Abstract: A method and apparatus for providing image data which can be used to construct a high resolution image of a region of a target object is disclosed. An embodiment of the method includes the acts of providing incident radiation from a radiation source at a target object, via at least one detector, detecting the intensity of radiation scattered by the target object and providing the image data responsive to the detected intensity without high resolution positioning of the incident radiation or a post target object aperture relative to the target object.