Patents by Inventor Helmut Horst Tews

Helmut Horst Tews has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9786733
    Abstract: Structures and methods of forming moisture barrier capacitor on a semiconductor component are disclosed. The capacitor is located on the periphery of a semiconductor chip and includes an inner plate electrically connected to a voltage node, an outer plate with fins for electrically connecting to a different voltage node.
    Type: Grant
    Filed: March 26, 2015
    Date of Patent: October 10, 2017
    Assignee: Infineon Technologies AG
    Inventors: Hans-Joachim Barth, Helmut Horst Tews
  • Patent number: 9559204
    Abstract: In a method for forming a semiconductor device, a gate electrode is formed over a semiconductor body (e.g., bulk silicon substrate or SOI layer). The gate electrode is electrically insulated from the semiconductor body. A first sidewall spacer is formed along a sidewall of the gate electrode. A sacrificial sidewall spacer is formed adjacent the first sidewall spacer. The sacrificial sidewall spacer and the first sidewall spacer overlying the semiconductor body. A planarization layer is formed over the semiconductor body such that a portion of the planarization layer is adjacent the sacrificial sidewall spacer. The sacrificial sidewall spacer can then be removed and a recess etched in the semiconductor body. The recess is substantially aligned between the first sidewall spacer and the portion of the planarization layer. A semiconductor material (e.g., SiGe or SiC) can then be formed in the recess.
    Type: Grant
    Filed: January 13, 2015
    Date of Patent: January 31, 2017
    Assignee: Infineon Technologies AG
    Inventors: Helmut Horst Tews, Andre Schenk
  • Patent number: 9390975
    Abstract: A method for producing a tunnel field-effect transistor is disclosed. Connection regions of different doping types are produced by means of self-aligning implantation methods.
    Type: Grant
    Filed: January 7, 2015
    Date of Patent: July 12, 2016
    Assignee: Infineon Technologies AG
    Inventors: Ronald Kakoschke, Helmut Horst Tews
  • Publication number: 20150200244
    Abstract: Structures and methods of forming moisture barrier capacitor on a semiconductor component are disclosed. The capacitor is located on the periphery of a semiconductor chip and includes an inner plate electrically connected to a voltage node, an outer plate with fins for electrically connecting to a different voltage node.
    Type: Application
    Filed: March 26, 2015
    Publication date: July 16, 2015
    Inventors: Hans-Joachim Barth, Helmut Horst Tews
  • Publication number: 20150140770
    Abstract: A method for producing a tunnel field-effect transistor is disclosed. Connection regions of different doping types are produced by means of self-aligning implantation methods.
    Type: Application
    Filed: January 7, 2015
    Publication date: May 21, 2015
    Inventors: Ronald Kakoschke, Helmut Horst Tews
  • Publication number: 20150123201
    Abstract: In a method for forming a semiconductor device, a gate electrode is formed over a semiconductor body (e.g., bulk silicon substrate or SOI layer). The gate electrode is electrically insulated from the semiconductor body. A first sidewall spacer is formed along a sidewall of the gate electrode. A sacrificial sidewall spacer is formed adjacent the first sidewall spacer. The sacrificial sidewall spacer and the first sidewall spacer overlying the semiconductor body. A planarization layer is formed over the semiconductor body such that a portion of the planarization layer is adjacent the sacrificial sidewall spacer. The sacrificial sidewall spacer can then be removed and a recess etched in the semiconductor body. The recess is substantially aligned between the first sidewall spacer and the portion of the planarization layer. A semiconductor material (e.g., SiGe or SiC) can then be formed in the recess.
    Type: Application
    Filed: January 13, 2015
    Publication date: May 7, 2015
    Inventors: Helmut Horst Tews, Andre Schenk
  • Patent number: 9012297
    Abstract: Structures and methods of forming moisture barrier capacitor on a semiconductor component are disclosed. The capacitor is located on the periphery of a semiconductor chip and includes an inner plate electrically connected to a voltage node, an outer plate with fins for electrically connecting to a different voltage node.
    Type: Grant
    Filed: September 7, 2010
    Date of Patent: April 21, 2015
    Assignee: Infineon Technologies AG
    Inventors: Hans-Joachim Barth, Helmut Horst Tews
  • Patent number: 8946034
    Abstract: In a method for forming a semiconductor device, a gate electrode is formed over a semiconductor body (e.g., bulk silicon substrate or SOI layer). The gate electrode is electrically insulated from the semiconductor body. A first sidewall spacer is formed along a sidewall of the gate electrode. A sacrificial sidewall spacer is formed adjacent the first sidewall spacer. The sacrificial sidewall spacer and the first sidewall spacer overlying the semiconductor body. A planarization layer is formed over the semiconductor body such that a portion of the planarization layer is adjacent the sacrificial sidewall spacer. The sacrificial sidewall spacer can then be removed and a recess etched in the semiconductor body. The recess is substantially aligned between the first sidewall spacer and the portion of the planarization layer. A semiconductor material (e.g., SiGe or SiC) can then be formed in the recess.
