Patents by Inventor Hemanta Kumar Roy

Hemanta Kumar Roy has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Range-based real-time scanning electron microscope non-visual binner
    Patent number: 9947596
    Abstract: A technique to identify non-visual defects, such as SEM non-visual defects (SNVs), includes generating an image of a layer of a wafer, evaluating at least one attribute of the image using a classifier, and identifying the non-visual defects on the layer of the wafer. A controller can be configured to identify the non-visual defects using the classifier. This controller can communicate with a defect review tool, such as a scanning electron microscope (SEM).
    Type: Grant
    Filed: August 3, 2016
    Date of Patent: April 17, 2018
    Assignee: KLA-Tencor Corporation
    Inventors: Hemanta Kumar Roy, Arpit Jain, Arpit Yati, Olivier Moreau, Arun Lobo
  • Range-Based Real-Time Scanning Electron Microscope Non-Visual Binner
    Publication number: 20170040142
    Abstract: A technique to identify non-visual defects, such as SEM non-visual defects (SNVs), includes generating an image of a layer of a wafer, evaluating at least one attribute of the image using a classifier, and identifying the non-visual defects on the layer of the wafer. A controller can be configured to identify the non-visual defects using the classifier. This controller can communicate with a defect review tool, such as a scanning electron microscope (SEM).
    Type: Application
    Filed: August 3, 2016
    Publication date: February 9, 2017
    Inventors: Hemanta Kumar Roy, Arpit Jain, Arpit Yati, Olivier Moreau, Arun Lobo