Patents by Inventor Henrik OBST

Henrik OBST has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate treatment system
    Patent number: 8851274
    Abstract: A substrate treatment system for treating substrates includes a system chamber, delimited by chamber walls, at least one substrate treatment device and a transportation device inside the system chamber. The transportation device has an arrangement of transportation rollers arranged one behind the other in the transportation direction, for vertical or horizontal transportation of substrates. At least a first group of transportation rollers which are arranged immediately one behind the other, each has its own drive device.
    Type: Grant
    Filed: July 12, 2011
    Date of Patent: October 7, 2014
    Assignee: Von Ardenne Anlagentechnik GmbH
    Inventor: Henrik Obst
  • Substrate treatment system
    Patent number: 8757364
    Abstract: A substrate treatment system for treating substrates in a continuous process includes a system chamber delimited by chamber walls, having an entry lock and an exit lock, and also at least one substrate treatment device and a transportation device inside the system chamber. The transportation device has an arrangement of transportation rollers arranged one behind the other in the transportation direction, for vertical or horizontal transportation of substrates. The rotor of the drive device is arranged under the pressure conditions prevailing in the system chamber and the stator of the drive device is arranged outside the pressure conditions prevailing in the system chamber.
    Type: Grant
    Filed: July 12, 2011
    Date of Patent: June 24, 2014
    Assignee: VON ARDENNE Anlagentechnik GmbH
    Inventor: Henrik Obst
  • SUBSTRATE TREATMENT SYSTEM
    Publication number: 20120006656
    Abstract: A substrate treatment system for treating substrates includes a system chamber, delimited by chamber walls, at least one substrate treatment device and a transportation device inside the system chamber. The transportation device has an arrangement of transportation rollers arranged one behind the other in the transportation direction, for vertical or horizontal transportation of substrates. At least a first group of transportation rollers which are arranged immediately one behind the other, each has its own drive device.
    Type: Application
    Filed: July 12, 2011
    Publication date: January 12, 2012
    Applicant: VON ARDENNE ANLAGENTECHNIK GMBH
    Inventor: Henrik OBST
  • SUBSTRATE TREATMENT SYSTEM
    Publication number: 20120006648
    Abstract: A substrate treatment system for treating substrates in a continuous process includes a system chamber delimited by chamber walls, having an entry lock and an exit lock, and also at least one substrate treatment device and a transportation device inside the system chamber. The transportation device has an arrangement of transportation rollers arranged one behind the other in the transportation direction, for vertical or horizontal transportation of substrates. The rotor of the drive device is arranged under the pressure conditions prevailing in the system chamber and the stator of the drive device is arranged outside the pressure conditions prevailing in the system chamber.
    Type: Application
    Filed: July 12, 2011
    Publication date: January 12, 2012
    Applicant: VON ARDENNE ANLAGENTECHNIK GMBH
    Inventor: Henrik OBST