Abstract: Provided are light sources and methods of controlling them, and devices and methods for use in measurement applications, particularly in metrology, for example in a lithographic apparatus. The methods and devices provide mechanisms for detection and/or correction of variations in the light source, in particular stochastic variations. Feedback or feedforward approaches can be used for the correction of the source and/or the metrology outputs. An exemplary method of controlling the spectral output of a light source which emits a time-varying spectrum of light includes the steps of: determining at least one characteristic of the spectrum of light emitted from the light source; and using said determined characteristic to control the spectral output.

Abstract: A system and method for providing a radiation source. In one arrangement, the radiation source includes an optical fiber that is hollow, and has an axial direction, a gas that fills the hollow of the optical fiber, and a plurality of temperature setting devices disposed at respective positions along the axial direction of the optical fiber, wherein the temperature setting devices are configured to control the temperature of the gas to locally control the density of the gas.

Abstract: Provided are light sources and methods of controlling them, and devices and methods for use in measurement applications, particularly in metrology, for example in a lithographic apparatus. The methods and devices provide mechanisms for detection and/or correction of variations in the light source, in particular stochastic variations. Feedback or feedforward approaches can be used for the correction of the source and/or the metrology outputs. An exemplary method of controlling the spectral output of a light source which emits a time-varying spectrum of light includes the steps of: determining at least one characteristic of the spectrum of light emitted from the light source; and using said determined characteristic to control the spectral output.

Abstract: A method for manufacturing a capillary usable as part of a hollow-core photonic crystal fiber. The method includes obtaining a capillary having capillary wall including a first wall thickness; and chemically etching the capillary wall to reduce the wall thickness of the capillary wall. During performance of the etching, a control parameter is locally varied along the length of the capillary, the control parameter relating to reactivity of an etchant used in the etching, so as to control the etched wall thickness of the capillary wall along the capillary length. Also disclosed is a capillary manufactured by such a method and various devices including such a capillary.

Abstract: A hollow-core photonic crystal fiber (HC-PCF) assembly for converting input radiation to broadband radiation, the hollow core fiber assembly including: a micro-structured fiber with a hollow core extending along a length of the fiber from an input end configured to receive input radiation to an output end configured to output broadband radiation, wherein the hollow core of the fiber is configured to include a medium; and a density control system configured to control a density profile of the medium along at least a part of the length of the fiber to establish a desired zero dispersion wavelength profile along at least a part of the length of the fiber.

Abstract: A method for manufacturing a capillary usable as part of a hollow-core photonic crystal fiber. The method includes obtaining a capillary having capillary wall including a first wall thickness; and chemically etching the capillary wall to reduce the wall thickness of the capillary wall. During performance of the etching, a control parameter is locally varied along the length of the capillary, the control parameter relating to reactivity of an etchant used in the etching, so as to control the etched wall thickness of the capillary wall along the capillary length. Also disclosed is a capillary manufactured by such a method and various devices including such a capillary.

Abstract: A hollow-core photonic crystal fiber (HC-PCF) assembly for converting input radiation to broadband radiation, the hollow core fiber assembly including: a micro-structured fiber with a hollow core extending along a length of the fiber from an input end configured to receive input radiation to an output end configured to output broadband radiation, wherein the hollow core of the fiber is configured to include a medium; and a density control system configured to control a density profile of the medium along at least a part of the length of the fiber to establish a desired zero dispersion wavelength profile along at least a part of the length of the fiber.

Abstract: A system and method for providing a radiation source. In one arrangement, the radiation source includes an optical fiber that is hollow, and has an axial direction, a gas that fills the hollow of the optical fiber, and a plurality of temperature setting devices disposed at respective positions along the axial direction of the optical fiber, wherein the temperature setting devices are configured to control the temperature of the gas to locally control the density of the gas.

Abstract: A method for manufacturing a capillary usable as part of a hollow-core photonic crystal fiber. The method includes obtaining a capillary having capillary wall including a first wall thickness; and chemically etching the capillary wall to reduce the wall thickness of the capillary wall. During performance of the etching, a control parameter is locally varied along the length of the capillary, the control parameter relating to reactivity of an etchant used in the etching, so as to control the etched wall thickness of the capillary wall along the capillary length. Also disclosed is a capillary manufactured by such a method and various devices including such a capillary.

Abstract: A system and method for providing a radiation source. In one arrangement, the radiation source includes an optical fiber that is hollow, and has an axial direction, a gas that fills the hollow of the optical fiber, and a plurality of temperature setting devices disposed at respective positions along the axial direction of the optical fiber, wherein the temperature setting devices are configured to control the temperature of the gas to locally control the density of the gas.

Abstract: A system and method for providing a radiation source. In one arrangement, the radiation source includes an optical fiber that is hollow, and has an axial direction, a gas that fills the hollow of the optical fiber, and a plurality of temperature setting devices disposed at respective positions along the axial direction of the optical fiber, wherein the temperature setting devices are configured to control the temperature of the gas to locally control the density of the gas.

