Abstract: A method includes providing a first power from an output terminal of a balanced amplifier to a discharge chamber. The balanced amplifier includes two amplifier paths, each of which supplies a signal to a coupler. The coupler is configured to combine the signals as a function of their phase relationship and supply a power as the first power to the output terminal and/or as a second power to an isolation terminal. The method further includes setting a first phase relationship between the signals for a predefined time in order to ignite the plasma, and setting a second phase relationship in order to maintain the plasma. Under the second phase relationship, substantially an entirety of the power is supplied to the output terminal. Under the first phase relationship, a third power reflected from the discharge chamber is reflected back to the discharge chamber in a proportion large enough for the ignition.

Abstract: A method for igniting and supplying a laser or a processing plasma in a discharge chamber with electrical power includes providing a power from an output terminal of an amplifier to the discharge chamber. The amplifier includes two amplifier paths, each of which supplies a respective signal to a combiner. The combiner is configured to combine the signals as a function of an amplitude relationship and/or a phase relationship between the signals and to supply the power to the output terminal and/or an isolation terminal. The method further includes actuating an impedance switching arrangement connected to the isolation terminal and a ground according to a first actuation mode in order to ignite the laser or the processing plasma, and actuating the impedance switching arrangement according to a second actuation mode in order to operate the laser or maintain the processing plasma in the discharge chamber.