Abstract: An integrated antenna structure includes a grounding element, a plurality of antenna elements, and a plurality of isolators. The grounding element has an opening. The antenna elements and the isolators are disposed at an outer edge of the grounding element and an edge of the opening. The isolators are located between the antenna elements. Orthogonal projections of the antenna elements and the isolators completely overlap with the grounding element.

Abstract: A system including a water flow controller arranged to transmit electrical signals between a fluoride ion clean tool and a fluoride emission abatement system is provided. Fluoride gas is configured to be released from the fluoride ion clean tool and lead to the fluoride emission abatement system, and water is introduced to the fluoride emission abatement system so as to process the fluoride gas. The water flow controller further includes a receiver for accepting electrical signals from a detector. The detector is configured to measure a flow rate of fluoride gas introduced to the fluoride ion clean tool. In addition, a computing unit is configured to process electrical signals from the detector. A transmitter is configured to send commands to an actuator of the fluoride emission abatement system so as to adjust water introduced to the fluoride emission abatement system based on a processing result of the computing unit.