Patents by Inventor Hendrik Anthony Johannes Neerhof

Hendrik Anthony Johannes Neerhof has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and device manufacturing method
    Patent number: 6897945
    Abstract: A lithographic apparatus includes an illumination system for providing a beam of radiation, an article support for supporting a flat article to be placed in a beam path of the beam of radiation on the article support, a backfill gas feed arranged in the article support for feeding backfill gas to a backside of the article when supported by the article support, and a clamp for clamping the article against the article support during projection. According to one aspect of the invention, the apparatus includes a controller for controlling the clamp and/or the backfill gas feed pressure so as to release the clamp prior to reducing the backfill gas feed pressure.
    Type: Grant
    Filed: December 15, 2003
    Date of Patent: May 24, 2005
    Assignee: ASML Netherlands B.V.
    Inventors: Joost Jeroen Ottens, Hendrik Anthony Johannes Neerhof, Koen Jacobus Johannes Maria Zaal, Marco Le Kluse