Patents by Inventor Henry WEGERT

Henry WEGERT has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optical assembly, projection system, metrology system and EUV lithography apparatus
    Patent number: 10146048
    Abstract: An optical assembly (1) includes an optical element (2), a mount (3) configured to hold the optical element (2), and a plurality of fastening elements (12) with fastening areas (14) configured to fasten the optical element (2) to the mount (3). The fastening elements (12) bridge an interstice (11) between the optical element (2) and the mount (3), and a purge device (15) produces at least one purge gas flow (16) in the region of the optical element (2) such that the purge gas flow flows around the fastening areas (14) of the fastening elements (12).
    Type: Grant
    Filed: October 12, 2016
    Date of Patent: December 4, 2018
    Assignee: CARL ZEISS SMT GMBH
    Inventors: Michael Brehm, Wolfgang Merkel, Ulrich Weber, Henry Wegert
  • OPTICAL ASSEMBLY, PROJECTION SYSTEM, METROLOGY SYSTEM AND EUV LITHOGRAPHY APPARATUS
    Publication number: 20170102539
    Abstract: An optical assembly (1) includes an optical element (2), a mount (3) configured to hold the optical element (2), and a plurality of fastening elements (12) with fastening areas (14) configured to fasten the optical element (2) to the mount (3). The fastening elements (12) bridge an interstice (11) between the optical element (2) and the mount (3), and a purge device (15) produces at least one purge gas flow (16) in the region of the optical element (2) such that the purge gas flow flows around the fastening areas (14) of the fastening elements (12).
    Type: Application
    Filed: October 12, 2016
    Publication date: April 13, 2017
    Inventors: Michael BREHM, Wolfgang MERKEL, Ulrich WEBER, Henry WEGERT