Patents by Inventor Hendrik Nicolaas Slingerland
Hendrik Nicolaas Slingerland has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240097055Abstract: The invention relates to a foil (100) for a double curved solar panel, the foil showing multiple incisions having two closed ends and dividing the foil in mechanically interconnected areas, wherein the foil comprises a first group of incisions (102) having a first orientation and a second group of incisions (104) having a second orientation, a first closed end of the incision located at a mechanical interconnection (110) between a first cell (120) and a second cell (122) and a second closed end located at a mechanical interconnection (112) between a third cell (124) and a fourth cell (126), the incision bordered by a mechanical interconnection (114) between the first cell (120) and the third cell (124) and bordered by a mechanical interconnection (116) between the second cell (122) and the fourth cell (126), the incisions partly having a first orientation and partly having a second, different orientation.Type: ApplicationFiled: February 15, 2022Publication date: March 21, 2024Inventors: Durandus Kornelius DIJKEN, Hendrik Nicolaas SLINGERLAND
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Publication number: 20220278586Abstract: There is provided an electric motor/generator comprising a stator and a rotor. The stator has an outer perimeter. The rotor at least coaxially encloses the outer perimeter of the stator. The rotor is rotatable relative to the stator around a rotation axis. The rotor and the stator are separated by a flux bearing gap over which in working magnetic flux occurs. The rotor and the stator are separated by a protective gap. The protective gap is configured to close, during a deformation of the rotor, before the flux bearing gap closes, thereby avoiding closure of the flux bearing gap. The motor/generator is characterized in that the stator comprises a roller bearing and an axle. The roller bearing is coupled to the axle and rotatable around the axle. The axle is arranged off-center from the rotation axis. A distance between the roller bearing and the rotor defines the protective gap.Type: ApplicationFiled: August 13, 2020Publication date: September 1, 2022Inventors: Hendrik Nicolaas SLINGERLAND, Wouter Lucas JANSEN
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Patent number: 10453647Abstract: A method of operating a charged particle microscope comprising the following steps: Providing a specimen on a specimen holder; Using a source to produce a beam of charged particles that is subject to beam current fluctuations; Employing a beam current sensor, located between said source and specimen holder, to intercept a part of the beam and produce an intercept signal proportional to a current of the intercepted part of the beam, the beam current sensor comprising a hole arranged to pass a beam probe with an associated probe current; Scanning said probe over the specimen, thereby irradiating the specimen with a specimen current, with a dwell time associated with each scanned location on the specimen; Using a detector to detect radiation emanating from the specimen in response to irradiation by said probe, and producing an associated detector signal; Using said intercept signal as input to a compensator to suppress an effect of said current fluctuations in said detector signal, wherein: The beam currentType: GrantFiled: February 16, 2017Date of Patent: October 22, 2019Assignee: FEI COMPANYInventors: Ali Mohammadi-Gheidari, Luigi Mele, Peter Christiaan Tiemeijer, Gerard Nicolaas Anne van Veen, Hendrik Nicolaas Slingerland
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Publication number: 20180233322Abstract: A method of operating a charged particle microscope comprising the following steps: Providing a specimen on a specimen holder; Using a source to produce a beam of charged particles that is subject to beam current fluctuations; Employing a beam current sensor, located between said source and specimen holder, to intercept a part of the beam and produce an intercept signal proportional to a current of the intercepted part of the beam, the beam current sensor comprising a hole arranged to pass a beam probe with an associated probe current; Scanning said probe over the specimen, thereby irradiating the specimen with a specimen current, with a dwell time associated with each scanned location on the specimen; Using a detector to detect radiation emanating from the specimen in response to irradiation by said probe, and producing an associated detector signal; Using said intercept signal as input to a compensator to suppress an effect of said current fluctuations in said detector signal, wherein: The beam currentType: ApplicationFiled: February 16, 2017Publication date: August 16, 2018Applicant: FEI CompanyInventors: Ali Mohammadi Gheidari, Luigi Mele, Peter Christiaan Tiemeijer, Gerard Nicolaas Anne van Veen, Hendrik Nicolaas Slingerland
