Patents by Inventor Helmut Daxinger
Helmut Daxinger has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 6068742Abstract: A target arrangement for a sputtering apparatus has a circular plate target with either a circumferential protrusion or recess which is symmetrical about a central plane through the target, the plane being perpendicular to the central axis of the target and located halfway between the top and bottom surfaces of the target. Each surface of the target is composed primarily of sputtering material. A magnetron for use with the target arrangement for easy changing of the target to sputter using the opposite surface of the target is disclosed. A process for using the target arrangement and magnetron assembly to sputter a work piece is also disclosed.Type: GrantFiled: August 23, 1996Date of Patent: May 30, 2000Assignee: Balzers AktiengesellschaftInventors: Helmut Daxinger, Walter Haag, Eduard Kugler
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Patent number: 5733419Abstract: A vacuum treatment chamber has a sputtering electrode and a counter electrode together defining a plasma discharge area. The counter electrode has an electrode surface area which is not visible from the sputtering electrode. A third electrode, together with the non-visible surface area, defines an auxiliary plasma discharge space. A substantially unencumbered propagative electron path is established between the discharge spaces. A plasma discharge is generated between the sputtering electrode and the counter electrode within a vacuum chamber.Type: GrantFiled: February 8, 1996Date of Patent: March 31, 1998Assignee: Balzers AktiengesellschaftInventors: Helmut Daxinger, Walter Haag
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Patent number: 5616373Abstract: The invention relates to a method for depositing a diamond coating on a workpiece, for instance a drawing die or a tool punch, whereby a reactive plasma supported coating method is used. According to the invention the generation of the plasma is made by a direct current discharge, whereby additionally a flow of charged particles is fed into the discharge gap; according to the invention the workpiece to be coated is positioned in the discharge gap. Due to the inventive design a relatively long discharge gap can be used, such that also large surface areas can be coated; the coating is made at a location of the highest homogeneity and density of the plasma. By means of the invention a method is provided which can be controlled regarding financial expenses and in a reliable manner and which is suitable for large surface area coating.Type: GrantFiled: March 18, 1994Date of Patent: April 1, 1997Assignee: Balzers AktiengesellschaftInventors: Johann Karner, Erich Bergmann, Helmut Daxinger
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Patent number: 5246787Abstract: A coated tool or instrument has a wear-resistant hard coating (7) which is preferably titanium nitride for working organic material which is disposed on a separating layer (9) applied on a basic body (3). The separating layer (9) comprises a ceramic electrically non-conducting material. Such a material is preferably an oxide, nitride or oxynitride of silicon. The separating layer (9) protects the basic body (3) of the tool or instrument of e.g. a non-corrosion resistant steel. During the coating of the basic body (3) with the ceramic material, a pulsating dc voltage is applied to the basic body (3) or its holders. The pulse height is changed during the vapor deposition from high negative values to low negative values.Type: GrantFiled: June 1, 1992Date of Patent: September 21, 1993Assignee: Balzers AktiengesellschaftInventors: Hans Schulz, Helmut Daxinger, Erich Bergmann, Jurgen Ramm
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Patent number: 5192578Abstract: For coating workpieces having basic bodies (3), with a ceramic, electrically non-conducting material, during the coating process a pulsating dc voltage is applied to the basic bodies (3) or their holders (36). Preferably the pulse height is changed during vaporization used for the coating process, from high negative values to smaller negative values. A further layer can be applied onto the workpieces coated in this way whereby these work-pieces, due to their excellent corrosion resistance, are suited as pieces of jewelry which can be exposed in particular to ocean water and body perspiration, as rolling bodies in which the use of oil or grease as corrosion protection can be dispensed with, and as separating and cutting tools for organic materials.Type: GrantFiled: November 14, 1990Date of Patent: March 9, 1993Assignee: Balzers AGInventors: Jurgen Ramm, Helmut Daxinger, Rainer Buhl, Erich Bergmann
