Abstract: The invention relates to an apparatus 100 for machining a workpiece with a laser beam 101 coupled into a fluid jet. The apparatus 100 comprises a laser unit 101a for providing the laser beam 101, a nozzle unit 102 with an aperture 102a for producing the fluid jet, and an optical unit 103 configured to provide the laser beam 101 from the laser unit 101a onto the nozzle unit 102. Further, the apparatus 100 comprises a control unit 104 configured to control 108, 110 the optical unit 103 and/or nozzle unit 102 to change a point of incidence 109 of the laser beam 101 on the nozzle unit 102. The apparatus 100 also comprises a sensing unit 105 configured to sense laser light 106 reflected from a surface 102b of the nozzle unit 102 and produce a sensing signal 107 based on the sensed reflected laser light 106.

Abstract: The invention relates to an apparatus 100, 200, 300, 700 and a method 400 for machining a workpiece 101 with a laser beam 102. The apparatus 100, 200, 300, 700 comprises a machining unit 103 configured to provide a pressurized fluid jet 104 onto the workpiece 101 and to couple the laser beam 102 through at least one optical element 105 into the fluid jet 104 towards the workpiece 101. Further, it comprises a sensing unit 107 arranged to receive a laser-induced electromagnetic radiation 106 propagating away from the workpiece 101 through the fluid jet 104 and through at least one optical element, and configured to convert the received radiation 106 into a signal 108. The apparatus 100, 200, 300, 700 also comprises a signal processing unit 109 configured determine a state of machining the workpiece 101 based on the signal 108.

Abstract: The present application relates to a device for generating a jet of liquid propagating along a jet axis, said jet of liquid guiding a laser beam. The device comprises a wall element having a central opening, wherein a nozzle holder comprising a nozzle and a window element comprising the window are arranged one above the other within said central opening, said nozzle holder and said window element being spaced from each other along said jet axis, said spacing defining an acceleration chamber, wherein said connection passage and said distribution chamber are formed within said nozzle holder.

Abstract: The invention relates to an apparatus 100 for 3D shaping of a workpiece 101 by material ablation with a laser beam 102. The apparatus 100 comprises a machining unit 103, which is configured to provide a pressurized fluid jet 104 onto the workpiece 101 and to couple the laser beam 102 into the fluid jet 104 towards the workpiece 101. Further, the apparatus 100 includes a motion controller 105 configured to set an x-y-z-position of the workpiece 101 relative to the machining unit 103. It also includes a measuring unit 107 configured to measure a z-position of the point of incidence 108 of the pressurized fluid jet 104 on the workpiece 101 in the z-direction.

Abstract: The invention relates to an apparatus 100 for machining a workpiece with a laser beam 101 coupled into a fluid jet. The apparatus 100 comprises a laser unit 101a for providing the laser beam 101, a nozzle unit 102 with an aperture 102a for producing the fluid jet, and an optical unit 103 configured to provide the laser beam 101 from the laser unit 101a onto the nozzle unit 102. Further, the apparatus 100 comprises a control unit 104 configured to control 108, 110 the optical unit 103 and/or nozzle unit 102 to change a point of incidence 109 of the laser beam 101 on the nozzle unit 102. The apparatus 100 also comprises a sensing unit 105 configured to sense laser light 106 reflected from a surface 102b of the nozzle unit 102 and produce a sensing signal 107 based on the sensed reflected laser light 106.

Abstract: The invention relates to an apparatus 100 for machining a workpiece with a laser beam 101. The apparatus 100 comprises a machining unit 102 configured to provide a pressurized fluid jet 103 and to couple the laser beam 101 into the fluid jet 103. It further comprises a motion unit 104 configured to rotate the machining unit 102 around an x-axis and/or y-axis, a determining unit 105 configured to determine a first angle between the fluid jet 103 and the y-axis and/or a second angle between the fluid jet 103 and the x-axis, and a processing unit 106 configured to control the motion unit 104 to rotate the machining unit 102 around the x-axis based on the first angle and/or around the y-axis based on the second angle.

Abstract: The invention relates to an apparatus 100, 200, 300, 700 and a method 400 for machining a workpiece 101 with a laser beam 102. The apparatus 100, 200, 300, 700 comprises a machining unit 103 configured to provide a pressurized fluid jet 104 onto the workpiece 101 and to couple the laser beam 102 through at least one optical element 105 into the fluid jet 104 towards the workpiece 101. Further, it comprises a sensing unit 107 arranged to receive a laser-induced electromagnetic radiation 106 propagating away from the workpiece 101 through the fluid jet 104 and through at least one optical element, and configured to convert the received radiation 106 into a signal 108. The apparatus 100, 200, 300, 700 also comprises a signal processing unit 109 configured determine a state of machining the workpiece 101 based on the signal 108.

Abstract: The present invention provides an apparatus 100, 200, 300, 900 and a method 400 for machining a workpiece 101 with a laser beam 102. In particular, the apparatus 100, 200, 300 comprises a nozzle 103 for generating a pressurized fluid jet 104, and at least one optical element 105 configured to couple the laser beam 102 into the fluid jet 104. The apparatus 100, 200, 300 also includes a hermetic enclosure 106 surrounding the nozzle 103 and the at least one optical element 105. The hermetic enclosure 106 includes an upper part 107 provided with an interface unit 108, and a lower part 109 removably attached to the upper part 107 by means of the interface unit 108. The lower part 109 comprises an exit aperture 110 for outputting the fluid jet 104 towards the workpiece 101, wherein the exit aperture 110 and the fluid jet 104 are coaxially aligned.

Abstract: The present application relates to a device for generating a jet of liquid propagating along a jet axis (A), said jet of liquid guiding a laser beam. The device comprises a distribution chamber (5) with at least one inlet (10) and at least one outlet (11) for the liquid, said distribution chamber (5) being of an annular shape encircling said jet axis (A). The distribution chamber (5) has a first effective liquid flow cross-section area S1. The device further includes an acceleration chamber (7) having at least one inlet (12) and one outlet for the liquid and a window (3) transparent to said laser beam to introduce said laser beam into said acceleration chamber (7) through said window (3). The window (3) is arranged in line with the jet axis (A) to enable the introduction of the laser beam coaxial to said jet axis (A).