Patents by Inventor Helmut Paltzer

Helmut Paltzer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process for the wet-chemical surface treatment of a semiconductor wafer
    Publication number: 20040266191
    Abstract: A process for the wet-chemical surface treatment of a semiconductor wafer has the semiconductor wafer being treated with an acidic liquid, with at most 10 &mgr;m of material being removed from each surface of the semiconductor wafer, and then this wafer is treated with an alkaline liquid, with at least sufficient material being removed for the crystal regions which have been damaged by a previous mechanical treatment to be completely removed.
    Type: Application
    Filed: June 25, 2004
    Publication date: December 30, 2004
    Inventors: Gunter Schwab, Helmut Franke, Helmut Paltzer, Manfred Schofberger, Maximilian Stadler