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Patent number: 4448802Abstract: A method of evaporating an evaporative substance under vacuum comprises bombarding the evaporative substance with electrons from a low voltage arc discharge established between a cathode and an anode which is located in an evaporation chamber and simultaneously supplying additional power for evaporation to the evaporative substance by means of an electron gun which produces an electron energy in excess of one keV. A device for carrying out the invention comprises an evacuable bowl, an evaporation chamber with a receptacle therein for a substance to be evaporated and means for establishing a low voltage arc discharge between a cathode and an anode located in the evaporation chamber, a further provision of an electron gun for bombarding the substance with electrons which has an electron energy more than one kilovolt.Type: GrantFiled: March 12, 1982Date of Patent: May 15, 1984Assignee: Balzers AktiengesellschaftInventors: Rainer Buhl, Eberhard Moll, Helmut Daxinger
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Patent number: 4333962Abstract: A method of controlling color hues of coatings particularly gold color coatings on substrate using a housing capable of being evacuated, and having an evacuated chamber, a hot cathode chamber in communication with the evacuated chamber and a support structure for the substrate to be coated and a crucible for the material to be evaporated acting as an anode and with a hot cathode in the hot cathode chamber, comprises evaporating the material in the evaporation chamber while maintaining a residual gas atmosphere containing nitrogen therein, producing an electric gas arc discharge between the cathode and the anode of a low voltage, and mixing a carbon containing gaseous compound to the residual gas while applying a negative biasing voltage relative to the housing to the substrate to be coated.Type: GrantFiled: August 29, 1980Date of Patent: June 8, 1982Assignee: Balzers AktiengesellschaftInventors: Hans K. Pulker, Helmut Daxinger
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Patent number: 4254159Abstract: A method of producing gold-color coatings on substrates by evaporating a coating material comprising a metallic titanium or zirconium in a housing which has walls which define an evaporation space, comprises, maintaining a vacuum atmosphere containing N.sub.2 and argon in the space. The method is carried out using an anode connected to a power source to produce a low voltage arc discharge in the vicinity of the coating material which is arranged within the evaporation space and also maintaining a low voltage arc between the anode and the substrates. A potential difference between the anode and the substrates of a range of between 5 v and 100 v are maintained during the process and, in addition, the electrical potential of the substrates is maintained between 0 and 150 volts lower than the potential of the housing walls which define the evaporation space. The substrate to be coated is coated at a rate of from between 1 to 15 nanometers per second. The N.sub.Type: GrantFiled: December 20, 1978Date of Patent: March 3, 1981Assignee: Balzers Aktiengesellschaft fur Hochvakuumtechnik und Dunne SchichtenInventors: Hans K. Pulker, Helmut Daxinger
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Patent number: 4197175Abstract: A method and apparatus for evaporating materials in a vacuum evaporator by bombarding a material to be evaporated with electrons generated by a low voltage arc discharge sustained between a hot cathode and an anode comprising, locating the hot cathode in a chamber which is separated from an evaporation chamber wherein the hot cathode chamber communicates with the evaporation chamber through an aperture, connecting the material to be evaporated as the anode in the evaporation chamber, continuously introducing a gas into the hot cathode chamber while evacuating the evaporation chamber to maintain a pressure differential therebetween, and concentrating the beam of electrons by a magnetic field so as to obtain on the surface of the anode a power density sufficient for evaporation.Type: GrantFiled: May 26, 1978Date of Patent: April 8, 1980Assignee: Balzers AktiengesellschaftInventors: Eberhard Moll, Helmut Daxinger
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Patent number: 4101200Abstract: A light transmitting, absorbing coating is produced on a substrate by depositing layers of silicon in an oxidizing residual gas atmosphere and chrome in a non-oxidizing residual gas atmosphere in alternate layers cathode sputtering. The light transmitting layer comprises a substrate having a coating of a bluish-grey transmission color which comprises a plurality of alternate chrome and silicon dioxide layers with the thickness of the individual chrome layers being smaller than 10 nm.Type: GrantFiled: March 8, 1976Date of Patent: July 18, 1978Assignee: Balzers Patent-und Beteiligungs-AktiengesellschaftInventor: Helmut Daxinger
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Patent number: 4048039Abstract: A light transmitting, absorbing coating is produced on a substrate by depositing by cathode sputtering alternate layers of silicon in an oxidizing residual gas atmosphere and chrome in a non-oxidizing residual gas atmosphere. The light transmitting layer comprises a substrate having a coating of a bluish-grey transmission color which comprises a plurality of alternate chrome and silicon dioxide layers with the thickness of the individual chrome layers being smaller than 10 nm.Type: GrantFiled: October 21, 1976Date of Patent: September 13, 1977Assignee: Balzers Patent und Beteiligungs-AGInventor: Helmut Daxinger