Patents by Inventor Henri Jacques Antoine Jean Starmans

Henri Jacques Antoine Jean Starmans has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10114289
    Abstract: The invention is directed at an exposure head for use in an exposure apparatus for illuminating a surface, the exposure head comprising one or more radiative sources for providing one or more beams, an optical scanning unit arranged for receiving the one or more beams and for directing the beams towards the surface for impinging each of the beams on an impingement spot, a rotation actuating unit connected to the optical scanning unit for at least partially rotating the optical scanning unit, wherein the impingement spots of the one or more beams are scanned across the surface by said at least partial rotation of the optical scanning unit, wherein the optical scanning unit comprises a transmissive element including one or more facets for receiving the one or more beams and for outputting the beams after conveying thereof through the transmissive element, for displacing the beams upon said rotation of the transmissive element for enabling the scanning of the impingement spots.
    Type: Grant
    Filed: April 14, 2015
    Date of Patent: October 30, 2018
    Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
    Inventors: Jacobus Hubertus Theodoor Jamar, Herman Hendrikus Maalderink, Erwin Rinaldo Meinders, Peter Theodorus Maria Giesen, Erwin John van Zwet, Henri Jacques Antoine Jean Starmans
  • Publication number: 20170038690
    Abstract: The invention is directed at an exposure head for use in an exposure apparatus for illuminating a surface, the exposure head comprising one or more radiative sources for providing one or more beams, an optical scanning unit arranged for receiving the one or more beams and for directing the beams towards the surface for impinging each of the beams on an impingement spot, a rotation actuating unit connected to the optical scanning unit for at least partially rotating the optical scanning unit, wherein the impingement spots of the one or more beams are scanned across the surface by said at least partial rotation of the optical scanning unit, wherein the optical scanning unit comprises a transmissive element including one or more facets for receiving the one or more beams and for outputting the beams after conveying thereof through the transmissive element, for displacing the beams upon said rotation of the transmissive element for enabling the scanning of the impingement spots.
    Type: Application
    Filed: April 14, 2015
    Publication date: February 9, 2017
    Inventors: Jacobus Hubertus Theodoor Jamar, Herman Hendrikus Maalderink, Erwin Rinaldo Meinders, Peter Theodorus Maria Giesen, Erwin John van Zwet, Henri Jacques Antoine Jean Starmans