Patents by Inventor Helmuth Harms-Janssen

Helmuth Harms-Janssen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and device for wet-processing substrates in a vessel
    Patent number: 5879464
    Abstract: A method and device for the wet processing of substrates in a container are provided. At least one liquid is introduced via at least one liquid inlet into the container. A liquid overflow device is adapted to float on the surface of the liquid in the container. The overflow device is provided with openings for withdrawing liquid from the container. Accompanied by release or flooding of the substrates disposed in the container, the overflow device, together with the surface of the liquid, drops to below the substrates or is raised from the substrates.
    Type: Grant
    Filed: November 12, 1997
    Date of Patent: March 9, 1999
    Assignee: Steag MicroTech GmbH
    Inventors: Ludwig Denzler, Helmuth Harms-Janssen