Abstract: The invention relates to a charged particle lithography system comprising a beam generator for generating a plurality of charged particle beamlets, a beam stop array and a modulation device. The beam stop array has a surface for blocking beamlets from reaching a target surface and an aperture array in the surface for allowing beamlets to reach the target surface. The modulation device is arranged for modulating the beamlets by deflecting or not deflecting the beamlets so that the beamlets are blocked or not blocked by the beam stop array. A surface area of the modulation device comprises an elongated beam area comprising an array of apertures and associated modulators, and a power interface area for accommodating a power arrangement for powering elements within the modulation device. The power interface area is located alongside a long side of the elongated beam area and extending in a direction substantially parallel thereto.

Abstract: A maskless charged particle lithography system comprises an electron-optical column and a data path. The column includes a blanker array including blanker elements. The data path comprises a preprocessing system, transmission channels, and a pattern streaming system. The lithography system is configured for exposing a target field in two passes by allocating a first beamlet subset for exposing a first field subset during a first pass and a second beamlet subset for exposing a second field subset during a second pass. A first beam selector selects a first pattern data subset containing exposure data for the first beamlet subset and a second pattern data subset containing exposure data for the second beamlet subset. Second beam selectors connect transmission channels assigned for transmitting the first pattern data subset to a first blanker elements subset, and transmission channels assigned for transmitting the second pattern data subset to a second blanker elements subset.

Abstract: The invention relates to a charged-particle multi-beamlet lithography system. The system comprises a beam generator for generating a plurality of beamlets, a beamlet blanker array for patterning the plurality of beamlets, an optical fiber arrangement, and a projection system. The beamlet blanker array comprises a substrate provided with a first area comprising one or more modulators and a second area free of modulators. The beamlet blanker array comprises one or more light sensitive elements, electrically connected to the one or more modulators, and arranged to receive light beams carrying pattern data. The optical fiber arrangement comprises a plurality of optical fibers for guiding the light beams carrying pattern data towards the one or more light sensitive elements. The projection of the optical fiber arrangement onto a surface of the beamlet blanker array in a direction perpendicular to the surface falls entirely within the second area.

Abstract: The invention relates to a charged-particle multi-beamlet lithography system for transferring a pattern onto the surface of a target. The system comprises a beam generator for generating a plurality of charged particle beamlets, a beamlet blanker array for patterning the beamlets in accordance with a pattern, and a projection system for projecting the patterned beamlets onto the target surface. The blanker array comprises a plurality of modulators and a plurality of light sensitive elements. The light sensitive elements are arranged to receive pattern data carrying light beams and to convert the light beams into electrical signals. The light sensitive elements are electrically connected to one or more modulators for providing the received pattern data. The blanker array is coupled to a fiber fixation substrate which accommodates end sections of a plurality of fibers for providing pattern data carrying light beams as an assembled group with a fixed connection.

Abstract: A controllable optical system has an optical component comprising a chamber housing first and second fluids, the interface between the fluids defining a boundary surface (15;88a,88b) and an electrode arrangement (14,16;86,87) for electrically controlling the shape of the boundary surface. A drive circuit is operable in an operative mode and an inoperative, power saving mode, and a storage capacitor maintains a signal on the electrode arrangement during the inoperative mode. Feedback is used control switching of the drive circuit between modes taking into account the boundary surface conditions.

Abstract: The invention relates to an electronic filter circuit comprising a controllable transconductance circuit wherein a feedback loop is added to a substantially linear transconductance amplifier G, between two electronic leads having an input portion before the feedback loop and an output portion thereafter.

Abstract: The invention relates to an electronic filter circuit comprising a controllable transconductance circuit wherein a feedback loop is added to a substantially linear transconductance amplifier G, between two electronic leads having an input portion before the feedback loop and an output portion thereafter.

Abstract: An arrangement (1) for converting voltage (Vin) into current (Iout), implemented on a chip (100), comprises a first V/I converter (3), the operation of which is based on a conversion resistor (Rconv) formed on the chip. This resistor has an unknown fabrication tolerance (&agr;). This is compensated for by the presence of a second V/I converter (13) having a compensation resistor (Rcomp), which is also formed on the chip and which has the same fabrication tolerance (&agr;). Furthermore, a third V/I converter (23) is present, which operates on the basis of an external resistor (Rref). The second V/I converter (13) converts a reference voltage (Vref) into a compensation current signal (Icomp), and the third V/I converter (23) converts the reference voltage (Vref) into a reference current signal (Iref).

Abstract: An interface circuit has a circuit input. The circuit has a first controlled amplifier combined with an at least resistive element. The first amplifier provides at a first output a first output current dependent on a voltage of the circuit input. The circuit also has a second controlled current amplifier. The second amplifier provides at a second output a second output current dependent on a current of the circuit input. The second output is coupled to the first output. The circuit further comprises a third controlled current with a third input. The third input is coupled to the first and second outputs.

Abstract: A switched mode power convertor with a switch, a switching control device, a coil for storing energy, and a load. The switch is coupled between an input of the power convertor and the coil, and the coil is further coupled to an output of the power convertor. The switching control device has a control input and controls the switch. The switched mode power convertor further has an input current estimator which estimates the input from a quotient of a measured output power and a measured input voltage, taking into account the efficiency of the power convertor. A signal proportional to the estimated input current is supplied to the control input.

Abstract: A terminal (1) for wirebound telecommunication according to the invention comprises a class D amplifier which is supplied with a rectified ringing voltage (V.sub.ring) coming from the line (2) in a ringing condition and, in an off-hook condition, is supplied with the line voltage (V.sub.ln) coming from the line (2). A class D amplifier (20) is advantageous in that it is suitable for use with supply voltages which may vary over a large range. As a result, both the rectified ringing voltage (V.sub.ring) and the line voltage (V.sub.ln) can plainly be used as a supply voltage for the amplifier (20) and no additional circuits are necessary for matching these voltages.