Patents by Inventor Helmut Horst Tews
Helmut Horst Tews has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9786733Abstract: Structures and methods of forming moisture barrier capacitor on a semiconductor component are disclosed. The capacitor is located on the periphery of a semiconductor chip and includes an inner plate electrically connected to a voltage node, an outer plate with fins for electrically connecting to a different voltage node.Type: GrantFiled: March 26, 2015Date of Patent: October 10, 2017Assignee: Infineon Technologies AGInventors: Hans-Joachim Barth, Helmut Horst Tews
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Patent number: 9559204Abstract: In a method for forming a semiconductor device, a gate electrode is formed over a semiconductor body (e.g., bulk silicon substrate or SOI layer). The gate electrode is electrically insulated from the semiconductor body. A first sidewall spacer is formed along a sidewall of the gate electrode. A sacrificial sidewall spacer is formed adjacent the first sidewall spacer. The sacrificial sidewall spacer and the first sidewall spacer overlying the semiconductor body. A planarization layer is formed over the semiconductor body such that a portion of the planarization layer is adjacent the sacrificial sidewall spacer. The sacrificial sidewall spacer can then be removed and a recess etched in the semiconductor body. The recess is substantially aligned between the first sidewall spacer and the portion of the planarization layer. A semiconductor material (e.g., SiGe or SiC) can then be formed in the recess.Type: GrantFiled: January 13, 2015Date of Patent: January 31, 2017Assignee: Infineon Technologies AGInventors: Helmut Horst Tews, Andre Schenk
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Patent number: 9390975Abstract: A method for producing a tunnel field-effect transistor is disclosed. Connection regions of different doping types are produced by means of self-aligning implantation methods.Type: GrantFiled: January 7, 2015Date of Patent: July 12, 2016Assignee: Infineon Technologies AGInventors: Ronald Kakoschke, Helmut Horst Tews
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Publication number: 20150200244Abstract: Structures and methods of forming moisture barrier capacitor on a semiconductor component are disclosed. The capacitor is located on the periphery of a semiconductor chip and includes an inner plate electrically connected to a voltage node, an outer plate with fins for electrically connecting to a different voltage node.Type: ApplicationFiled: March 26, 2015Publication date: July 16, 2015Inventors: Hans-Joachim Barth, Helmut Horst Tews
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Publication number: 20150140770Abstract: A method for producing a tunnel field-effect transistor is disclosed. Connection regions of different doping types are produced by means of self-aligning implantation methods.Type: ApplicationFiled: January 7, 2015Publication date: May 21, 2015Inventors: Ronald Kakoschke, Helmut Horst Tews
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Publication number: 20150123201Abstract: In a method for forming a semiconductor device, a gate electrode is formed over a semiconductor body (e.g., bulk silicon substrate or SOI layer). The gate electrode is electrically insulated from the semiconductor body. A first sidewall spacer is formed along a sidewall of the gate electrode. A sacrificial sidewall spacer is formed adjacent the first sidewall spacer. The sacrificial sidewall spacer and the first sidewall spacer overlying the semiconductor body. A planarization layer is formed over the semiconductor body such that a portion of the planarization layer is adjacent the sacrificial sidewall spacer. The sacrificial sidewall spacer can then be removed and a recess etched in the semiconductor body. The recess is substantially aligned between the first sidewall spacer and the portion of the planarization layer. A semiconductor material (e.g., SiGe or SiC) can then be formed in the recess.Type: ApplicationFiled: January 13, 2015Publication date: May 7, 2015Inventors: Helmut Horst Tews, Andre Schenk
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Patent number: 9012297Abstract: Structures and methods of forming moisture barrier capacitor on a semiconductor component are disclosed. The capacitor is located on the periphery of a semiconductor chip and includes an inner plate electrically connected to a voltage node, an outer plate with fins for electrically connecting to a different voltage node.Type: GrantFiled: September 7, 2010Date of Patent: April 21, 2015Assignee: Infineon Technologies AGInventors: Hans-Joachim Barth, Helmut Horst Tews
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Patent number: 8946034Abstract: In a method for forming a semiconductor device, a gate electrode is formed over a semiconductor body (e.g., bulk silicon substrate or SOI layer). The gate electrode is electrically insulated from the semiconductor body. A first sidewall spacer is formed along a sidewall of the gate electrode. A sacrificial sidewall spacer is formed adjacent the first sidewall spacer. The sacrificial sidewall spacer and the first sidewall spacer overlying the semiconductor body. A planarization layer is formed over the semiconductor body such that a portion of the planarization layer is adjacent the sacrificial sidewall spacer. The sacrificial sidewall spacer can then be removed and a recess etched in the semiconductor body. The recess is substantially aligned between the first sidewall spacer and the portion of the planarization layer. A semiconductor material (e.g., SiGe or SiC) can then be formed in the recess.Type: GrantFiled: November 22, 2013Date of Patent: February 3, 2015Assignee: Infineon Technologies AGInventors: Helmut Horst Tews, Andre Schenk