    Type: Grant
    Filed: November 22, 2013
    Date of Patent: February 3, 2015
    Assignee: Infineon Technologies AG
    Inventors: Helmut Horst Tews, Andre Schenk
  • Publication number: 20140077299
    Abstract: In a method for forming a semiconductor device, a gate electrode is formed over a semiconductor body (e.g., bulk silicon substrate or SOI layer). The gate electrode is electrically insulated from the semiconductor body. A first sidewall spacer is formed along a sidewall of the gate electrode. A sacrificial sidewall spacer is formed adjacent the first sidewall spacer. The sacrificial sidewall spacer and the first sidewall spacer overlying the semiconductor body. A planarization layer is formed over the semiconductor body such that a portion of the planarization layer is adjacent the sacrificial sidewall spacer. The sacrificial sidewall spacer can then be removed and a recess etched in the semiconductor body. The recess is substantially aligned between the first sidewall spacer and the portion of the planarization layer. A semiconductor material (e.g., SiGe or SiC) can then be formed in the recess.
    Type: Application
    Filed: November 22, 2013
    Publication date: March 20, 2014
    Applicant: INFINEON TECHNOLOGIES AG
    Inventors: Helmut Horst Tews, Andre Schenk
  • Patent number: 8624334
    Abstract: In a method for forming a semiconductor device, a gate electrode is formed over a semiconductor body (e.g., bulk silicon substrate or SOI layer). The gate electrode is electrically insulated from the semiconductor body. A first sidewall spacer is formed along a sidewall of the gate electrode. A sacrificial sidewall spacer is formed adjacent the first sidewall spacer. The sacrificial sidewall spacer and the first sidewall spacer overlying the semiconductor body. A planarization layer is formed over the semiconductor body such that a portion of the planarization layer is adjacent the sacrificial sidewall spacer. The sacrificial sidewall spacer can then be removed and a recess etched in the semiconductor body. The recess is substantially aligned between the first sidewall spacer and the portion of the planarization layer. A semiconductor material (e.g., SiGe or SiC) can then be formed in the recess.
    Type: Grant
    Filed: July 29, 2011
    Date of Patent: January 7, 2014
    Assignee: Infineon Technologies AG
    Inventors: Helmut Horst Tews, Andre Schenk
  • Patent number: 8569820
    Abstract: Semiconductor devices and methods of manufacture thereof are disclosed. In one embodiment, a capacitor plate includes a plurality of first parallel conductive members, and a plurality of second parallel conductive members disposed over the plurality of first parallel conductive members. A first base member is coupled to an end of the plurality of first parallel conductive members, and a second base member is coupled to an end of the plurality of second parallel conductive members. A connecting member is disposed between the plurality of first parallel conductive members and the plurality of second parallel conductive members, wherein the connecting member includes at least one elongated via.
    Type: Grant
    Filed: January 6, 2012
    Date of Patent: October 29, 2013
    Assignee: Infineon Technologies AG
    Inventors: Hans-Joachim Barth, Erwin Ruderer, Alexander Von Glasow, Philipp Riess, Erdem Kaltalioglu, Peter Baumgartner, Thomas Benetik, Helmut Horst Tews
  • Publication number: 20120099243
    Abstract: Semiconductor devices and methods of manufacture thereof are disclosed. In one embodiment, a capacitor plate includes a plurality of first parallel conductive members, and a plurality of second parallel conductive members disposed over the plurality of first parallel conductive members. A first base member is coupled to an end of the plurality of first parallel conductive members, and a second base member is coupled to an end of the plurality of second parallel conductive members. A connecting member is disposed between the plurality of first parallel conductive members and the plurality of second parallel conductive members, wherein the connecting member includes at least one elongated via.
    Type: Application
    Filed: January 6, 2012
    Publication date: April 26, 2012
    Applicant: Infineon Technologies AG
    Inventors: Hans-Joachim Barth, Erwin Ruderer, Alexander Von Glasow, Philipp Riess, Erdem Kaltalioglu, Peter Baumgartner, Thomas Benetik, Helmut Horst Tews
  • Patent number: 8138539
    Abstract: Semiconductor devices and methods of manufacture thereof are disclosed. In one embodiment, a capacitor plate includes a plurality of first parallel conductive members, and a plurality of second parallel conductive members disposed over the plurality of first parallel conductive members. A first base member is coupled to an end of the plurality of first parallel conductive members, and a second base member is coupled to an end of the plurality of second parallel conductive members. A connecting member is disposed between the plurality of first parallel conductive members and the plurality of second parallel conductive members, wherein the connecting member includes at least one elongated via.
