Patents by Inventor Henk de Waard

Henk de Waard has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Model-based predictive control of thermal processing
    Patent number: 6373033
    Abstract: A nonlinear model-based predictive temperature control system is described for use in thermal process reactors. A multivariable temperature response is predicted using a nonlinear parameterized model of a thermal process reactor. The nonlinear parameterized model is implemented using a neural network. Predictions are made in an auto-regressive moving average fashion with a receding prediction horizon. Model predictions are incorporated into a control law for estimating the optimum future control strategy. The high-speed, predictive nature of the controller renders it advantageous in multivariable rapid thermal processing reactors where fast response and high temperature uniformity are needed.
    Type: Grant
    Filed: June 27, 2000
    Date of Patent: April 16, 2002
    Assignee: ASM America, Inc.
    Inventors: Henk de Waard, James J. Donald, Zhimin Lu, Robin M. de Keyser
  • Model-based predictive control of thermal processing
    Patent number: 6207936
    Abstract: A nonlinear model-based predictive temperature control system is described for use in thermal process reactors. A multivariable temperature response is predicted using a nonlinear parameterized model of a thermal process reactor. The nonlinear parameterized model is implemented using a neural network. Predictions are made in an auto-regressive moving average fashion with a receding prediction horizon. Model predictions are incorporated into a control law for estimating the optimum future control strategy. The high-speed, predictive nature of the controller renders it advantageous in multivariable rapid thermal processing reactors where fast response and high temperature uniformity are needed.
    Type: Grant
    Filed: January 30, 1997
    Date of Patent: March 27, 2001
    Assignee: ASM America, Inc.
    Inventors: Henk de Waard, James J. Donald, Zhimin Lu, Robin M. de Keyser