Patents by Inventor Henk-Willem VELTKAMP

Henk-Willem VELTKAMP has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11629048
    Abstract: The invention relates to a method of fabricating a micro machined channel, comprising the steps of providing a substrate of a first material and having a buried layer of a different material therein, and forming at least two trenches in said substrate by removing at least part of said substrate. Said trenches are provided at a distance from each other and at least partly extend substantially parallel to each other, as well as towards said buried layer. The method comprises the step of forming at least two filled trenches by providing a second material different from said first material and filling said at least two trenches with at least said second material; forming an elongated cavity in between said filled trenches by removing at least part of said substrate extending between said filled trenches; and forming an enclosed channel by providing a layer of material in said cavity and enclosing said cavity.
    Type: Grant
    Filed: September 17, 2018
    Date of Patent: April 18, 2023
    Assignees: BERKIN B.V., UNIVERSITEIT TWENTE, STICHTING VOOR DE TECHNISCHE WETENSCHAPPEN
    Inventors: Yiyuan Zhao, Henk-Willem Veltkamp, Yaxiang Zeng, Joost Conrad Lötters, Remco John Wiegerink
  • Publication number: 20220324701
    Abstract: The invention relates to a microelectromechanical system (MEMS) component or microfluidic component comprising a free-hanging or free-standing microchannel (1), as well as methods for manufacturing such a microchannel, as well as a flow sensor, e.g. a thermal flow sensor or a Coriolis flow sensor, pressure sensor or multi-parameter sensor, valve, pump or microheater, comprising such a microelectromechanical system component or microfluidic component. The MEMS component allows to increase the flow range and/or decrease the pressure drop of for instance a micro Coriolis mass flow meter by increasing the channel diameter, while maintaining its advantages.
    Type: Application
    Filed: September 18, 2020
    Publication date: October 13, 2022
    Inventors: Wouter SPARREBOOM, Jarno GROENESTEIJN, Jack Herman VAN PUTTEN, Meint Jelle DE BOER, Remco John WIEGERINK, Henk-Willem VELTKAMP, Qihui YU, Mahdieh YARIESBOUEI, Miguel A. RODRIGUEZ OLGUIN, Joost Conrad LÖTTERS
  • Publication number: 20200216308
    Abstract: The invention relates to a method of fabricating a micro machined channel, comprising the steps of providing a substrate of a first material and having a buried layer of a different material therein, and forming at least two trenches in said substrate by removing at least part of said substrate. Said trenches are provided at a distance from each other and at least partly extend substantially parallel to each other, as well as towards said buried layer. The method comprises the step of forming at least two filled trenches by providing a second material different from said first material and filling said at least two trenches with at least said second material; forming an elongated cavity in between said filled trenches by removing at least part of said substrate extending between said filled trenches; and forming an enclosed channel by providing a layer of material in said cavity and enclosing said cavity.
    Type: Application
    Filed: September 17, 2018
    Publication date: July 9, 2020
    Inventors: Yiyuan ZHAO, Henk-Willem VELTKAMP, Yaxiang ZENG, Joost Conrad LÖTTERS, Remco John WIEGERINK