Abstract: A device for generating extreme ultraviolet (EUV) or soft X-ray radiation comprising: a laser source for producing a laser radiation which is focused to intensities beyond 106 W/cm2 onto a target to produce a plasma; and said electrodes located around the path of the plasma produced by the laser source; and said electrodes being combined with components for producing a rapid electric discharge in the plasma with a characteristic time constant which is less than the time constant of the laser produced plasma expansion time.

Abstract: A device for generating extreme ultraviolet (EUV) or soft X-ray radiation comprising: a laser source for producing a laser radiation which is focused to intensities beyond 106 W/cm2 onto a target to produce a plasma; and said electrodes located around the path of the plasma produced by the laser source; and said electrodes being combined with components for producing a rapid electric discharge in the plasma with a characteristic time constant which is less than the time constant of the laser produced plasma expansion time.

Abstract: A process is described for manufacturing vertically withdrawn pipes from quartz glass or glasses having a high content of silica with only minor diameter deviation. In an electrically heated furnace, the initial material is heated up to the softening point. A pipe is formed in a deformation zone and is downwardly withdrawn. In this deformation zone, a constant pressure difference is maintained between the pressure in the pipe interior and the pressure in a chamber and/or heating chamber. The pressure is continuously measured and controlled so as to be at a constant difference. In order to maintain a higher pressure in the pipe interior as opposed to the pressure in the chamber and/or the heating chamber, the withdrawn pipe end of the pipe to be manufactured is sealed.