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Patent number: 10002742Abstract: The invention relates to a scanning-type charged particle microscope and a method for operation of such a microscope. Disclosed is a novel scanning strategy to the raster scan or serpentine scan. In some embodiment, the beam scanning motion is separated into short-stroke and long-stroke movements, to be assigned to associate short-stroke and long-stroke scanning devices, which may be beam deflectors or stage actuators. The scan strategy which is less susceptible to effects such as overshoot, settling/resynchronization, and “backlash” effects.Type: GrantFiled: October 28, 2015Date of Patent: June 19, 2018Assignee: FEI CompanyInventors: Pavel Potocek, Cornelis Sander Kooijman, Hendrik Jan de Vos, Hendrik Nicolaas Slingerland
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Patent number: 9620330Abstract: A method and apparatus for imaging a specimen using a scanning-type microscope, by irradiating a specimen with a beam of radiation using a scanning motion, and detecting a flux of radiation emanating from the specimen in response to the irradiation, in the first sampling session {S1} of a set {Sn}, gathering data from a first collection of sparsely distributed sampling points {P1} of set {Pn}. A mathematical registration correction is made to compensate for drift mismatches between different members of the set {Pn}, and an image of the specimen is assembled using the set {Pn} as input to an integrative mathematical reconstruction procedure.Type: GrantFiled: June 18, 2015Date of Patent: April 11, 2017Assignee: FEI CompanyInventors: Pavel Poto{hacek over (c)}ek, Cornelis Sander Kooijman, Hendrik Nicolaas Slingerland, Gerard Nicolaas Anne van Veen, Faysal Boughorbel
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Publication number: 20160118219Abstract: The invention relates to a scanning-type charged particle microscope and a method for operation of such a microscope. Disclosed is a novel scanning strategy to the raster scan or serpentine scan. In some embodiment, the beam scanning motion is separated into short-stroke and long-stroke movements, to be assigned to associate short-stroke and long-stroke scanning devices, which may be beam deflectors or stage actuators. The scan strategy which is less susceptible to effects such as overshoot, settling/resynchronization, and “backlash” effects.Type: ApplicationFiled: October 28, 2015Publication date: April 28, 2016Applicant: FEI CompanyInventors: Pavel Potocek, Cornelis Sander Kooijman, Hendrik Jan de Vos, Hendrik Nicolaas Slingerland
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Publication number: 20150371815Abstract: A method of accumulating an image of a specimen using a scanning-type microscope, comprising the following steps: Providing a beam of radiation that is directed from a source through an illuminator so as to irradiate the specimen; Providing a detector for detecting a flux of radiation emanating from the specimen in response to said irradiation; Causing said beam to undergo scanning motion relative to a surface of the specimen, and recording an output of the detector as a function of scan position, which method additionally comprises the following steps: In a first sampling session S1gathering detector data from a first collection P1 of sampling points distributed sparsely across the specimen; Repeating this procedure so as to accumulate a set {Pn} of such collections, gathered during an associated set {Sn} of sampling sessions, each set with a cardinality N>1; Assembling an image of the specimen by using the set {Pn} as input to an integrative mathematical reconstruction procedure, wherein, as part ofType: ApplicationFiled: June 18, 2015Publication date: December 24, 2015Applicant: FEI CompanyInventors: Pavel Potocek, Cornelis Sander Kooijman, Hendrik Nicolaas Slingerland, Gerard Anne Nikolaas van Veen, Faysal Boughorbel
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Patent number: 9153414Abstract: The invention relates to a particle-optical apparatus with a predetermined final vacuum pressure. To that end a vacuum chamber of said apparatus is via a first restriction connected to a volume where vapor or gas is present at a known pressure and via a second restriction to a vacuum pump. By making the ratio of the two conductances, associated with said restrictions, a calibrated ratio, the final pressure of the vacuum chamber is a predetermined final pressure. This eliminates the need for e.g. vacuum gauges and control systems, resulting in a more compact design of such apparatus.Type: GrantFiled: January 31, 2007Date of Patent: October 6, 2015Assignee: FEI CompanyInventors: Hendrik Nicolaas Slingerland, William Ralph Knowles
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Publication number: 20150279615Abstract: A multi-beam apparatus for inspecting or processing a sample with a multitude of focused beams uses a multitude of detectors for detecting secondary radiation emitted by the sample when is irradiated by the multitude of beams. Each detector signal comprises information caused by multiple beams, the apparatus equipped with a programmable controller for processing the multitude of detector signals to a multitude of output signals, using weight factors so that each output signal represents information caused by a single beam. The weight factors are dynamic weight factors depending on the scan position of the beams with respect to the detectors and the distance between sample and detectors.Type: ApplicationFiled: March 25, 2015Publication date: October 1, 2015Applicant: FEI CompanyInventors: Pavel Potocek, Cornelis S. Kooijman, Hendrik Nicolaas Slingerland, Gerardus Nicolaas Anne Van Veen, Faysal Boughorbel, Albertus Aemillius Seyno Sluijterman, Jacob Simon Faber