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Publication number: 20140077299Abstract: In a method for forming a semiconductor device, a gate electrode is formed over a semiconductor body (e.g., bulk silicon substrate or SOI layer). The gate electrode is electrically insulated from the semiconductor body. A first sidewall spacer is formed along a sidewall of the gate electrode. A sacrificial sidewall spacer is formed adjacent the first sidewall spacer. The sacrificial sidewall spacer and the first sidewall spacer overlying the semiconductor body. A planarization layer is formed over the semiconductor body such that a portion of the planarization layer is adjacent the sacrificial sidewall spacer. The sacrificial sidewall spacer can then be removed and a recess etched in the semiconductor body. The recess is substantially aligned between the first sidewall spacer and the portion of the planarization layer. A semiconductor material (e.g., SiGe or SiC) can then be formed in the recess.Type: ApplicationFiled: November 22, 2013Publication date: March 20, 2014Applicant: INFINEON TECHNOLOGIES AGInventors: Helmut Horst Tews, Andre Schenk
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Patent number: 8624334Abstract: In a method for forming a semiconductor device, a gate electrode is formed over a semiconductor body (e.g., bulk silicon substrate or SOI layer). The gate electrode is electrically insulated from the semiconductor body. A first sidewall spacer is formed along a sidewall of the gate electrode. A sacrificial sidewall spacer is formed adjacent the first sidewall spacer. The sacrificial sidewall spacer and the first sidewall spacer overlying the semiconductor body. A planarization layer is formed over the semiconductor body such that a portion of the planarization layer is adjacent the sacrificial sidewall spacer. The sacrificial sidewall spacer can then be removed and a recess etched in the semiconductor body. The recess is substantially aligned between the first sidewall spacer and the portion of the planarization layer. A semiconductor material (e.g., SiGe or SiC) can then be formed in the recess.Type: GrantFiled: July 29, 2011Date of Patent: January 7, 2014Assignee: Infineon Technologies AGInventors: Helmut Horst Tews, Andre Schenk
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Patent number: 8569820Abstract: Semiconductor devices and methods of manufacture thereof are disclosed. In one embodiment, a capacitor plate includes a plurality of first parallel conductive members, and a plurality of second parallel conductive members disposed over the plurality of first parallel conductive members. A first base member is coupled to an end of the plurality of first parallel conductive members, and a second base member is coupled to an end of the plurality of second parallel conductive members. A connecting member is disposed between the plurality of first parallel conductive members and the plurality of second parallel conductive members, wherein the connecting member includes at least one elongated via.Type: GrantFiled: January 6, 2012Date of Patent: October 29, 2013Assignee: Infineon Technologies AGInventors: Hans-Joachim Barth, Erwin Ruderer, Alexander Von Glasow, Philipp Riess, Erdem Kaltalioglu, Peter Baumgartner, Thomas Benetik, Helmut Horst Tews
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Publication number: 20120099243Abstract: Semiconductor devices and methods of manufacture thereof are disclosed. In one embodiment, a capacitor plate includes a plurality of first parallel conductive members, and a plurality of second parallel conductive members disposed over the plurality of first parallel conductive members. A first base member is coupled to an end of the plurality of first parallel conductive members, and a second base member is coupled to an end of the plurality of second parallel conductive members. A connecting member is disposed between the plurality of first parallel conductive members and the plurality of second parallel conductive members, wherein the connecting member includes at least one elongated via.Type: ApplicationFiled: January 6, 2012Publication date: April 26, 2012Applicant: Infineon Technologies AGInventors: Hans-Joachim Barth, Erwin Ruderer, Alexander Von Glasow, Philipp Riess, Erdem Kaltalioglu, Peter Baumgartner, Thomas Benetik, Helmut Horst Tews
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Patent number: 8138539Abstract: Semiconductor devices and methods of manufacture thereof are disclosed. In one embodiment, a capacitor plate includes a plurality of first parallel conductive members, and a plurality of second parallel conductive members disposed over the plurality of first parallel conductive members. A first base member is coupled to an end of the plurality of first parallel conductive members, and a second base member is coupled to an end of the plurality of second parallel conductive members. A connecting member is disposed between the plurality of first parallel conductive members and the plurality of second parallel conductive members, wherein the connecting member includes at least one elongated via.Type: GrantFiled: November 29, 2007Date of Patent: March 20, 2012Assignee: Infineon Technologies AGInventors: Hans-Joachim Barth, Erwin Ruderer, Alexander Von Glasow, Philipp Riess, Erdem Kaltalioglu, Peter Baumgartner, Thomas Benetik, Helmut Horst Tews
