Patents by Inventor Hematha Kumar Wickramasinghe

Hematha Kumar Wickramasinghe has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Integrated wafer cassette metrology assembly
    Patent number: 6738142
    Abstract: An apparatus with one or more dimensions conforming to a wafer storage cassette used in semiconductor manufacturing which contains all or part of a sensor designed to measure a parameter of a wafer placed into the cassette. The intended use of the apparatus is in a process tool location normally occupied by a standard wafer cassette. By integrating all or part of the sensor into standard wafer storage cassette, a solution is provided whereby the same cassette and metrology system can be mechanically integrated into many process tools.
    Type: Grant
    Filed: February 28, 2001
    Date of Patent: May 18, 2004
    Assignee: International Business Machines Corporation
    Inventors: Theodore Gerard van Kessel, Hematha Kumar Wickramasinghe, Richard John Lebel
  • Integrated wafer cassette metrology assembly
    Publication number: 20020118365
    Abstract: An apparatus with one or more dimensions conforming to a wafer storage cassette used in semiconductor manufacturing which contains all or part of a sensor designed to measure a parameter of a wafer placed into the cassette. The intended use of the apparatus is in a process tool location normally occupied by a standard wafer cassette. By integrating all or part of the sensor into standard wafer storage cassette, a solution is provided whereby the same cassette and metrology system can be mechanically integrated into many process tools.
    Type: Application
    Filed: February 28, 2001
    Publication date: August 29, 2002
    Inventors: Theodore Gerard van Kessel, Hematha Kumar Wickramasinghe, Richard John Lebel