Patents by Inventor Herbert Schafer

Herbert Schafer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20100155896
    Abstract: A high-frequency bipolar transistor includes an emitter contact adjoining an emitter connection region, a base contact adjoining a base connection region, and a collector contact adjoining a collector connection region. A first insulation layer is disposed on the base connection region. The collector connection region contains a buried layer, which connects the collector contact to a collector zone. A silicide or salicide region is provided on the buried layer and connects the collector contact to the collector zone in a low-impedance manner. A second insulation layer is disposed on the collector connection region but not on the silicide region.
    Type: Application
    Filed: March 3, 2010
    Publication date: June 24, 2010
    Inventors: Josef Böck, Thomas Meister, Reinhard Stengl, Herbert Schafer
  • Publication number: 20080227261
    Abstract: The invention relates to a method for fabricating a transistor structure, comprising at least a first and a second bipolar transistor having different collector widths. The invention is distinguished by the fact that all junctions between differently doped regions have a sharp interface. In this case, by way of example, a first collector region 2.1 is suitable for a high-frequency transistor with high limiting frequencies fT and a second collector region 2.2 is suitable for a high-voltage transistor with increased breakdown voltages.
    Type: Application
    Filed: March 20, 2008
    Publication date: September 18, 2008
    Inventors: Josef Bock, Rudolf Lachner, Thomas Meister, Reinhard Stengl, Herbert Schafer, Martin Seck
  • Patent number: 7420228
    Abstract: A bipolar transistor comprising a collector region of a first conduction type, and a subcollector region of the first conduction type at a first side of the collector region. The transistor further includes a base region of the second conduction type provided at a second side of the collector region, and an emitter region of the first conduction type which is provided above the base region on the side remote from the collection region. A carbon-doped semiconductor region is provided on the first side alongside the collector region. The bipolar transistor is characterized in that the carbon-doped semiconductor region has a carbon concentration of 1019-1021 cm?3 and the base region has a smaller cross section than the collector region and the collector region has, in the overlap region with the base region, a region having an increased doping compared with the remaining region.
    Type: Grant
    Filed: October 7, 2005
    Date of Patent: September 2, 2008
    Assignee: Infineon Technologies AG
    Inventors: Josef Bock, Thomas Meister, Reinhard Stengl, Herbert Schafer
  • Publication number: 20080102593
    Abstract: A method for fabricating a semiconductor including defining a first component region and a second component region in a semiconductor body is provided. A first epitaxial layer is formed through the first component region. A second epitaxial layer is formed over the first epitaxial layer, including configuring the physical dimensions of a first active zone of the first component region independent of a second active zone of the second component region via the first epitaxial layer and the second epitaxial layer. In one embodiment, the first component is a radio-frequency transistor and the second component is a varactor.
    Type: Application
    Filed: October 27, 2006
    Publication date: May 1, 2008
    Applicant: INFINEON TECHNOLOGIES AG
    Inventors: Thomas Meister, Herbert Schafer, Josef Bock, Rudolf Lachner
  • Patent number: 7285470
    Abstract: The invention relates to a method for producing a bipolar semiconductor element, especially a bipolar transistor, and a corresponding bipolar semiconductor component.
    Type: Grant
    Filed: September 30, 2005
    Date of Patent: October 23, 2007
    Assignee: Infineon Technologies AG
    Inventors: Josef Bock, Thomas Meister, Reinhard Stengl, Herbert Schafer
  • Publication number: 20070108513
    Abstract: The fabrication of a semiconductor component having a semiconductor body in which is arranged a very thin dielectric layer having sections which run in the vertical direction and which extend very deeply into the semiconductor body is disclosed. In one method a trench is formed in a drift zone region proceeding from the front side of a semiconductor body, a sacrificial layer is produced on at least a portion of the sidewalls of the trench and at least a portion of the trench is filled with a semiconductor material which is chosen such that the quotient of the net dopant charge of the semiconductor material in the trench and the total area of the sacrificial layer on the sidewalls of the trench between the semiconductor material and the drift zone region is less than the breakdown charge of the semiconductor material, and the sacrificial layer is replaced with a dielectric.
