Abstract: In one embodiment, an electrode is disposed on a surface of a first portion of the dielectric, with the first portion and the electrode forming an electrode region of the device. A charge-dissipation structure is then formed by implanting ions into the electrode region and a second portion of the dielectric located outside of the electrode region. In another embodiment, a charge-dissipation structure is formed by implanting ions into the dielectric of a movable part of an electro-mechanical system. Advantageously, ion implantation can be performed without masking, lithography, or elevated temperatures; the electrical properties of the resulting charge dissipation structure can be controlled relatively easily; and portions of the charge dissipation structure are protected from oxidation and/or corrosion by the dielectric material.

Abstract: An ordnance fuse apparatus is described that uses electrical and mechanical, and optical devices. The ordnance fuse apparatus includes a controller to control an optical switch and a laser to detonate an explosive charge of the ordnance. Other embodiments include an accelerometer and/or spin detector for detecting that the ordnance has been fired and an optical detector for detecting the proper operation of the laser and a position sensor for detecting correct positioning of the optical switch. Another embodiment includes a microlens to focus the laser optical signal onto the ignitor. In yet other embodiments, the explosive charge is detonated either by ignition of an ignitor or by a shock wave from the ignitor. The resulting ordnance fuse apparatus has significantly reduced size and improved performance and safety.

Abstract: The present invention provides a micro-electro-mechanical system (MEMS) device, a method of manufacture therefore, and an optical communications system including the same. The device includes an electrode located over a substrate and a charge dissipation layer located proximate and electrically coupled to the substrate. The device may further include a moveable element located over the electrode.

Abstract: A charge-dissipation structure is formed within the dielectric of an electrostatically driven device, such as a micro-electro-mechanical systems (“MEMS”) device, by ion implantation. Electrical and other properties of the charge-dissipation structure may be controlled by selection of the species, energy, and dose of implanted ions. With appropriate properties, such a charge-dissipation structure can reduce the effect on device operation of mobile charges in or on the dielectric.

Abstract: The present invention provides a micro-electro-mechanical system (MEMS) device, a method of manufacture therefore, and an optical communications system including the same. The device includes an electrode located over a substrate and a charge dissipation layer located proximate and electrically coupled to the substrate. The device may further include a moveable element located over the electrode.

Abstract: The present invention provides an oxidation sensor for an electrical circuit or MEMS device that includes a conductor located on an insulating substrate and a sensor trace located on the insulating substrate adjacent the conductor. The sensor trace is located on the insulating substrate adjacent the conductor and is configured to oxidize at a rate greater than an electrical component associated with the sensor trace on the electrical circuit or MEMS device when the sensor trace and the electrical component are exposed to a same oxidizing environment. By oxidizing and thus becoming an open circuit more rapidly than any structure on a electrical circuit or MEMS device at a given relative humidity (i.e. in the same package), the oxidation sensor is designed to provide early warning of oxidation. Thus, the present invention serves as a sensor that will give advance warning of a leaky package and associated oxidation.

Abstract: A charge-dissipation structure is formed within the dielectric of an electrostatically driven device, such as a micro-electro-mechanical systems (“MEMS”) device, by ion implantation. Electrical and other properties of the charge-dissipation structure may be controlled by selection of the species, energy, and dose of implanted ions. With appropriate properties, such a charge-dissipation structure can reduce the effect on device operation of mobile charges in or on the dielectric.

Abstract: The present invention provides a micro-electro-mechanical system (MEMS) device, a method of manufacture therefore, and an optical communications system including the same. The device includes an electrode located over a substrate and a charge dissipation layer located proximate and electrically coupled to the substrate. The device may further include a moveable element located over the electrode.