Abstract: A force measuring plate having a planar regular arrangement of force measuring cells. A force measuring cell is formed in a hole in the force measuring plate, in which hole precisely one planar element which is secured by springs in a self-supporting fashion is arranged and is oriented so as to run parallel to the force measuring plate. Each spring is connected in a materially joined fashion at a first end to the edge of a hole and at a second end to the edge of a planar element. The force measuring plate, the springs and the planar elements are formed from the same material. Each planar element can be elastically deflected in three spatial directions under the effect of a force. There is a linear relationship between the deflection and the force. In addition, the invention relates to a device for determining forces in the piconewton to nanonewton ranges.

Abstract: A force measuring disc having a planar regular arrangement of force measuring cells. A force measuring cell is formed in a hole in the force measuring disc, in which hole precisely one planar element which is secured by springs in a self-supporting fashion is arranged and is oriented so as to run parallel to the force measuring disc. Each spring is connected in a materially joined fashion at a first end to the edge of a hole and at a second end to the edge of a planar element. The force measuring disc, the springs and the planar elements are formed from the same material. Each planar element can be elastically deflected in three spatial directions under the effect of a force. There is a linear relationship between the deflection and the force. In addition, the invention relates to a device for determining forces in the piconewton to nanonewton ranges.