Abstract: A biological microbalance array module chip, comprising a piezoelectric crystal array, probes, and a plurality of electrodes, wherein the probes is an oligonucleotides or immune materials is disclosed. The probes can be immobilized on each electrode on the crystal surface of the piezoelectric crystal array. This biological probe is used to indicate the result of hybridization or immune reaction through detecting the change of oscillation frequency of the crystal probes attached. These piezoelectric crystal can be further arranged in an N×M array. Each piezoelectric crystal is attached with probes that specifically bind to a molecular structure of the target oligonucleotides or immune materials. The biological microbalance array module chip can fast and simultaneously detect hybridization and immune reaction results.