Patents by Inventor Herbert Klingshirn

Herbert Klingshirn has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Continuous liquid silicon recharging process in czochralski crucible pulling
    Patent number: 5324488
    Abstract: In the Czochralski crucible pulling of crystal ingots, in particular those of silicon and having particularly large crystal diameters, the degree of filling of the crucible is kept approximately constant during the pulling process by continuously adding solid or liquid recharging material. According to the invention, the known disadvantages of thermal disturbances and the introduction of impurities and particles are overcome by a recharging system with a gas-tight seal, comprising additional crucible, stock container for semiconductor material and dopant having the appropriate feedlines and an exhaust gas line. In addition, the process makes possible a regulatable and separate recharging of dopant via the additional crucible.
    Type: Grant
    Filed: June 7, 1993
    Date of Patent: June 28, 1994
    Assignee: Wacker-Chemitronic Gesellschaft fur Elektronik-Grundstoff m.b.H.
    Inventors: Herbert Klingshirn, Reinhard Lang
  • Continuous liquid silicon recharging process in Czochralski crucible pulling
    Patent number: 5242531
    Abstract: In the Czochralski crucible pulling of crystal ingots, in particular those of silicon and having particularly large crystal diameters, the degree of filling of the crucible is kept approximately constant during the pulling process by continuously adding solid or liquid recharging material. According to the invention, the known disadvantages of thermal disturbances and the introduction of impurities and particles are overcome by a recharging system with a gas-tight seal, comprising additional crucible, stock container for semiconductor material and dopant having the appropriate feedlines and an exhaust gas line. In addition, the process makes possible a regulatable and separate recharging of dopant via the additional crucible.
    Type: Grant
    Filed: February 3, 1992
    Date of Patent: September 7, 1993
    Assignee: Wacker-Chemitronic Gesellschaft fur Elektronik-Grundstoffe m.b.H.
    Inventors: Herbert Klingshirn, Reinhard Lang