    Type: Grant
    Filed: November 29, 2007
    Date of Patent: March 20, 2012
    Assignee: Infineon Technologies AG
    Inventors: Hans-Joachim Barth, Erwin Ruderer, Alexander Von Glasow, Philipp Riess, Erdem Kaltalioglu, Peter Baumgartner, Thomas Benetik, Helmut Horst Tews
  • Publication number: 20110278680
    Abstract: In a method for forming a semiconductor device, a gate electrode is formed over a semiconductor body (e.g., bulk silicon substrate or SOI layer). The gate electrode is electrically insulated from the semiconductor body. A first sidewall spacer is formed along a sidewall of the gate electrode. A sacrificial sidewall spacer is formed adjacent the first sidewall spacer. The sacrificial sidewall spacer and the first sidewall spacer overlying the semiconductor body. A planarization layer is formed over the semiconductor body such that a portion of the planarization layer is adjacent the sacrificial sidewall spacer. The sacrificial sidewall spacer can then be removed and a recess etched in the semiconductor body. The recess is substantially aligned between the first sidewall spacer and the portion of the planarization layer. A semiconductor material (e.g., SiGe or SiC) can then be formed in the recess.
    Type: Application
    Filed: July 29, 2011
    Publication date: November 17, 2011
    Applicant: Infineon Technologies AG
    Inventors: Helmut Horst Tews, Andre Schenk
  • Patent number: 8003470
    Abstract: In a method for forming a semiconductor device, a gate electrode is formed over a semiconductor body (e.g., bulk silicon substrate or SOI layer). The gate electrode is electrically insulated from the semiconductor body. A first sidewall spacer is formed along a sidewall of the gate electrode. A sacrificial sidewall spacer is formed adjacent the first sidewall spacer. The sacrificial sidewall spacer and the first sidewall spacer overlying the semiconductor body. A planarization layer is formed over the semiconductor body such that a portion of the planarization layer is adjacent the sacrificial sidewall spacer. The sacrificial sidewall spacer can then be removed and a recess etched in the semiconductor body. The recess is substantially aligned between the first sidewall spacer and the portion of the planarization layer. A semiconductor material (e.g., SiGe or SiC) can then be formed in the recess.
    Type: Grant
    Filed: September 13, 2005
    Date of Patent: August 23, 2011
    Assignee: Infineon Technologies AG
    Inventors: Helmut Horst Tews, Andre Schenk
  • Publication number: 20100330771
    Abstract: Structures and methods of forming moisture barrier capacitor on a semiconductor component are disclosed. The capacitor is located on the periphery of a semiconductor chip and includes an inner plate electrically connected to a voltage node, an outer plate with fins for electrically connecting to a different voltage node.
    Type: Application
    Filed: September 7, 2010
    Publication date: December 30, 2010
    Inventors: Hans-Joachim Barth, Helmut Horst Tews
  • Patent number: 7812424
    Abstract: Structures and methods of forming moisture barrier capacitor on a semiconductor component are disclosed. The capacitor is located on the periphery of a semiconductor chip and includes an inner plate electrically connected to a voltage node, an outer plate with fins for electrically connecting to a different voltage node.
    Type: Grant
    Filed: December 21, 2007
    Date of Patent: October 12, 2010
    Assignee: Infineon Technologies AG
    Inventors: Hans-Joachim Barth, Helmut Horst Tews
  • Patent number: 7767562
    Abstract: A semiconductor body has a first portion, a second portion, and an active area located between the first portion and the second portion. The first portion and the second portion are a shallow trench isolation region having an exposed surface extending above the surface of the active area. A first ion implantation is performed at a first angle such that a first shaded area defined by the exposed surface of the first portion and the first angle is exposed to fewer ions than a first unshaded area. A second ion implantation is performed at a second angle such that a second shaded area defined by the exposed surface of the second portion and the second angle is exposed to fewer ions than a second unshaded area.
    Type: Grant
    Filed: September 26, 2005
    Date of Patent: August 3, 2010
    Assignee: Qimonda AG
    Inventors: Helmut Horst Tews, Jochen Beintner
  • Publication number: 20090160020
    Abstract: Structures and methods of forming moisture barrier capacitor on a semiconductor component are disclosed. The capacitor is located on the periphery of a semiconductor chip and includes an inner plate electrically connected to a voltage node, an outer plate with fins for electrically connecting to a different voltage node.
    Type: Application
    Filed: December 21, 2007
    Publication date: June 25, 2009
    Inventors: Hans-Joachim Barth, Helmut Horst Tews
  • Publication number: 20090141424
    Abstract: Semiconductor devices and methods of manufacture thereof are disclosed. In one embodiment, a capacitor plate includes a plurality of first parallel conductive members, and a plurality of second parallel conductive members disposed over the plurality of first parallel conductive members. A first base member is coupled to an end of the plurality of first parallel conductive members, and a second base member is coupled to an end of the plurality of second parallel conductive members. A connecting member is disposed between the plurality of first parallel conductive members and the plurality of second parallel conductive members, wherein the connecting member includes at least one elongated via.
    Type: Application
    Filed: November 29, 2007
    Publication date: June 4, 2009
    Inventors: Hans-Joachim Barth, Erwin Ruderer, Alexander Von Glasow, Philipp Riess, Erdem Kaltalioglu, Peter Baumgartner, Thomas Benetik, Helmut Horst Tews