Abstract: A LiDAR system includes a first optical lens, and one or more first optoelectronic packages spaced apart from the first optical lens along the optical axis of the first optical lens. Each respective first optoelectronic package includes a first plurality of optoelectronic components positioned on the respective first optoelectronic package such that a surface of each respective optoelectronic component lies substantially on the first surface of best focus. The LiDAR system further includes a second optical lens, and one or more second optoelectronic packages spaced apart from the second optical lens along the optical axis of the second optical lens. Each respective second optoelectronic package includes a second plurality of optoelectronic components positioned on the respective second optoelectronic package such that a surface of each respective optoelectronic component lies substantially on the second surface of best focus.

Abstract: A LiDAR system includes a first optical lens, and one or more first optoelectronic packages spaced apart from the first optical lens along the optical axis of the first optical lens. Each respective first optoelectronic package includes a first plurality of optoelectronic components positioned on the respective first optoelectronic package such that a surface of each respective optoelectronic component lies substantially on the first surface of best focus. The LiDAR system further includes a second optical lens, and one or more second optoelectronic packages spaced apart from the second optical lens along the optical axis of the second optical lens. Each respective second optoelectronic package includes a second plurality of optoelectronic components positioned on the respective second optoelectronic package such that a surface of each respective optoelectronic component lies substantially on the second surface of best focus.

Abstract: A linear position array detector system is provided which imparts light energy to a surface of a specimen, such as a semiconductor wafer, receives light energy from the specimen surface and monitors deviation of the retro or reflected beam from that expected to map the contours on the specimen surface. The retro beam will, with ideal optical alignment, return along the same path as the incident beam if and only if the surface is normal to the beam. The system has a measurement device or sensor within the path of the retro or reflected beam to measure deviation of the retro beam from expected. The sensor is preferably a multiple element array of detector-diodes aligned in a linear fashion. A unique weighting and summing scheme is provided which increases the mechanical dynamic range while preserving sensitivity.

Abstract: A sensor module having a package substrate, a sensor disposed within and electrically connected to the package substrate, an amplifier disposed within and electrically connected to the package substrate, and electrical traces within the package substrate for routing sensor signals from the sensor to the amplifier, and then from the amplifier to external electrical connectors on the package substrate.

Abstract: A sensor module having a package substrate, a sensor disposed within and electrically connected to the package substrate, an amplifier disposed within and electrically connected to the package substrate, and electrical traces within the package substrate for routing sensor signals from the sensor to the amplifier, and then from the amplifier to external electrical connectors on the package substrate.

Abstract: A linear position array detector system is provided which imparts light energy to a surface of a specimen, such as a semiconductor wafer, receives light energy from the specimen surface and monitors deviation of the retro or reflected beam from that expected to map the contours on the specimen surface. The retro beam will, with ideal optical alignment, return along the same path as the incident beam if and only if the surface is normal to the beam. The system has a measurement device or sensor within the path of the retro or reflected beam to measure deviation of the retro beam from expected. The sensor is preferably a multiple element array of detector-diodes aligned in a linear fashion. A unique weighting and summing scheme is provided which increases the mechanical dynamic range while preserving sensitivity.

Abstract: A linear position array detector system is provided which imparts light energy to a surface of a specimen, such as a semiconductor wafer, receives light energy from the specimen surface and monitors deviation of the retro or reflected beam from that expected to map the contours on the specimen surface. The retro beam will, with ideal optical alignment, return along the same path as the incident beam if and only if the surface is normal to the beam. The system has a measurement device or sensor within the path of the retro or reflected beam to measure deviation of the retro beam from expected. The sensor is preferably a multiple element array of detector-diodes aligned in a linear fashion. A unique weighting and summing scheme is provided which increases the mechanical dynamic range while preserving sensitivity.

Abstract: A linear position array detector system is provided which imparts light energy to a surface of a specimen, such as a semiconductor wafer, receives light energy from the specimen surface and monitors deviation of the retro or reflected beam from that expected to map the contours on the specimen surface. The retro beam will, with ideal optical alignment, return along the same path as the incident beam if and only if the surface is normal to the beam. The system has a measurement device or sensor within the path of the retro or reflected beam to measure deviation of the retro beam from expected. The sensor is preferably a multiple element array of detector-diodes aligned in a linear fashion. A unique weighting and summing scheme is provided which increases the mechanical dynamic range while preserving sensitivity.

Abstract: A linear position array detector system is provided which imparts light energy to a surface of a specimen, such as a semiconductor wafer, receives light energy from the specimen surface and monitors deviation of the retro or reflected beam from that expected to map the contours on the specimen surface. The retro beam will, with ideal optical alignment, return along the same path as the incident beam if and only if the surface is normal to the beam. The system has a measurement device or sensor within the path of the retro or reflected beam to measure deviation of the retro beam from expected. The sensor is preferably a multiple element array of detector-diodes aligned in a linear fashion. A unique weighting and summing scheme is provided which increases the mechanical dynamic range while preserving sensitivity.

Abstract: A circuit arrangement for processing signals occurring at randomly varying intervals wherein the processing time is not negligible. A portion of the signal path is divided into a plurality of identical parallel part-signal-paths, each having an electronic switch (16-19) controlled by a control circuit (29) in such a way that the electronic switch in a free part-signal-path is made conducting when a signal occurs during the processing time of the preceding signal. Correct processing of a greater number of signals is thus achieved than has been possible with known circuit arrangements.