Patents by Inventor Hendrikus Wilhelmus Van Zeijl

Hendrikus Wilhelmus Van Zeijl has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device, lithographic apparatus and device manufacturing method
    Publication number: 20070238261
    Abstract: A device for locally treating a substrate is disclosed. The device includes an enclosure for forming an enclosed environment at a location on the substrate, a seal for sealing the enclosed environment between the enclosure and the substrate, a supply channel for supplying a chemical reactant to the location, and a removal channel for removing a chemical from the enclosed environment.
    Type: Application
    Filed: April 5, 2006
    Publication date: October 11, 2007
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Johannes Wilhelmus Maria Krikhaar, Rudy Jan Maria Pellens, Arnout Johannes Meester, Hendrikus Wilhelmus Van Zeijl