Abstract: The improved scanning MEMS mirror device disclosed herein comprises a mirror body that is rotatable around a rotation axis with respect to a stationary body, wherein a rotation of the mirror body is flexibly restrained with at least one coupling element that biases the mirror body towards a neutral state. The coupling element comprises at least a bridge section and a first leaf spring section and a second leaf spring section. The first leaf spring section extends in an extension direction from a first end thereof at the bridge section towards a second end thereof that is connected to the mirror body. The second leaf spring section extends in an extension direction from a first end thereof at the bridge section towards a second end thereof where it is connected to the stationary body. The extension direction of the first leaf spring section and the extension direction of the second leaf spring section are at least substantially the same as the second planar direction.

Abstract: A MEMS-mirror device (1) is provided that comprises a support (2), a mirror body (3) that is rotationally suspended with respect to the support along a rotation axis (4), and an actuator (7A, 7B) to induce a rotation in the mirror body around the rotation axis. The mirror body (3) has a mirror surface (311) that in a neutral state defines a reference plane (x, y) having a longitudinal axis (y) through a center of the mirror body parallel to the rotation axis (4) and a lateral axis (x) transverse to the longitudinal axis. The mirror body (3) has a central portion (31) and integral therewith a pair of extension portions (32A, 32B) that extend in mutually opposite directions along the longitudinal axis. Each of the extension portions (32A, 32B) is flexibly coupled at a lateral side (322A, 322B) to the support with a respective plurality (6A, 6B) of torsion beams (61) which in a neutral state of the mirror body extend in the reference plane (x, y).

Abstract: A forward looking MEMS based OCT probe (50) is provided that comprises an elongate probe housing (51) having at a first end a probe interface (54) for an optic fibre (56), and at a second opposite end a viewing window (58). The probe housing accommodates a MEMS mirror (10) for sweeping a hght beam (60) through the viewing window and for reflecting light received through the viewing window towards the probe interface, wherein a rotation axis (18) of the MEMS mirror extends transverse to a longitudinal axis (62) defined by the probe housing. The MEMS mirror (10) has a stator (12), a rotor (14), and an actuator (16) with at least one pair of mutually interdigitated comb elements including at least a first comb element fixed to the stator defining a reference plane and at least a second comb element fixed to the rotor and that is further coupled at mutually opposite sides via a respective torsion beam (20A, 20B) to the stator.

Abstract: A MEMS-micro-mirror (30) is provided comprising a mirror body (50) that is rotatably arranged in a mirror frame (60) around a rotation axis (58) extending in a plane defined by the mirror body. The rotation axis extends through a first and a second mutually opposite end-portion (51, 53) of the mirror body. The mirror has a reflective first main surface (55) and opposite said first main surface a second main surface (57) provided with a first and a second pair of reinforcement beams. The pair of reinforcement beams (91a, 91b) extends from the first end-portion (51) in mutually opposite directions away from the rotation axis. The second pair of reinforcement beams (93a, 93b) extends from the second end-portion (53) in mutually opposite directions away from the rotation axis. Reinforcement beams of said first pair extend towards respective ones of said second pair.

Abstract: A MEMS micromirror (30) is presented including a frame (60) with a mirror body (50) arranged therein, a cantilever beam assembly (70) and vertical support beams (40). The mirror body (50) is rotatable around a rotation axis (58) extending in a plane (x-y) defined by the frame (60). The cantilever beam assembly (70) has a longitudinal direction and extends within said plane. The vertical support beams (40) are connected between the mirror body (50) and the frame (60) along the rotation axis (58). The cantilever beam assembly (70) has a cantilever beam (72), being coupled at a first end via relief means (74) to the frame (60) and fixed at a second end (722) to the mirror body (50). The cantilever beam (72) has a thickness, perpendicular to a plane of the frame (60), that is smaller than its width in the plane of the frame (60).

