Patents by Inventor Heng Chang Hsieh

Heng Chang Hsieh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Computer integrated manufacturing control system for oxide chemical mechanical polishing
    Patent number: 7029596
    Abstract: A new method is provided that extends the process of automation of the CMP process by monitoring the in-line removal rate, by using methods of curve-fitting that enable a reduction in the frequency of monitoring the removal rate of the CMP process, by enhancing the life expectancy of the polishing pad thereby further reducing the frequency of the required Preventive Maintenance and by allowing for the polishing of non-standard lots of wafers.
    Type: Grant
    Filed: December 2, 2002
    Date of Patent: April 18, 2006
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Heng Chang Hsieh, Wen-Cheng Chien
  • Computer integrated manufacturing control system for oxide chemical mechanical polishing
    Publication number: 20040149690
    Abstract: A new method is provided that extends the process of automation of the CMP process by monitoring the in-line removal rate, by using methods of curve-fitting that enable a reduction in the frequency of monitoring the removal rate of the CMP process, by enhancing the life expectancy of the polishing pad thereby further reducing the frequency of the required Preventive Maintenance and by allowing for the polishing of non-standard lots of wafers.
    Type: Application
    Filed: December 2, 2002
    Publication date: August 5, 2004
    Applicant: Taiwan Semiconductor Manufacturing Company
    Inventors: Heng Chang Hsieh, Wen-Cheng Chien
  • Shielding apparatus for protecting a machine
    Patent number: 6438901
    Abstract: The present invention provides a shielding apparatus installed over a machine in a clean room to protect the machine. The shielding apparatus comprises at least two supporting beams, and a plurality of rectangular-shaped plate flaps in parallel to each other. The flaps are connected to the supporting beams at an angle, and each flap has areas overlapping with its neighboring flap along a vertical cross-section. Each flap is an anti-acid zinc-plated steel plate with a drain piping connected its bottom to collect and deliver processing liquids.
    Type: Grant
    Filed: January 5, 2001
    Date of Patent: August 27, 2002
    Assignee: United Microelectronics Corp.
    Inventors: Kok-Weng Tan, Hung-I Shu, Yu-Chun Chiu, Heng-Chang Hsieh
  • SHIELDING APPARATUS FOR PROTECTING A MACHINE
    Publication number: 20020088195
    Abstract: The present invention provides a shielding apparatus installed over a machine in a clean room to protect the machine. The shielding apparatus comprises at least two supporting beams, and a plurality of rectangular-shaped plate flaps in parallel to each other. The flaps are connected to the supporting beams at an angle, and each flap has areas overlapping with its neighboring flap along a vertical cross-section. Each flap is an anti-acid zinc-plated steel plate with a drain piping connected its bottom to collect and deliver processing liquids.
    Type: Application
    Filed: January 5, 2001
    Publication date: July 11, 2002
    Inventors: Kok-Weng Tan, Hung-I Shu, Yu-Chun Chiu, Heng-Chang Hsieh