Abstract: A thin interface pellicle probe for making temporary or permanent interconnections to pads or bumps on a semiconductor device wherein the pads or bumps may be arranged in high density patterns is described incorporating an electrode for each pad or bump wherein the electrode has a raised portion thereon for penetrating the surface of the pad or bump to create sidewalls to provide a clean contact surface and the electrode has a recessed surface to limit the penetration of the raised portion. The electrodes may be affixed to a thin flexible membrane to permit each contact to have independent movement over a limited distance and of a limited rotation. The invention overcomes the problem of making easily breakable electrical interconnections to high density arrays of pads or bumps on integrated circuit structures for testing, burn-in or package interconnect and testing applications.

Abstract: A dual mode Z/Theta stage supports and moves a work piece such as a semiconductor wafer into position for positioning during testing. The Z/Theta stage has a peripheral four point elevator drive. The elevating suspension comprises parallel, vertically oriented, rigid lift pins which bear the weight of a top-plate. The lift pins are located about the periphery of the stage to provide stability of the support. The top plate essentially floats on the lift pins so that virtually no frictional forces are translated to lift pins. The lift pins are elevated together by the force of four matched pin lift levers, crank arms. The crank arms are driven by downward force from a vertically translating air piston which is in contact with the crank arms 31. The air piston provides a gentle force moderated by pneumatic pressure which can moderate the full force of a stepping motor which drives it.

Abstract: An electrical probe assembly with rotatable probe elements for establishing electrical contact to pad surfaces having a plurality of elongated probe elements formed of a conductive flexible material, each having a length many times its diameter, spaced upper and lower flat support elements having apertures receiving the ends of the probe elements and maintaining the probe elements in a generally parallel arrangement with at least the lower ends in a configuration corresponding to the pad configuration to be contacted, and a means to simultaneously rotate the probe elements.

Abstract: A contact for a contactor assembly is provided which is short enough for use in high frequency applications and which has a pivotable end and a pre-curved center section which deflects in combination with the pivoting of the pivotable end to provide minimal forces on contact pads when a force is applied between the pad and the contactor assembly. The pre-curved center section has a large radius and is arranged such that the pivotable end and the contacting end of the contact are offset from one another within the plane including the radius of the center section so that the deflection direction is predetermined and deflection forces are reduced.