Patents by Inventor Helmut ISSLER

Helmut ISSLER has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD OF MEASURING A SHAPE OF AN OPTICAL SURFACE BASED ON COMPUTATIONALLY COMBINED SURFACE REGION MEASUREMENTS AND INTERFEROMETRIC MEASURING DEVICE
    Publication number: 20140078513
    Abstract: Measuring a shape of an optical surface (14) of a test object (12) includes: providing an interferometric measuring device (16) generating a measurement wave (18); arranging the measuring device (16) and the test object (12) consecutively at different measurement positions relative to each other, such that different regions (20) of the optical surface (14) are illuminated by the measurement wave (18); measuring positional coordinates of the measuring device (16) at the different measurement positions in relation to the test object (12); obtaining surface region measurements by interferometrically measuring the wavefront of the measurement wave (18) after interaction with the respective region (20) of the optical surface (14) using the measuring device (16) in each of the measurement positions; and determining the actual shape of the optical surface (14) by computationally combining the sub-surface measurements based on the measured positional coordinates of the measuring device (16) at each of the measurement
    Type: Application
    Filed: November 22, 2013
    Publication date: March 20, 2014
    Applicant: CARL ZEISS SMT GmbH
    Inventors: Rolf FREIMANN, Bernd DOERBAND, Stefan SCHULTE, Albrecht HOF, Frank RIEPENHAUSEN, Matthias MANGER, Dietmar NEUGEBAUER, Helmut ISSLER, Armin BICH
  • Method of measuring a shape of an optical surface based on computationally combined surface region measurements and interferometric measuring device
    Patent number: 8593642
    Abstract: Measuring a shape of an optical surface (14) of a test object (12) includes: providing an interferometric measuring device (16) generating a measurement wave (18); arranging the measuring device (16) and the test object (12) consecutively at different measurement positions relative to each other, such that different regions (20) of the optical surface (14) are illuminated by the measurement wave (18); measuring positional coordinates of the measuring device (16) at the different measurement positions in relation to the test object (12); obtaining surface region measurements by interferometrically measuring the wavefront of the measurement wave (18) after interaction with the respective region (20) of the optical surface (14) using the measuring device (16) in each of the measurement positions; and determining the actual shape of the optical surface (14) by computationally combining the surface region measurements based on the measured positional coordinates of the measuring device (16) at each of the measurem
    Type: Grant
    Filed: March 12, 2012
    Date of Patent: November 26, 2013
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Rolf Freimann, Bernd Doerband, Stefan Schulte, Albrecht Hof, Frank Riepenhausen, Matthias Manger, Dietmar Neugebauer, Helmut Issler, Armin Bich
  • METHOD OF MEASURING A SHAPE OF AN OPTICAL SURFACE AND INTERFEROMETRIC MEASURING DEVICE
    Publication number: 20120229814
    Abstract: Measuring a shape of an optical surface (14) of a test object (12) includes: providing an interferometric measuring device (16) generating a measurement wave (18); arranging the measuring device (16) and the test object (12) consecutively at different measurement positions relative to each other, such that different regions (20) of the optical surface (14) are illuminated by the measurement wave (18); measuring positional coordinates of the measuring device (16) at the different measurement positions in relation to the test object (12); obtaining surface region measurements by interferometrically measuring the wavefront of the measurement wave (18) after interaction with the respective region (20) of the optical surface (14) using the measuring device (16) in each of the measurement positions; and determining the actual shape of the optical surface (14) by computationally combining the sub-surface measurements based on the measured positional coordinates of the measuring device (16) at each of the measurement
    Type: Application
    Filed: March 12, 2012
    Publication date: September 13, 2012
    Applicant: CARL ZEISS SMT GMBH
    Inventors: Rolf FREIMANN, Bernd BOERBAND, Stefan SCHULTE, Albrecht HOF, Frank RIEPENHAUSEN, Matthias MANGER, Dietmar NEUGEBAUER, Helmut ISSLER, Armin BICH