Abstract: Integrated microsystem comprising electrical and nonelectrical, particularly optical functions in a laser system, wherein a base comprising anisotropically etchable semiconducting material on which etching structures for receiving optical and/or electro-optical and electrical/electronic and/or fluidic and/or mechanical elements or their mountings are arranged in predetermined distances and/or levels, as well as integrated switching circuits, and that at least a part of the optical, electro-optical or mechanical elements or their mounting is controllable and movable electrically in such a way that its position relative to the base is actively changeable, and that at least one sensor is provided which determines the effect of the position change on the function of at least a part of a microsystem and supplies a signal for repeated readjustment (self-adjusting) of optical elements and their mounting.

Abstract: A micromechanical structure with cavities, containers, openings, canals, depressions, humps or the like for examinations of sample substances for possible changes of physical and/or chemical properties with targeted evaluation and documentation for the purposes of biotechnology, gene technology, cell and immune research and other medical, agricultural and environment research, where the structure consists of semiconducting material (of the group III to V of the elements of the periodic system) or contain the latter or glass or ceramic, diamond, or carbon and is made by a masking technique, especially by a chemical etching technique.

Abstract: A strapdown measuring unit for measuring the angular velocities about the three axes of a flying body rotating relatively fast about its first axis is disclosed. The unit combines a Sagnac effect sensor for roll rate determination and two micro-mechanical acceleration sensors whose output, combined mathematically with the output of the Sagnac effect sensor, determines the angular velocity of the remaining two axes. The mathematical calculations are performed by a dedicated microprocessor which is integrated with the three sensors into a single small unit.

Abstract: A frequency-selective sound transducer comprised of a number of resonators with differing but sequential natural frequencies arranged in a first plane. A deformable membrane is arranged in a second plane, parallel to the first plane and in close proximity thereto. A small air gap thus exists between the first and second planes. Sound waves produce vibratory motion in the membrane, which motion is transmitted to the resonators by pressure waves generated by the membrane in the air between the membrane and resonators. The deflections of the resonators are converted into electrical signals.

Abstract: A fiber optic sensor for the detection of mechanical quantities comprising a light source, a first fiber optic waveguide coupled to the light source, the front face of the first waveguide being ground at a 45.degree. angle to the axis of the fiber and mirrored, a second fiber optic waveguide arranged parallel to the first waveguide, the front face of the second waveguide being ground at a 45.degree. angle to the axis of the fiber and mirrored, the two mirrored faces being held opposite to one another, and a photoelement receiver coupled to the other end of the second waveguide. At least one of the waveguides can move either along the fiber axis or around the fiber axis relative to the other waveguide, the motion varying the light received by the receiver and thereby indicating the magnitude of the mechanical quantity.