Patents by Inventor Hendrikus Christoffel Maria VAN DOREMALEN

Hendrikus Christoffel Maria VAN DOREMALEN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Object holder, lithographic apparatus, device manufacturing method, and method of manufacturing an object holder
    Patent number: 9798251
    Abstract: A method of manufacturing an object holder for use in a lithographic apparatus, the object holder including one or more electrically functional components, the method including: using a composite structure including a carrier sheet different from a main body of the object holder and a layered structure including one or a plurality of layers and formed on the carrier sheet; connecting the composite structure to a surface of the main body such that the layered structure is between the carrier sheet and the surface of the main body; and removing the carrier sheet from the composite structure, leaving the layered structure connected to the main body.
    Type: Grant
    Filed: February 26, 2014
    Date of Patent: October 24, 2017
    Assignee: ASML NETHERLANDS B.V.
    Inventors: Raymond Wilhelmus Louis LaFarre, Satish Achanta, Matteo Filippi, Yogesh Karade, Antonius Johannes Maria Nellissen, Ronald Van Der Wilk, Hendrikus Christoffel Maria Van Doremalen, Wilhelmus Jacobus Johannes Welters
  • OBJECT HOLDER, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND METHOD OF MANUFACTURING AN OBJECT HOLDER
    Publication number: 20160018744
    Abstract: A method of manufacturing an object holder for use in a lithographic apparatus, the object holder including one or more electrically functional components, the method including: using a composite structure including a carrier sheet different from a main body of the object holder and a layered structure including one or a plurality of layers and formed on the carrier sheet; connecting the composite structure to a surface of the main body such that the layered structure is between the carrier sheet and the surface of the main body; and removing the carrier sheet from the composite structure, leaving the layered structure connected to the main body.
    Type: Application
    Filed: February 26, 2014
    Publication date: January 21, 2016
    Applicant: ASML Netherlands B.V.
    Inventors: Raymond Wilhelmus Louis LAFARRE, Satish ACHANTA, Matteo FILIPPI, Yogesh KARADE, Antonius Johannes Maria NELLISSEN, Ronal VAN DER WILK, Hendrikus Christoffel Maria VAN DOREMALEN, Wilhelmus Jacobus Johannes WELTERS