Patents by Inventor Hendrik Cornelis Anton BORGER

Hendrik Cornelis Anton BORGER has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD FOR DECISION MAKING IN A SEMICONDUCTOR MANUFACTURING PROCESS
    Publication number: 20230333482
    Abstract: A method for categorizing a substrate subject to a semiconductor manufacturing process including multiple operations, the method including: obtaining values of functional indicators derived from data generated during one or more of the multiple operations on the substrate, the functional indicators characterizing at least one operation; applying a decision model including one or more threshold values to the values of the functional indicators to obtain one or more categorical indicators; and assigning a category to the substrate based on the one or more categorical indicators.
    Type: Application
    Filed: June 21, 2023
    Publication date: October 19, 2023
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Arnaud HUBAUX, Johan Franciscus Maria Beckers, Dylan John David Davies, Johan Gertrudis Cornelis Kunnen, Willem Richard Pongers, Ajinkya Ravindra Daware, Chung-Hsun Li, Georgios Tsirogiannis, Hendrik Cornelis Anton Borger, Frederik Eduard De Jong, Juan Manuel Gonzalez Huesca, Andriy Hlod, Maxim Pisarenco
  • Method and system for determining overlay
    Patent number: 11774869
    Abstract: A method of determining an overlay value of a substrate, the method including: obtaining temperature data that includes data on measured temperature at one or more positions on a substrate table after a substrate has been loaded onto the substrate table; and determining an overlay value of the substrate in dependence on the obtained temperature data. There is further disclosed a method of determining a performance of a clamping by a substrate table using a determined overlay value.
    Type: Grant
    Filed: January 17, 2020
    Date of Patent: October 3, 2023
    Assignee: ASML NETHERLANDS B.V.
    Inventors: Ruud Hendrikus Martinus Johannes Bloks, Hendrik Cornelis Anton Borger, Frederik Eduard De Jong, Johan Gertrudis Cornelis Kunnen, Siebe Landheer, Chung-Hsun Li, Patricius Jacobus Neefs, Georgios Tsirogiannis, Si-Han Zeng
  • Method for decision making in a semiconductor manufacturing process
    Patent number: 11687007
    Abstract: A method for categorizing a substrate subject to a semiconductor manufacturing process including multiple operations, the method including: obtaining values of functional indicators derived from data generated during one or more of the multiple operations on the substrate, the functional indicators characterizing at least one operation; applying a decision model including one or more threshold values to the values of the functional indicators to obtain one or more categorical indicators; and assigning a category to the substrate based on the one or more categorical indicators.
    Type: Grant
    Filed: January 9, 2020
    Date of Patent: June 27, 2023
    Assignee: ASML NETHERLANDS B.V.
    Inventors: Arnaud Hubaux, Johan Franciscus Maria Beckers, Dylan John David Davies, Johan Gertrudis Cornelis Kunnen, Willem Richard Pongers, Ajinkya Ravindra Daware, Chung-Hsun Li, Georgios Tsirogiannis, Hendrik Cornelis Anton Borger, Frederik Eduard De Jong, Juan Manuel Gonzalez Huesca, Andriy Hlod, Maxim Pisarenco
  • A METHOD AND SYSTEM FOR DETERMINING OVERLAY
    Publication number: 20220171299
    Abstract: A method of determining an overlay value of a substrate, the method including: obtaining temperature data that includes data on measured temperature at one or more positions on a substrate table after a substrate has been loaded onto the substrate table; and determining an overlay value of the substrate in dependence on the obtained temperature data. There is further disclosed a method of determining a performance of a clamping by a substrate table using a determined overlay value.
    Type: Application
    Filed: January 17, 2020
    Publication date: June 2, 2022
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Ruud Hendrikus Martinus Johannes BLOKS, Hendrik Cornelis Anton BORGER, Frederik Eduard DE JONG, Johan Gertrudis Cornelis KUNNEN, Siebe LANDHEER, Chung-Hsun LI, Patricius Jacobus NEEFS, Georgios TSIROGIANNIS, Si-Han ZENG
  • METHOD FOR DECISION MAKING IN A SEMICONDUCTOR MANUFACTURING PROCESS
    Publication number: 20220082949
    Abstract: A method for categorizing a substrate subject to a semiconductor manufacturing process including multiple operations, the method including: obtaining values of functional indicators derived from data generated during one or more of the multiple operations on the substrate, the functional indicators characterizing at least one operation; applying a decision model including one or more threshold values to the values of the functional indicators to obtain one or more categorical indicators; and assigning a category to the substrate based on the one or more categorical indicators.
    Type: Application
    Filed: January 9, 2020
    Publication date: March 17, 2022
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Arnaud HUBAUX, Johan Franciscus Maria BECKERS, Dylan John David DAVIES, Johan Gertrudis Cornelis KUNNEN, Willem Richard PONGERS, Ajinkya Ravindra DAWARE, Chung-Hsun LI, Georgios TSIROGIANNIS, Hendrik Cornelis Anton BORGER, Frederik Eduard DEJONG, Juan Manuel GONZALEZ HUESCA, Andriy HLOD, Maxim PISARENCO