Patents by Inventor Henry Brumbach

Henry Brumbach has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Shadow clamp
    Patent number: 5656122
    Abstract: A wafer clamping member for clamping a wafer in a plasma reaction chamber. The clamping member has a design which minimizes particle contamination of the wafer and allows more wafers to be processed before it is necessary to clean built-up deposits from the clamping member. The clamping member includes a clamping portion which clamps an outer periphery of the wafer against a bottom electrode and a shadow portion which provides a gap between an inner edge of the clamping member and the upper surface of the wafer. The gap is open to the interior of the plasma reaction chamber and preferably has a height equal to about a mean free path of a gas activated to form a plasma in the plasma reaction chamber.
    Type: Grant
    Filed: March 17, 1995
    Date of Patent: August 12, 1997
    Assignee: Lam Research Corporation
    Inventors: Eric Howard Lenz, Henry Brumbach
  • Shadow clamp
    Patent number: 5534110
    Abstract: A wafer clamping member for clamping a wafer in a plasma reaction chamber. The clamping member has a design which minimizes particle contamination of the wafer and allows more wafers to be processed before it is necessary to clean built-up deposits from the clamping member. The clamping member includes a clamping portion which clamps an outer periphery of the wafer against a bottom electrode and a shadow portion which provides a gap between an inner edge of the clamping member and the upper surface of the wafer. The gap is open to the interior of the plasma reaction chamber and preferably has a height equal to about a mean free path of a gas activated to form a plasma in the plasma reaction chamber.
    Type: Grant
    Filed: July 30, 1993
    Date of Patent: July 9, 1996
    Assignee: Lam Research Corporation
    Inventors: Eric H. Lenz, Henry Brumbach