Abstract: A MEMS-micro-mirror (30) is provided comprising a mirror body (50) that is rotatably arranged in a mirror frame (60) around a rotation axis (58) extending in a plane defined by the mirror body. The rotation axis extends through a first and a second mutually opposite end-portion (51, 53) of the mirror body. The mirror has a reflective first main surface (55) and opposite said first main surface a second main surface (57) provided with a first and a second pair of reinforcement beams. The pair of reinforcement beams (91a, 91b) extends from the first end-portion (51) in mutually opposite directions away from the rotation axis. The second pair of reinforcement beams (93a, 93b) extends from the second end-portion (53) in mutually opposite directions away from the rotation axis. Reinforcement beams of said first pair extend towards respective ones of said second pair.

Abstract: A MEMS micromirror (30) is presented including a frame (60) with a mirror body (50) arranged therein. The mirror body (50) is rotatable around a rotation axis (58) extending in a plane (x-y) defined by the frame (60). The MEMS micromirror (30) further includes at least one cantilever beam assembly (70) having a longitudinal direction and extending within said plane. The MEMS micromirror (30) also includes vertical support beams (40) connected between the mirror body (50) and the frame (60) along the rotation axis (58). The at least one cantilever beam assembly (70) has a cantilever beam (72) with a first and a second end (721, 722) and a relief means (74) at the first end (721) allowing for a translation of the cantilever beam (72) at its first end (721) in said longitudinal direction. The first end (721) is coupled via the relief means (74) to the frame (60) and the second end (722) is fixed to the mirror body (50).

Abstract: An imaging system (100) includes a stationary gantry (102) and a rotating gantry (104). The rotating gantry (104) includes a first component (110, 114, 116) supplied with first power and a second component supplied with second power, wherein the first and second power are different. A contactless power chain (118) includes a first transformer (202, 204, 306) for transferring the first power from the stationary gantry (102) to the rotating gantry (104) and a second transformer (202, 204, 306) for transferring the second power from the stationary gantry (102) to the rotating gantry (104). The first and second transformers (202, 204, 306) are shifted relative to each other along the longitudinal axis (108) by a pre-determined finite non-zero distance (240). In another embodiment, an imaging system (100) includes a stationary gantry (102) and a rotating gantry (104) that rotates about a longitudinal axis (108).

Abstract: An imaging system (100) includes a stationary gantry (102) and a rotating gantry (104). The rotating gantry (104) includes a first component (110, 114, 116) supplied with first power and a second component supplied with second power, wherein the first and second power are different. A contactless power chain (118) includes a first transformer (202, 204, 306) for transferring the first power from the stationary gantry (102) to the rotating gantry (104) and a second transformer (202, 204, 306) for transferring the second power from the stationary gantry (102) to the rotating gantry (104). The first and second transformers (202, 204, 306) are shifted relative to each other along the longitudinal axis (108) by a pre-determined finite non-zero distance (240). In another embodiment, an imaging system (100) includes a stationary gantry (102) and a rotating gantry (104) that rotates about a longitudinal axis (108).

Abstract: An electrostatic inkjet head providing high pressure to ink in order to enable high quality printing. The electrostatic actuator providing the pressure to the membrane (200) compressing the ink in a chamber (50) with an opening (20) is characterized by an overlapping area of the actuation electrode (300) and the moveable electrode (500) not determined by the area of the membrane (200) covering the chamber (50) with the ink. The maximum pressure that can be applied can be adapted by means of the ratio of the overlapping area (220) of the two electrodes and the area (210) of the membrane (200) covering the chamber (50) with the ink. Use of said head to eject a liquid drug used in an injection system.

Abstract: An electrostatic inkjet head providing high pressure to ink in order to enable high quality printing. The electrostatic actuator providing the pressure to the membrane (200) compressing the ink in a chamber (50) with an opening (20) is characterized by an overlapping area of the actuation electrode (300) and the moveable electrode (500) not determined by the area of the membrane (200) covering the chamber (50) with the ink. The maximum pressure that can be applied can be adapted by means of the ratio of the overlapping area (220) of the two electrodes and the area (210) of the membrane (200) covering the chamber (50) with the ink. Use of said head to eject a liquid drug used in an injection system.