Abstract: The invention relates to a substrate holding and locking system for chemical and/or electrolytic surface treatment of a substrate in a process fluid and a corresponding method. The system comprises a first element, a second element, a reduced pressure holding unit and a magnetic locking unit. The first element and the second element are configured to hold the substrate between each other. The reduced pressure holding unit comprises a pump to reduce an interior pressure inside the substrate holding and locking system below atmospheric pressure. The magnetic locking unit is configured to lock the first element and the second element with each other. The magnetic locking unit comprises a magnet control and at least a magnet. The magnet is arranged at one of the first element and the second element. The magnet control is configured to control a magnetic force between the first element and the second element.

Abstract: The invention relates to a module for chemically processing a substrate, a method for chemically processing a substrate and a use of a module for chemically processing a substrate and in particular a large substrate. The module for chemically processing a substrate comprises: an immersion chamber, a spray unit, and a motion unit (14). The immersion chamber is configured to receive a first liquid and the substrate, so that the substrate is immersed in the liquid. The spray unit comprises a plurality of spray nozzles, which are configured to spray a second liquid within the immersion chamber. The motion unit is configured to provide a relative motion between the substrate and the spray unit.

Abstract: A zeolite of type 5A, which has been used to separate normal paraffins from a hydrocarbon mixture containing normal paraffins by bringing the hydrocarbon mixture into contact with the zeolite whereby the zeolite absorbs the normal paraffins and then desorbing the normal paraffins from the zeolite by contacting the zeolite with water-containing ammonia vapour, is reactivated by first contacting the zeolite with at least one of water, aqueous solutions and water-containing gases at a temperature below 350.degree. C and then heating the zeolite to a temperature above 350.degree. C.