Abstract: A beverage dispensing machine (2) has a housing that provides a receptacle for receiving an expandable cartridge (12) that is coupled into the machine so that it can receive a charge of water. A kneading system (40) is provided to act on the cartridge within the receptacle. The kneading system is activated after water has been allowed to enter the cartridge and mechanically acts on or from the exterior of the cartridge in order to compress and release regions of the cartridge in order to create vigorous agitation to move the contents of the cartridge around inside the main compartment and bring them into close contact with a charge of water from the supply. Such a machine allows a wide variety of beverages to be created conveniently on demand from freeze-dried ingredients that can be stored inside the cartridges with a long shelf life.

Abstract: A beverage dispensing machine (2) has a housing that provides a receptacle for receiving an expandable cartridge (12) that is coupled into the machine so that it can receive a charge of water. A kneading system (40) is provided to act on the cartridge within the receptacle. The kneading system is activated after water has been allowed to enter the cartridge and mechanically acts on or from the exterior of the cartridge in order to compress and release regions of the cartridge in order to create vigorous agitation to move the contents of the cartridge around inside the main compartment and bring them into close contact with a charge of water from the supply. Such a machine allows a wide variety of beverages to be created conveniently on demand from freeze-dried ingredients that can be stored inside the cartridges with a long shelf life.

Abstract: A birefringent elongate waveguide for guiding light, comprises: a core region (110), comprising an elongate region of relatively low refractive index; and a cladding region (100), comprising elongate regions (105) of relatively low refractive index interspersed with elongate regions (117,120) of relatively high refractive index. In a transverse cross-section of the waveguide, a (5) relatively high refractive index boundary region (115) is provided that surrounds the core region and has either (1) at most two-fold rotational symmetry or (2) a rotational symmetry that reduces the rotational symmetry of the waveguide to at most two-fold rotational symmetry. The symmetry of the boundary region (115) results at least in part from azimuthal variations therein, which are substantially uncharacteristic of the cladding region (100).

Abstract: An elongate waveguide for guiding light including a core having an elongate region of relatively low refractive index; a microstructured region around the core comprising elongate regions of relatively low refractive index interspersed with elongate regions of relatively high refractive index; and a boundary at the interface between the core and the microstructured region, the boundary including, in the transverse cross-section, a region of relatively high refractive index, which is connected to the microstructured region at a plurality of nodes, and at least one relatively enlarged region around the boundary, the enlarged region having a major dimension and a minor dimension, wherein the length of the major dimension divided by the length of the minor dimension is more than 3.0.

Abstract: An elongate waveguide for guiding light including a core having an elongate region of relatively low refractive index; a microstructured region around the core comprising elongate regions of relatively low refractive index interspersed with elongate regions of relatively high refractive index; and a boundary at the interface between the core and the microstructured region, the boundary including, in the transverse cross-section, a region of relatively high refractive index, which is connected to the microstructured region at a plurality of nodes, and at least one relatively enlarged region around the boundary, the enlarged region having a major dimension and a minor dimension, wherein the length of the major dimension divided by the length of the minor dimension is more than 3.0.

Abstract: An optical fiber having a cladding region surrounding a core region having an elongate core hole, the inner or outer surface of the core hole having a surface roughness with a spatial period equal to or less than 5 ?m by a spectral power below 0.0017 nm2 ?m?1. A method of making an optical fiber including a cladding region having an arrangement of elongate cladding holes in a matrix material, surrounding an elongate core region having an elongate core hole, the method including the step of increasing the surface tension of the matrix material prior to or during the step of heating and drawing the fiber.

Abstract: An elongate waveguide for guiding light includes a core having an elongate region of relatively low refractive index; a microstructured region around the core having elongate regions of relatively low refractive index interspersed with elongate regions of relatively high refractive index; and a boundary at the interface between the core and the microstructured region, the boundary including in the transverse cross-section, a region of relatively high refractive index, which is connected to the microstructured region at a plurality of nodes, at least one relatively enlarged region around the boundary (and excluding a boundary having twelve nodes and six enlarged regions substantially at a mid-point between six pairs of relatively more-widely-spaced apart neighboring nodes).

Abstract: A birefringent elongate waveguide for guiding light, comprises: a core region (110), comprising an elongate region of relatively low refractive index; and a cladding region (100), comprising elongate regions (105) of relatively low refractive index interspersed with elongate regions (117,120) of relatively high refractive index. In a transverse cross-section of the waveguide, a (5) relatively high refractive index boundary region (115) is provided that surrounds the core region and has either (1) at most two-fold rotational symmetry or (2) a rotational symmetry that reduces the rotational symmetry of the waveguide to at most two-fold rotational symmetry. The symmetry of the boundary region (115) results at least in part from azimuthal variations therein, which are substantially uncharacteristic of the cladding region (100).

Abstract: An elongate waveguide for guiding light includes a core having an elongate region of relatively low refractive index; a microstructured region around the core having elongate regions of relatively low refractive index interspersed with elongate regions of relatively high refractive index; and a boundary at the interface between the core and the microstructured region, the boundary including in the transverse cross-section, a region of relatively high refractive index, which is connected to the microstructured region at a plurality of nodes, at least one relatively enlarged region around the boundary (and excluding a boundary having twelve nodes and six enlarged regions substantially at a mid-point between six pairs of relatively more-widely-spaced apart neighboring nodes).