Patents by Inventor Helmut Schilling

Helmut Schilling has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Target cooling system with trough
    Patent number: 5421978
    Abstract: Cathode sputtering apparatus includes a target, a cooling channel, and a flexible diaphragm therebetween. The target is fixed to a base independently of the diaphragm, so that the target can be replaced with disturbing the cooling channel. In a preferred embodiment, the diaphragm and the target are fixed by respective sets of cleats retained by screws received from respective opposite directions.
    Type: Grant
    Filed: December 28, 1993
    Date of Patent: June 6, 1995
    Assignee: Leybold Aktiengesellschaft
    Inventors: Manfred Schuhmacher, Helmut Schilling, Gerhard Joos