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Patent number: 8757873Abstract: A method of determining the temperature of a sample carrier in a charged particle-optical apparatus, characterized in that the method comprises the observation of the sample carrier with a beam of charged particles, the observation giving information about the temperature of the sample carrier. The invention is based on the insight that a charged particle optical apparatus, such as a TEM, STEM, SEM or FIB, can be used to observe temperature related changes of a sample carrier. The changes may be mechanical changes (e.g. of a bimetal), crystallographic changes (e.g. of a perovskite), and luminescent changes (in intensity or decay time). In a preferred embodiment the sample carrier shows two bimetals, showing metals with different thermal expansion coefficients, bending in opposite directions. The distance between the two bimetals is used as a thermometer.Type: GrantFiled: November 23, 2011Date of Patent: June 24, 2014Assignee: FEI CompanyInventors: Stephanus Hubertus Leonardus van den Boom, Pleun Dona, Laurens Franz Taemsz Kwakman, Uwe Luecken, Hervé-William Rémigy, Hendrik Nicolaas Slingerland, Martin Verheijen, Gerbert Jeroen van de Water
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Patent number: 8692196Abstract: The invention relates to a method for correcting distortions introduced by the projection system (106) of a TEM. As known to the person skilled in the art distortions may limit the resolution of a TEM, especially when making a 3D reconstruction of a feature using tomography. Also when using strain analysis in a TEM the distortions may limit the detection of strain. To this end the invention discloses a detector equipped with multipoles (152), the multipoles warping the image of the TEM in such a way that distortions introduced by the projection system are counteracted. The detector may further include a CCD or a fluorescent screen (151) for detecting the electrons.Type: GrantFiled: September 22, 2009Date of Patent: April 8, 2014Assignee: FEI CompanyInventors: Peter Christiaan Tiemeijer, Uwe Luecken, Alan Frank de Jong, Hendrik Nicolaas Slingerland
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Patent number: 8569712Abstract: The invention relates to an electrostatic beam blanker for a particle-optical apparatus, in which the blanker is used to generate a train of pulses with a fixed repetition rate. Such pulse trains with a sub-picosecond pulse length are for example used in the study of chemistry in the femtosecond scale. The beam blanker according to the invention uses a resonant structure, as a result of which the voltage is amplified by the quality factor Q of the resonant structure. During each zero-crossing of the signal, thus twice per period of the resonant frequency, the beam is transmitted, and the beam is blanked during the rest of the time. In a preferred embodiment the resonant structure comprises a transmission line. Impedance matching of signal source and resonant structure may be performed by tuning stubs.Type: GrantFiled: October 7, 2011Date of Patent: October 29, 2013Assignee: FEI CompanyInventors: Guido Martinus Henricus Knippels, Fredericus Bernardus Kiewiet, Hendrik Nicolaas Slingerland, Pieter Kruit, Benjamin John Cook, Jacques Nonhebel
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Patent number: 8306291Abstract: The invention relates to a method in which labels are introduced in a sample, a flat surface is prepared on the sample and a series of images is made of the sample surface with e.g. a scanning electron microscope. The labels may be gold labels or e.g. fluorescent labels. By removing a surface layer between obtaining each image, labels at the surface in one image will be removed and will not be visible in a subsequent image. Thereby a 3D reconstruction of the position of labels in the sample can be made.Type: GrantFiled: December 22, 2006Date of Patent: November 6, 2012Assignee: FEI CompanyInventor: Hendrik Nicolaas Slingerland
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Publication number: 20120261586Abstract: The invention relates to an electrostatic beam blanker for a particle-optical apparatus, in which the blanker is used to generate a train of pulses with a fixed repetition rate. Such pulse trains with a sub-picosecond pulse length are for example used in the study of chemistry in the femtosecond scale. The beam blanker according to the invention uses a resonant structure, as a result of which the voltage is amplified by the quality factor Q of the resonant structure. During each zero-crossing of the signal, thus twice per period of the resonant frequency, the beam is transmitted, and the beam is blanked during the rest of the time. In a preferred embodiment the resonant structure comprises a transmission line. Impedance matching of signal source and resonant structure may be performed by tuning stubs.Type: ApplicationFiled: October 7, 2011Publication date: October 18, 2012Applicant: FEI COMPANYInventors: Guido Martinus Henricus Knippels, Fredericus Bernardus Kiewiet, Hendrik Nicolaas Slingerland, Pieter Kruit, Benjamin John Cook, Jacques Nonhebel
