Patents by Inventor Helmut Beierl
Helmut Beierl has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20060077366Abstract: A projection exposure lens has an object plane, optical elements for separating beams, a concave mirror, an image plane, a first lens system arranged between the object plane and the optical elements for separating beams, a second double pass lens system arranged between the optical elements for separating beams and the concave mirror, a third lens system arranged between the optical elements for separating beams and the image plane. The second lens system has a maximum of five lenses.Type: ApplicationFiled: November 21, 2005Publication date: April 13, 2006Inventors: David Shafer, Alexander Epple, Aurelian Dodoc, Helmut Beierl, Wilhelm Ulrich
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Patent number: 7006304Abstract: A catadioptric projection lens configured for imaging a pattern arranged in an object plane (2) onto an image plane (4) while creating a single, real, intermediate image (3) has a catadioptric imaging group (5) having a concave mirror (6) and a beam-deflector (7), and a dioptric imaging lens group (20) that commences after the beam-deflector. The system is configured such that the intermediate image follows the first lens (17) of a dioptric section (8) and is preferably readily accessible. Arranging the intermediate image both between a pair of lenses (17, 21) of the dioptric section and at a large distance behind the final reflective surface of the beam-deflector helps to avoid imaging aberrations.Type: GrantFiled: February 6, 2004Date of Patent: February 28, 2006Assignee: Carl Zeiss SMT AGInventors: Alexander Epple, Helmut Beierl
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Patent number: 6995930Abstract: A projection exposure lens has an object plane, optical elements for separating beams, a concave mirror, an image plane, a first lens system arranged between the object plane and the optical elements for separating beams, a second double pass lens system arranged between the optical elements for separating beams and the concave mirror, a third lens system arranged between the optical elements for separating beams and the image plane. The second lens system has a maximum of five lenses.Type: GrantFiled: December 15, 2003Date of Patent: February 7, 2006Assignee: Carl Zeiss SMT AGInventors: David R. Shafer, Alexander Epple, Aurelian Dodoc, Helmut Beierl, Wilhelm Ulrich
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Patent number: 6985286Abstract: A projection exposure lens system has an object side catadioptric system, and intermediate image and a refractive lens system. The refractive lens system from its intermediate image side and in the direction of its image plane has a first lens group of positive refractive power, a second lens group of negative refractive power, a third lens group of positive refractive power, a fourth lens group of negative refractive power, and a fifth lens group of positive refractive power.Type: GrantFiled: February 25, 2004Date of Patent: January 10, 2006Assignee: Carl Zeiss SMT AGInventors: David R. Shafer, Helmut Beierl, Gerhard Fürter, Karl-Heinz Schuster, Wilhelm Ulrich
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Publication number: 20050190455Abstract: A purely refractive projection objective suitable for immersion microlithography is designed as a single-waist system with five lens groups, in the case of which a first lens group with negative refractive power, a second lens group with positive refractive power, a third lens group with negative refractive power, a fourth lens group with positive refractive power and a fifth lens group with positive refractive power are provided. A constriction site of narrowest constriction of the beam bundle lies in the region of the waist. A waist distance AT exists between the object plane and the constriction site X. The condition AT/L?0.4 holds for a distance ratio AT/L between the waist distance AT and an object-image distance L of the projection objective. Embodiments of inventive projection objectives reach very high numerical apertures NA>1.1 in conjunction with a large image field and are distinguished by a compact overall size and good correction of the lateral chromatic aberration.Type: ApplicationFiled: December 15, 2004Publication date: September 1, 2005Inventors: Hans-Juergen Rostalski, Aurelian Dodoc, Alexander Epple, Helmut Beierl
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Publication number: 20050185269Abstract: A catadioptric projection objective for imaging a pattern arranged on the object plane of the projection objective, on the image plane of the projection objective, comprising: a first objective part for imaging an object field in a first real intermediate image; a second objective part for producing a second real intermediate image with the radiation coming from the first objective part; and a third objective part for imaging the second real intermediate image on the image plane; wherein at least one of the objective parts is a catadioptric objective part with a concave mirror, and at least one of the objective parts is a refractive objective part and a folding mirror is arranged within this refractive objective part in such a way that a field lens is arranged between the folding mirror and an intermediate image which is closest to the folding mirror.Type: ApplicationFiled: December 20, 2004Publication date: August 25, 2005Inventors: Alexander Epple, Helmut Beierl, Aurelian Dodoc, Wilhelm Ulrich
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Publication number: 20050157400Abstract: A projection objective has at least five lens groups (G1 to G5) and has several lens surfaces. At least two aspheric lens surfaces are arranged so as to be mutually adjacent. These mutually adjacently arranged lens surfaces are characterized as a double asphere. This at least one double asphere (21) is mounted at a minimum distance from an image plane (0?) which is greater than the maximum lens diameter (D2) of the objective.Type: ApplicationFiled: March 15, 2005Publication date: July 21, 2005Inventors: Karl-Heinz Schuster, David Shafer, Wilhelm Ulrich, Helmut Beierl, Wolfgang Singer
