substrate.
    Type: Application
    Filed: May 26, 2020
    Publication date: July 7, 2022
    Applicant: ELFYS OY
    Inventors: Antti HAARAHILTUNEN, Juha HEINONEN, Mikko JUNTUNEN, Chiara MODANESE, Toni PASANEN, Hele SAVIN, Ville VÄHÄNISSI
  • Patent number: 10950737
    Abstract: A layered semiconductor structure with a width in a lateral direction, having an operating area covering part of the width of the semiconductor structure, comprises a semiconductor substrate with majority charge carriers of a first polarity; and a first dielectric layer with inducing net charge of the first polarity on the semiconductor substrate. An induced junction is induced in the semiconductor substrate by an electric field generated in the semiconductor substrate by the inducing net charge. The semiconductor structure is configured to confine the electric field generated in the semiconductor substrate in the operating area.
    Type: Grant
    Filed: February 13, 2018
    Date of Patent: March 16, 2021
    Assignee: ELFYS OY
    Inventors: Mikko Juntunen, Hele Savin, Ville Vähänissi, Päivikki Repo, Juha Heinonen
  • Publication number: 20190386157
    Abstract: A layered semiconductor structure with a width in a lateral direction, having an operating area covering part of the width of the semiconductor structure, comprises a semiconductor substrate with majority charge carriers of a first polarity; and a first dielectric layer with inducing net charge of the first polarity on the semiconductor substrate. An induced junction is induced in the semiconductor substrate by an electric field generated in the semiconductor substrate by the inducing net charge. The semiconductor structure is configured to confine the electric field generated in the semiconductor substrate in the operating area.
    Type: Application
    Filed: February 13, 2018
    Publication date: December 19, 2019
    Applicant: ELFYS OY
    Inventors: Mikko JUNTUNEN, Hele SAVIN, Ville VÄHÄNISSI, Päivikki REPO, Juha HEINONEN
  • Patent number: 9882070
    Abstract: A photodetector structure comprises a semiconductor substrate extending substantially along a horizontal plane and having a bulk refractive index and a front surface defining a front side of the photodetector structure. The front surface comprises high aspect ratio nanostructures forming an optical conversion layer having an effective refractive index gradually changing towards the bulk refractive index to reduce reflection of light incident on the photodetector structure from the front side thereof. Further, the semiconductor substrate comprises an induced junction.
    Type: Grant
    Filed: June 10, 2016
    Date of Patent: January 30, 2018
    Assignee: AALTO UNIVERSITY FOUNDATION
    Inventors: Mikko Juntunen, Hele Savin, Päivikki Repo, Ville Vähänissi, Antti Haarahiltunen
  • Publication number: 20170358694
    Abstract: A photodetector structure comprises a semiconductor substrate extending substantially along a horizontal plane and having a bulk refractive index and a front surface defining a front side of the photodetector structure. The front surface comprises high aspect ratio nanostructures forming an optical conversion layer having an effective refractive index gradually changing towards the bulk refractive index to reduce reflection of light incident on the photodetector structure from the front side thereof. Further, the semiconductor substrate comprises an induced junction.
    Type: Application
    Filed: June 10, 2016
    Publication date: December 14, 2017
    Applicant: Aalto University Foundation
    Inventors: Mikko JUNTUNEN, Hele SAVIN, Päivikki REPO, Ville VÄHÄNISSI, Antti HAARAHILTUNEN
  • Patent number: 9306097
    Abstract: A method (100) for decreasing an excess carrier induced degradation in a silicon substrate, includes providing (120, 130) a charged insulation layer capable of retaining charge on the silicon substrate for generating a potential difference between the charged insulation layer and the silicon substrate, and heat treating (140) the silicon substrate for enabling an impurity causing the excess carrier induced degradation and being in the silicon substrate to diffuse due to the potential difference into a boundary of the silicon substrate and the insulation layer.
    Type: Grant
    Filed: October 1, 2012
    Date of Patent: April 5, 2016
    Assignee: AALTO-KORKEAKOULUSAATIO
    Inventors: Antti Haarahiltunen, Hele Savin, Marko Veli Yli-Koski
  • Publication number: 20140238490
    Abstract: A method (100) for decreasing an excess carrier induced degradation in a silicon substrate, includes providing (120, 130) a charged insulation layer capable of retaining charge on the silicon substrate for generating a potential difference between the charged insulation layer and the silicon substrate, and heat treating (140) the silicon substrate for enabling an impurity causing the excess carrier induced degradation and being in the silicon substrate to diffuse due to the potential difference into a boundary of the silicon substrate and the insulation layer.
    Type: Application
    Filed: October 1, 2012
    Publication date: August 28, 2014
    Applicant: AALTO-KORKEAKOULUSAATIO
    Inventors: Antti Haarahiltunen, Hele Savin, Marko Veli Yli-Koski
  • Patent number: 8624582
    Abstract: The invention presents a method for determining the copper concentration of the substrate using the photoconductivity method in a new manner, the method comprising steps in which the photoconductivity property of the substrate is measured for a first time by an arrangement, the surface of the substrate is illuminated by illuminating means emitting photon radiation, the photoconductivity property of the substrate is measured for a second time by an arrangement, and the copper concentration of the substrate is determined from the change between the first and second time of measurement on the basis of the illumination. The invention also presents an arrangement and a software product for determining the copper concentration.
    Type: Grant
    Filed: October 6, 2006
    Date of Patent: January 7, 2014
    Assignee: Teknillinen Korkeakoulu
    Inventors: Hele Savin, Antti Haarahiltunen, Marko Veli Yli-Koski
  • Publication number: 20090160431
    Abstract: The invention presents a method for determining the copper concentration of the substrate using the photoconductivity method in a new manner, the method comprising steps in which the photoconductivity property of the substrate is measured for a first time by an arrangement, the surface of the substrate is illuminated by illuminating means emitting photon radiation, the photoconductivity property of the substrate is measured for a second time by an arrangement, and the copper concentration of the substrate is determined from the change between the first and second time of measurement on the basis of the illumination. The invention also presents an arrangement and a software product for determining the copper concentration.
    Type: Application
    Filed: October 6, 2006
    Publication date: June 25, 2009
    Applicant: TEKNILLINEN KORKEAKOULU
    Inventors: Hele Savin, Antti Haarahiltunen, Marko Vell Yli-Koski