Abstract: A high Q MEMS capacitor that can be continuously tuned with a large tuning ratio or reversibly trimmed using an electrostatic force. The tunable capacitor has a master/slave structure in which a control voltage is applied to the master (control) capacitor to set the capacitance of the slave (signal) capacitor to which an RF signal is applied via a suspended mechanical coupler. The master-slave structure reduces tuning error by reducing the signal capacitor's surface area and increasing its spring constant, and may eliminate the need for discrete blocking inductors by electrically isolating the control and signal capacitors. The trimmable capacitor provides an electrostatic actuator that selectively engages a stopper with teeth on a tunable capacitor structure to fix the trimmed capacitance.

Abstract: An electrical capacitor includes an organic electrolyte to provide high power, high energy density, and broad operating temperature range. The capacitor includes electrodes and an electrolyte system comprising a salt combined with a solvent containing a nitrile. The electrolyte system is selected to be relatively nonreactive and difficult to oxidize or reduce so as to produce a high electric potential range. As examples, the electrolyte may include a solvent selected from the group consisting of acetonitrile, succinonitrile, glutaronitrile, propylene carbonate, and ethylene carbonate; a salt cation selected from the group consisting of tetraalkylamonium (R.sub.4 N.sup.+) and alkali metals; and an anion selected from the group consisting of trifluoromethylsulfonate (CF.sub.3 SO.sub.3.sup.-), bistrifluoromethylsulfurylimide (N(CF.sub.3 SO.sub.2).sub.2.sup.-), tristrifluoromethylsulfurylcarbanion (C(CF.sub.3 SO.sub.2).sub.3.sup.-), tetrafluoroborate (BF.sub.4.sup.-), hexafluorophosphate (PF.sub.6.sup.