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Publication number: 20120128028Abstract: A method of determining the temperature of a sample carrier in a charged particle-optical apparatus, characterized in that the method comprises the observation of the sample carrier with a beam of charged particles, the observation giving information about the temperature of the sample carrier. The invention is based on the insight that a charged particle optical apparatus, such as a TEM, STEM, SEM or FIB, can be used to observe temperature related changes of a sample carrier. The changes may be mechanical changes (e.g. of a bimetal), crystallographic changes (e.g. of a perovskite), and luminescent changes (in intensity or decay time). In a preferred embodiment the sample carrier shows two bimetals, showing metals with different thermal expansion coefficients, bending in opposite directions. The distance between the two bimetals is used as a thermometer.Type: ApplicationFiled: November 23, 2011Publication date: May 24, 2012Applicant: FEI CompanyInventors: Stephanus Hubertus Leonardus van den Boom, Pleun Dona, Laurens Franz Taemsz Kwakman, Uwe Luecken, Hervé-William Rémigy, Hendrik Nicolaas Slingerland, Martin Verheijen, Gerbert Jeroen van der Water
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Patent number: 8071954Abstract: The invention relates to a hybrid phase plate for use in a TEM. The phase plate according to the invention resembles a Boersch phase plate in which a Zernike phase plate is mounted. As a result the phase plate according to the invention resembles a Boersch phase plate for electrons scattered to such an extent that they pass outside the central structure (15) and resembles a Zernike phase plate for scattered electrons passing through the bore of the central structure. Comparing the phase plate of the invention with a Zernike phase plate is has the advantage that for electrons that are scattered over a large angle, no electrons are absorbed or scattered by a foil, resulting in a better high resolution performance of the TEM. Comparing the phase plate of the invention with a Boersch phase plate the demands for miniaturization of the central structure are less severe.Type: GrantFiled: June 4, 2009Date of Patent: December 6, 2011Assignee: FEI CompanyInventors: Raymond Wagner, Hendrik Nicolaas Slingerland, Frank Jeroen Pieter Schuurmans, Peter Christiaan Tiemeijer
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Patent number: 7884326Abstract: A manipulator for use in e.g. a Transmission Electron Microscope (TEM) is described, said manipulator capable of rotating and translating a sample holder (4). The manipulator clasps the round sample holder between two members (3A, 3B), said members mounted on actuators (2A, 2B). Moving the actuators in the same direction results in a translation of the sample holder, while moving the actuators in opposite directions results in a rotation of the sample holder.Type: GrantFiled: September 26, 2007Date of Patent: February 8, 2011Assignees: FEI Company, The Board of Trustees of the University of Illinois, The Regents of the University of CaliforniaInventors: Jeroen van de Water, Johannes van den Oetelaar, Raymond Wagner, Hendrik Nicolaas Slingerland, Jan Willem Bruggers, Adriaan Huibert Dirk Ottevanger, Andreas Schmid, Eric A. Olson, Ivan G. Petrov, Todor I. Donchev, Thomas Duden
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Patent number: 7800063Abstract: A manipulator for use in e.g. a Transmission Electron Microscope (TEM) is described, said manipulator capable of rotating and translating a sample holder (4). The manipulator clasps the round sample holder between two members (3A, 3B), said members mounted on actuators (2A, 2B). Moving the actuators in the same direction results in a translation of the sample holder, while moving the actuators in opposite directions results in a rotation of the sample holder.Type: GrantFiled: September 26, 2007Date of Patent: September 21, 2010Assignees: FEI Company, The Board of Trustees of the University of Illinois, The Regents of the University of CaliforniaInventors: Jeroen van de Water, Johannes van den Oetelaar, Raymond Wagner, Hendrik Nicolaas Slingerland, Jan Willem Bruggers, Adriaan Huibert Dirk Ottevanger, Andreas Schmid, Eric A. Olson, Ivan G. Petrov, Todor I. Donchev, Thomas Duden
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Publication number: 20100072366Abstract: The invention relates to a method for correcting distortions introduced by the projection system (106) of a TEM. As known to the person skilled in the art distortions may limit the resolution of a TEM, especially when making a 3D reconstruction of a feature using tomography. Also when using strain analysis in a TEM the distortions may limit the detection of strain. To this end the invention discloses a detector equipped with multipoles (152), the multipoles warping the image of the TEM in such a way that distortions introduced by the projection system are counteracted. The detector may further include a CCD or a fluorescent screen (151) for detecting the electrons.Type: ApplicationFiled: September 22, 2009Publication date: March 25, 2010Applicant: FEI COMPANYInventors: Peter Christiaan Tiemeijer, Uwe Luecken, Alan Frank De Jong, Hendrik Nicolaas Slingerland