Abstract: A method includes receiving first data associated with an equipment parameter. The first data is indicative of an equipment setting of a process tool of a plurality of process tools at a first manufacturing system. The method further includes providing the first data as input to a trained machine learning model. The trained machine learning model is trained using historical data pertaining to equipment parameters of the plurality of process tools at the first manufacturing system. The method further includes obtaining, as output of the trained machine learning model, a predicted value of a metric corresponding to the equipment parameter. The method further includes comparing the predicted value of the metric with the first data, and performing a corrective action based on the comparing.

Abstract: The present invention relates to a microwave powered sensor assembly for microwave ovens. The microwave powered sensor assembly includes a microwave antenna to generate an RF antenna signal in response to microwave radiation at a predetermined excitation frequency. A direct current (dc) power supply circuit of the microwave powered sensor assembly is operatively coupled to the RF antenna signal to extract energy from the RF antenna signal and produce a power supply voltage. A sensor is connected to the power supply voltage and configured to measure a physical or chemical property of a food item under heating in a microwave oven chamber.

Abstract: The present invention relates to a medical preparation container which includes a microwave power sensor assembly. The microwave powered sensor assembly includes a sensor configured to measure a physical property or chemical property of a medical preparation during its heating in a microwave oven. The microwave powered sensor assembly is configured for harvesting energy from a microwave radiation emitted by the microwave oven and energize the sensor by the harvested microwave energy.

Abstract: The present invention relates to a sensor assembly (105) for a cooking chamber of a microwave oven and a method for controlling such a sensor assembly. The sensor assembly comprises: at least one energy consuming part including a first sensor (108); an energy harvesting part (102) configured to harvest energy from microwave radiation within the cooking chamber; and an energy supply part (106) for supplying energy from the energy harvesting part (102) to the at least one energy consuming part (108). The sensor assembly (105) being configured to: obtain first information indicative of availability of microwave radiation at the energy harvesting part (102); and control at least one energy consuming operation of at least one of the at least one energy consuming (108) part in response to the first information.

Abstract: The present invention relates to a medical preparation container which includes a microwave power sensor assembly. The microwave powered sensor assembly includes a sensor configured to measure a physical property or chemical property of a medical preparation during its heating in a microwave oven. The microwave powered sensor assembly is configured for harvesting energy from a microwave radiation emitted by the microwave oven and energize the sensor by the harvested microwave energy.

Abstract: The present invention relates to a microwave powered sensor assembly for microwave ovens. The microwave powered sensor assembly includes a microwave antenna to generate an RF antenna signal in response to microwave radiation at a predetermined excitation frequency. A direct current (dc) power supply circuit of the microwave powered sensor assembly is operatively coupled to the RF antenna signal to extract energy from the RF antenna signal and produce a power supply voltage. A sensor is connected to the power supply voltage and configured to measure a physical or chemical property of a food item under heating in a microwave oven chamber.