Patents by Inventor Henri Jon

Henri Jon has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • GAS AND LIQUID INJECTION METHODS AND APPARATUS
    Publication number: 20110256724
    Abstract: A liquid injection system for a processing chamber includes a liquid injector that receives a liquid from a liquid supply and that selectively pulses the liquid into a conduit. A control module selects a number of pulses and a pulse width of the liquid injector. A gas supply supplies gas into the conduit. A sensor senses at least one of a first temperature and a first pressure in the conduit and that generates at least one of a first temperature signal and a first pressure signal, respectively. The control module confirms that the selected number of pulses occur based on the at least one of the first temperature signal and the first pressure signal.
    Type: Application
    Filed: April 11, 2011
    Publication date: October 20, 2011
    Applicant: Novellus Systems, Inc.
    Inventors: Ramesh Chandrasekharan, Antonio Xavier, Kevin Jennings, Ming Li, Henri Jon, Dennis Hausmann