Patents by Inventor Henri Johannes Vink

Henri Johannes Vink has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Illumination system
    Publication number: 20070127005
    Abstract: A system and method are used to substantially homogenizing and removing at least some coherence from a beam of light.
    Type: Application
    Filed: December 2, 2005
    Publication date: June 7, 2007
    Applicants: ASML Holding N.V., ASML Netherlands B.V.
    Inventors: Huibert Visser, Jacob Klinkhamer, Lev Ryzhikov, Scott Coston, Adel Joobeur, Yevgeniy Konstantinovich Shmarev, HENRI JOHANNES VINK
  • Lithographic apparatus and device manufacturing method utilizing a blazing portion of a contrast device
    Publication number: 20060227069
    Abstract: A system and method utilize a lithographic apparatus comprising an illumination system, an array of individually controllable elements, and a projection system. The illumination system conditions a radiation beam. The array of individually controllable elements modulates the beam. At least one group of elements in the array of individually controllable elements being tilted to at least a same tilt direction with a same tilt sign. For example, the tilting can form one or more blazing portions (e.g., blazing super-pixel portions) in the array of individually controllable elements. The projection system projects the modulated beam onto a target portion of a substrate. The projection system includes an aperture that filters out undesired diffraction orders of the modulated beam.
    Type: Application
    Filed: April 8, 2005
    Publication date: October 12, 2006
    Applicant: ASML Netherlands B.V.
    Inventors: Johannes Baselmans, Huibert Visser, Henri Johannes Vink