Abstract: Method and apparatus for applying thin films of coating material with a high degree of uniformity, high utilization of coating fluid and superior adhesion characteristics are disclosed. According to the method, an inverted substrate is moved horizontally and countercurrent to a two stage coating fluid applicator assembly. The first coating stage utilizes megasonic pressure waves directed inclinedly upwardly through the coating fluid/substrate surface interface to wet, clean, degas and deposit coating fluid on the substrate surface. A second stage removes excess coating fluid at the substrate's trailing edge so as to precisely establish a thin and uniform coating film. After the coating has been applied, spinning of the substrate may be employed to enable further coating film uniformity and to increase the film's drying rate.

Abstract: Method for cleaning substrates, particularly a method for removing soluble contaminants and particulate materials from the substrate surface. According to the method, a substrate is inverted and moved horizontally, while flowing cleaning fluid inclinedly upwardly towards the substrate and oppositely to the moving of the substrate; accoustically vibrating the cleaning fluid and, elevating the flowing cleaning fluid at a point adjacent the substrate surface, such that that the flowing cleaning fluid contacts the substrate surface and forms leading edge and trailing edge menisci between the flowing cleaning fluid and the moving substrate.

Abstract: Apparatus for coating the surface of an object with a coating material are disclosed. The apparatus comprise a vacuum chuck assembly suitable for holding the object to be coated in a downward, i.e., inverted position, and a coating material applicator movably positioned beneath the vacuum chuck assembly to traverse the surface of the object in a generally parallel direction to the surface. The vacuum chuck assembly provides a means for temperature control as well as a means for establishing a vacuum for holding the object in the inverted position.

Abstract: Cleaning methods and apparatus for removing particulate materials from the surfaces of objects are disclosed. Megasonic vibrations are utilized to cause a liquid cleaning fluid in a first reservoir to rise above the upper end of the first reservoir, contact the surface of the object to be cleaned and flow over a weir at the upper end of the first reservoir into a second reservoir. The methods and apparatus are useful to remove small particles, e.g. having a particle size of less than about 1 micron, from flat or curved planar surfaces. The methods and apparatus can be integrated with subsequent processing steps, e.g. applying thin film coatings, without intermediate handling of the objects.

Abstract: Methods are disclosed for coating flat or curved planar surfaces by flowing a coating material through a porous applicator onto the surface of the object to be coated. Menisci of the coating material are maintained between the porous applicator and the surface of the object to be coated by attractive forces between the coating material and the surface of the object. Thin, uniform coating thicknesses, e.g., less than about 1 micron, and conformal coatings of objects having irregular surfaces can be obtained. The methods are useful, for example, for coating objects such as flat panel displays, optical devices, silicon and germanium wafers, and hybrid circuit boards.

Abstract: Spray coating, particularly flat spray coating of circuit boards. Applicant's method of discrete conformal coating eliminates "railroading" at the edges of the flat spray web and assures precise control of the amount of coating material placed on the circuit board surface, as well as on the varying and complex circuit board components. The method includes pressurizing the coating; longitudinally advancing a surface to be coated, such as a circuit board, beneath the coating, while simultaneously feeding the coating onto the advancing surface as a plural series of aligned droplets extending transversely across the advancing surface. The feeding of coating is triggered "ON/OFF" so as to define longitudinally the series of droplets feeding onto the advancing surface.

Abstract: This invention is directed to improved spraying apparatus for coating substrates with a coating material and supercritical fluid which apparatus is provided with various features, either alone or in combination, to prevent undesirable premature cooling of the coating mixture which might detrimentally affect the final coating on the substrate; to prevent undesirable depressurization of supercritical fluid contained in the coating mixture which remains in the spray gun after spraying has been stopped; and/or to desirably provide the ability to mix the components of the coating mixture directly in the spray gun. Methods for utilizing these features in the spraying apparatus of the present invention are also disclosed.

Abstract: The present invention is directed to methods and apparatus for spraying liquid compositions by airless spray techniques which avoid fishtail spray patterns and desirably obtain feathered spray patterns through use of spraying coating formulations which contain supercritical fluid.

Abstract: The present invention is directed to methods and apparatus for spraying liquid compositions by airless spray techniques which avoid fishtail spray patterns and desirably obtain feathered spray patterns.

Abstract: Spray coating, particularly flat spray coating of circuit boards. Applicant's method of conformal coating, eliminates "railroading" at the edges of the flat spray web and assures precise control of the amount of coating material placed on the circuit board surface.The method includes longitudinally advancing a pressurized coating over a surface to be coated, while simultaneously feeding the coating in a flat spray pattern, and triggering feeding "ON/OFF" so as to proportion the amount of coating being fed onto the surface and to reduce "fishtail" at the edges of the flat spray pattern.

Abstract: Coating, particularly a method for uniformly depositing a micro thin layer of fluid upon the surface of an object such as a substrate, or the like. Flowing the coating material through a permeable and sloping surface, so as to develop a downward laminar flow of coating material on the outside of the sloping surface. The object to be coated is advanced tangentially to the flow of coating material such that the surface to be coated intersects laminar flow of coating material at the apex of the sloping surface. Meniscii of coating material are supported both at the leading edge and the trailing edge of coating material in contact with the surface to be coated. The uniform disengagement and drainage of deposited excess coating material from the coated surface are ensured by uniform meniscii and the constant downward laminar flow of coating material on the outside of the sloping surface.