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Patent number: 6903802Abstract: A projection objective has at least five lens groups (G1 to G5) and has several lens surfaces. At least two aspheric lens surfaces are arranged so as to be mutually adjacent. These mutually adjacently arranged lens surfaces are characterized as a double asphere. This at least one double asphere (21) is mounted at a minimum distance from an image plane (0?) which is greater than the maximum lens diameter (D2) of the objective.Type: GrantFiled: November 7, 2003Date of Patent: June 7, 2005Assignee: Carl-Zeiss-StiftungInventors: Karl-Heinz Schuster, David R. Shafer, Wilhelm Ulrich, Helmut Beierl, Wolfgang Singer
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Publication number: 20050117224Abstract: A catadioptric projection objective is used to project a pattern arranged in an object plane of the projection objective into an image plane of the projection objective with the formation of at least one real intermediate image and has an image-side numerical aperture NA>0.7. The projection objective comprises an optical axis and at least one catadioptric objective part that comprises a concave mirror and a first folding mirror. There are a first beam section running from the object plane to the concave mirror and a second beam section running from the concave mirror to the image plane. The first folding mirror is arranged with reference to the concave mirror in such a way that one of the beam sections is folded at the first folding mirror and the other beam section passes the first folding mirror without vignetting, the first beam section and the second beam section crossing one another in a cross-over region.Type: ApplicationFiled: December 15, 2003Publication date: June 2, 2005Inventors: David Shafer, Alexander Epple, Aurelian Dodoc, Helmut Beierl, Wilhelm Ulrich
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Publication number: 20040263955Abstract: A catadioptric projection lens for imaging a pattern arranged in an object plane onto an image plane, preferably while creating a real intermediate image, including a catadioptric first lens section having a concave mirror and a physical beamsplitter having a beamsplitting surface, as well as a second lens section that is preferably refractive and follows the beamsplitter, between its object plane and image plane. Positive refractive power is arranged in an optical near-field of the object plane, which is arranged at a working distance from the first optical surface of the projection lens. The beamsplitter lies in the vicinity of low marginal-ray heights, which allows configuring projection lenses that are fully corrected for longitudinal chromatic aberration, while employing small quantities of materials, particularly those materials needed for fabricating their beamsplitters.Type: ApplicationFiled: March 22, 2004Publication date: December 30, 2004Applicant: CARL ZEISS SMT AGInventors: Wilhelm Ulrich, David R. Shafer, Alexander Epple, Helmut Beierl, Aurelian Dodoc
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Publication number: 20040233409Abstract: A projection objective has at least five lens groups (G1 to G5) and has several lens surfaces. At least two aspheric lens surfaces are arranged so as to be mutually adjacent. These mutually adjacently arranged lens surfaces are characterized as a double asphere. This at least one double asphere (21) is mounted at a minimum distance from an image plane (0′) which is greater than the maximum lens diameter (D2) of the objective.Type: ApplicationFiled: November 7, 2003Publication date: November 25, 2004Applicant: Carl-Zeiss-StiftungInventors: Karl-Heinz Schuster, David R. Shafer, Wilhelm Ulrich, Helmut Beierl, Wolfgang Singer
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Patent number: 6806942Abstract: A projection exposure system is proposed which is positionable between a first object and a second object for imaging the first object in a region of the second object with light of a wavelength band having a width &dgr;&lgr; about a central working wavelength &lgr;, wherein a relative width &dgr;&lgr;/&lgr; of the wavelength band is larger than 0.002, in particular, larger than 0.005, for example, of the Hg-I-line. The projection exposure system is a so-called three-bulge system comprising three bulges having, as a whole, a positive refractive power and two waists having, as a whole, a negative refractive power. By applying suitable measures, in particular, by suitably selecting the material for the lenses forming the projection exposure system, the long-term stability of the system is increased.Type: GrantFiled: May 8, 2003Date of Patent: October 19, 2004Assignee: Carl Zeiss SMT AGInventors: Karl-Heinz Schuster, Wilhelm Ulrich, Toralf Gruner, Daniel Kraehmer, Wolfgang Singer, Alexander Epple, Helmut Beierl, Reiner Garreis
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Publication number: 20040169914Abstract: A projection exposure lens system has an object side catadioptric system, and intermediate image and a refractive lens system. The refractive lens system from its intermediate image side and in the direction of its image plane has a first lens group of positive refractive power, a second lens group of negative refractive power, a third lens group of positive refractive power, a fourth lens group of negative refractive power, and a fifth lens group of positive refractive power.Type: ApplicationFiled: February 25, 2004Publication date: September 2, 2004Inventors: David R. Shafer, Helmut Beierl, Gerhard Furter, Karl-Heinz Schuster, Wilhelm Ulrich
