Patents by Inventor Henry A. Majewski

Henry A. Majewski has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for plasma etching
    Patent number: 4595452
    Abstract: The invention comprises a novel method and apparatus for plasma etching a semiconductor workpiece so as to produce chamfering at the outer edges of depressions or grooves in the workpiece, e.g., depressions or grooves in a substrate or one or more layers on the substrate. The novel apparatus comprises a first gas feeder means for delivering an etchant gas at a right angle to the workpiece, and a second gas feeder means for delivering an etchant gas at an acute angle to the workpiece.
    Type: Grant
    Filed: March 11, 1985
    Date of Patent: June 17, 1986
    Assignee: Oerlikon-Buhrle U.S.A. Inc.
    Inventors: Richard F. Landau, Henry A. Majewski
  • Method of inhibiting corrosion after aluminum etching
    Patent number: 4592800
    Abstract: A novel process for treating IC wafers or chips so as to inhibit corrosion after aluminum etching. The process involves passivating the wafers or chips by displacing reactive gaseous species adsorbed on the wafers or chips with a gaseous species that is substantially inert and hence will not corrode aluminum layers on the IC wafers or chips.
    Type: Grant
    Filed: November 2, 1984
    Date of Patent: June 3, 1986
    Assignee: Oerlikon-Buhrle U.S.A. Inc.
    Inventors: Richard F. Landau, Henry A. Majewski
  • Ink jet apparatus with a flexible piezoelectric member and method of operating same
    Patent number: 4395719
    Abstract: An ink jet comprises an elastic tubular member (14) characterized by piezoelectric properties. The tubular member (14) is terminated in an orifice (26) adapted to pass droplets of ink when the chamber formed within the tubular member (14) is reduced in size. The piezoelectric properties are provided by a substantially homogeneous mixture of piezoelectric material and an elastic binder.
    Type: Grant
    Filed: January 5, 1981
    Date of Patent: July 26, 1983
    Assignee: Exxon Research and Engineering Co.
    Inventors: Henry A. Majewski, William Salmre, R. Hugh Van Brimer