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Publication number: 20110278680Abstract: In a method for forming a semiconductor device, a gate electrode is formed over a semiconductor body (e.g., bulk silicon substrate or SOI layer). The gate electrode is electrically insulated from the semiconductor body. A first sidewall spacer is formed along a sidewall of the gate electrode. A sacrificial sidewall spacer is formed adjacent the first sidewall spacer. The sacrificial sidewall spacer and the first sidewall spacer overlying the semiconductor body. A planarization layer is formed over the semiconductor body such that a portion of the planarization layer is adjacent the sacrificial sidewall spacer. The sacrificial sidewall spacer can then be removed and a recess etched in the semiconductor body. The recess is substantially aligned between the first sidewall spacer and the portion of the planarization layer. A semiconductor material (e.g., SiGe or SiC) can then be formed in the recess.Type: ApplicationFiled: July 29, 2011Publication date: November 17, 2011Applicant: Infineon Technologies AGInventors: Helmut Horst Tews, Andre Schenk
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Patent number: 8003470Abstract: In a method for forming a semiconductor device, a gate electrode is formed over a semiconductor body (e.g., bulk silicon substrate or SOI layer). The gate electrode is electrically insulated from the semiconductor body. A first sidewall spacer is formed along a sidewall of the gate electrode. A sacrificial sidewall spacer is formed adjacent the first sidewall spacer. The sacrificial sidewall spacer and the first sidewall spacer overlying the semiconductor body. A planarization layer is formed over the semiconductor body such that a portion of the planarization layer is adjacent the sacrificial sidewall spacer. The sacrificial sidewall spacer can then be removed and a recess etched in the semiconductor body. The recess is substantially aligned between the first sidewall spacer and the portion of the planarization layer. A semiconductor material (e.g., SiGe or SiC) can then be formed in the recess.Type: GrantFiled: September 13, 2005Date of Patent: August 23, 2011Assignee: Infineon Technologies AGInventors: Helmut Horst Tews, Andre Schenk
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Publication number: 20100330771Abstract: Structures and methods of forming moisture barrier capacitor on a semiconductor component are disclosed. The capacitor is located on the periphery of a semiconductor chip and includes an inner plate electrically connected to a voltage node, an outer plate with fins for electrically connecting to a different voltage node.Type: ApplicationFiled: September 7, 2010Publication date: December 30, 2010Inventors: Hans-Joachim Barth, Helmut Horst Tews
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Patent number: 7812424Abstract: Structures and methods of forming moisture barrier capacitor on a semiconductor component are disclosed. The capacitor is located on the periphery of a semiconductor chip and includes an inner plate electrically connected to a voltage node, an outer plate with fins for electrically connecting to a different voltage node.Type: GrantFiled: December 21, 2007Date of Patent: October 12, 2010Assignee: Infineon Technologies AGInventors: Hans-Joachim Barth, Helmut Horst Tews
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Patent number: 7767562Abstract: A semiconductor body has a first portion, a second portion, and an active area located between the first portion and the second portion. The first portion and the second portion are a shallow trench isolation region having an exposed surface extending above the surface of the active area. A first ion implantation is performed at a first angle such that a first shaded area defined by the exposed surface of the first portion and the first angle is exposed to fewer ions than a first unshaded area. A second ion implantation is performed at a second angle such that a second shaded area defined by the exposed surface of the second portion and the second angle is exposed to fewer ions than a second unshaded area.Type: GrantFiled: September 26, 2005Date of Patent: August 3, 2010Assignee: Qimonda AGInventors: Helmut Horst Tews, Jochen Beintner
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Publication number: 20090160020Abstract: Structures and methods of forming moisture barrier capacitor on a semiconductor component are disclosed. The capacitor is located on the periphery of a semiconductor chip and includes an inner plate electrically connected to a voltage node, an outer plate with fins for electrically connecting to a different voltage node.Type: ApplicationFiled: December 21, 2007Publication date: June 25, 2009Inventors: Hans-Joachim Barth, Helmut Horst Tews
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Publication number: 20090141424Abstract: Semiconductor devices and methods of manufacture thereof are disclosed. In one embodiment, a capacitor plate includes a plurality of first parallel conductive members, and a plurality of second parallel conductive members disposed over the plurality of first parallel conductive members. A first base member is coupled to an end of the plurality of first parallel conductive members, and a second base member is coupled to an end of the plurality of second parallel conductive members. A connecting member is disposed between the plurality of first parallel conductive members and the plurality of second parallel conductive members, wherein the connecting member includes at least one elongated via.Type: ApplicationFiled: November 29, 2007Publication date: June 4, 2009Inventors: Hans-Joachim Barth, Erwin Ruderer, Alexander Von Glasow, Philipp Riess, Erdem Kaltalioglu, Peter Baumgartner, Thomas Benetik, Helmut Horst Tews