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Publication number: 20040160677Abstract: A catadioptric projection lens configured for imaging a pattern arranged in an object plane (2) onto an image plane (4) while creating a single, real, intermediate image (3) has a catadioptric imaging group (5) having a concave mirror (6) and a beam-deflector (7), and a dioptric imaging lens group (20) that commences after the beam-deflector. The system is configured such that the intermediate image follows the first lens (17) of a dioptric section (8) and is preferably readily accessible. Arranging the intermediate image both between a pair of lenses (17, 21) of the dioptric section and at a large distance behind the final reflective surface of the beam-deflector helps to avoid imaging aberrations.Type: ApplicationFiled: February 6, 2004Publication date: August 19, 2004Applicant: CARL ZEISS SMT AGInventors: Alexander Epple, Helmut Beierl
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Patent number: 6717722Abstract: A projection exposure lens system has an object side catadioptric system, and intermediate image and a refractive lens system. The refractive lens system from its intermediate image side and in the direction of its image plane has a first lens group of positive refractive power, a second lens group of negative refractive power, a third lens group of positive refractive power, a fourth lens group of negative refractive power, and a fifth lens group of positive refractive power.Type: GrantFiled: February 20, 2002Date of Patent: April 6, 2004Inventors: David R. Shafer, Helmut Beierl, Gerhard Fürter, Karl-Heinz Schuster, Wilhelm Ulrich
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Patent number: 6717746Abstract: A catadioptric projection lens configured for imaging a pattern arranged in an object plane (2) onto an image plane (4) while creating a single, real, intermediate image (3) has a catadioptric first section (5) having a concave mirror (6) and a beam-deflection device (7), and a dioptric second section (8) that commences after the beam-deflection device. The system is configured such that the intermediate image follows the first lens (17) of the dioptric section (8) and is preferably readily accessible. Arranging the intermediate image both between a pair of lenses (17, 21) of the dioptric section and at a large distance behind the final reflective surface of the beam-deflection device helps to avoid imaging aberrations.Type: GrantFiled: May 22, 2002Date of Patent: April 6, 2004Assignee: Carl Zeiss Semiconductor Manufacturing Technologies AGInventors: Alexander Epple, Helmut Beierl
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Publication number: 20040017554Abstract: A projection exposure system is proposed which is positionable between a first object and a second object for imaging the first object in a region of the second object with light of a wavelength band having a width &dgr;&lgr; about a central working wavelength &lgr;, wherein a relative width &dgr;&lgr;/&lgr; of the wavelength band is larger than 0.002, in particular, larger than 0.005, for example, of the Hg-I-line. The projection exposure system is a so-called three-bulge system comprising three bulges having, as a whole, a positive refractive power and two waists having, as a whole, a negative refractive power. By applying suitable measures, in particular, by suitably selecting the material for the lenses forming the projection exposure system, the long-term stability of the system is increased.Type: ApplicationFiled: May 8, 2003Publication date: January 29, 2004Applicant: Carl Zeiss SMT AGInventors: Karl-Heinz Schuster, Wilhelm Ulrich, Toralf Gruner, Daniel Kraehmer, Wolfgang Singer, Alexander Epple, Helmut Beierl, Reiner Garreis
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Patent number: 6665126Abstract: A projection exposure lens has an object plane, optical elements for separating beams, a concave mirror, an image plane, a first lens system arranged between the object plane and the optical elements for separating beams, a second double pass lens system arranged between the optical elements for separating beams and the concave mirror, a third lens system arranged between the optical elements for separating beams and the image plane. The second lens system has a maximum of five lenses.Type: GrantFiled: December 27, 2000Date of Patent: December 16, 2003Assignee: Carl-Zeiss-StiftungInventors: David R. Shafer, Wilhelm Ulrich, Helmut Beierl
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Patent number: 6646718Abstract: A projection objective has at least five lens groups (G1 to G5) and has several lens surfaces. At least two aspheric lens surfaces are arranged so as to be mutually adjacent. These mutually adjacently arranged lens surfaces are characterized as a double asphere. This at least one double asphere (21) is mounted at a minimum distance from an image plane (0′) which is greater than the maximum lens diameter (D2) of the objective.Type: GrantFiled: June 24, 2002Date of Patent: November 11, 2003Assignee: Carl Zeiss Semiconductor Manufacturing Technologies AGInventors: Karl-Heinz Schuster, David R. Shafer, Wilhelm Ulrich, Helmut Beierl, Wolfgang Singer
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Publication number: 20030179356Abstract: A projection objective has at least five lens groups (G1 to G5) and has several lens surfaces. At least two aspheric lens surfaces are arranged so as to be mutually adjacent. These mutually adjacently arranged lens surfaces are characterized as a double asphere. This at least one double asphere (21) is mounted at a minimum distance from an image plane (0′) which is greater than the maximum lens diameter (D2) of the objective.Type: ApplicationFiled: June 24, 2002Publication date: September 25, 2003Inventors: Karl-Heinz Schuster, David R. Shafer, Wilhelm Ulrich, Helmut Beierl, Wolfgang Singer