    Type: Application
    Filed: September 29, 2006
    Publication date: May 17, 2007
    Applicant: Infineon Technologies Austria AG
    Inventors: Michael Rub, Herbert Schafer, Armin Willmeroth, Anton Mauder, Stefan Sedlmaier, Roland Rupp, Manfred Pippan, Hans Weber, Frank Pfirsch, Franz Hirler, Hans-Joachim Schulze
  • Patent number: 7105415
    Abstract: The invention relates to a method for producing a bipolar transistor. A semiconductor substrate is provided that encompasses a collector area of a first conductivity type, which is embedded therein and is bare towards the top. A monocrystalline base area is provided and a base-connecting area of the second conductivity type is provided above the base area. An insulating area is provided above the base-connecting area and a window is formed in the insulating area and the base-connecting area so as to at least partly expose the base area. An insulating sidewall spacer is provided in the window in order to insulate the base-connecting area. An emitter layer which forms a monocrystalline emitter area above the base area and a polycrystalline emitter area above the insulating area and the sidewall spacer is differentially deposited and structured, and a tempering step is carried out.
    Type: Grant
    Filed: June 15, 2005
    Date of Patent: September 12, 2006
    Assignee: Infineon Technologies AG
    Inventors: Josef Bock, Thomas Meister, Reinhard Stengl, Herbert Schafer
  • Publication number: 20060171116
    Abstract: An integrated circuit arrangement and method of fabricating the integrated circuit arrangement is provided. At least one integrated electronic component is arranged at a main area of a substrate. The component is arranged in the substrate or is isolated from the substrate by an electrically insulating region. Main channels are formed in the substrate and arranged along the main area. Each main channel is completely surrounded by the substrate transversely with respect to a longitudinal axis. Transverse channels are arranged transversely with respect to the main channels. Each transverse channel opens into at least one main channel. More than about ten transverse channels open into a main channel.
    Type: Application
    Filed: January 3, 2006
    Publication date: August 3, 2006
    Inventors: Volker Lehmann, Reinhard Stengl, Herbert Schafer
  • Publication number: 20060097352
    Abstract: A bipolar transistor and method of making a bipolar transistor is disclosed. In one embodiment, the bipolar transistor includes a polysilicon layer into which impurity atoms are inserted, thereby reducing the layer resistance.
    Type: Application
    Filed: July 11, 2003
    Publication date: May 11, 2006
    Inventors: Josef Bock, Thomas Meister, Andriy Romanyuk, Herbert Schafer
  • Publication number: 20060040456
    Abstract: The invention relates to a method for producing a bipolar semiconductor element, especially a bipolar transistor, and a corresponding bipolar semiconductor component.
    Type: Application
    Filed: September 30, 2005
    Publication date: February 23, 2006
    Inventors: Josef Bock, Thomas Meister, Reinhard Stengl, Herbert Schafer
  • Publication number: 20060040453
    Abstract: A bipolar transistor comprising a collector region of a first conduction type, and a subcollector region of the first conduction type at a first side of the collector region. The transistor further includes a base region of the second conduction type provided at a second side of the collector region, and an emitter region of the first conduction type which is provided above the base region on the side remote from the collection region. A carbon-doped semiconductor region is provided on the first side alongside the collector region. The bipolar transistor is characterized in that the carbon-doped semiconductor region has a carbon concentration of 1019-1021 cm?3 and the base region has a smaller cross section than the collector region and the collector region has, in the overlap region with the base region, a region having an increased doping compared with the remaining region.
    Type: Application
    Filed: October 7, 2005
    Publication date: February 23, 2006
    Inventors: Josef Bock, Thomas Meister, Reinhard Stengl, Herbert Schafer
  • Publication number: 20060009002
    Abstract: A method for fabricating a transistor structure with a first and a second bipolar transistor having different collector widths is presented. The method includes providing a semiconductor substrate, introducing a first buried layer of the first bipolar transistor and a second buried layer of the second bipolar transistor into the semiconductor substrate, and producing at least a first collector region having a first collector width on the first buried layer and a second collector region having a second collector width on the second buried layer. A first collector zone having a first thickness is produced on the second buried layer for production of the second collector width. A second collector zone having a second thickness is produced on the first collector zone. At least one insulation region is produced that isolates at least the collector regions from one another.
    Type: Application
    Filed: October 24, 2003
    Publication date: January 12, 2006
    Inventors: Josef Bock, Rudolf Lachner, Thomas Meister, Reinhard Stengl, Herbert Schafer, Martin Seck
  • Publication number: 20050233536
    Abstract: The invention relates to a method for producing a bipolar transistor. A semiconductor substrate is provided that encompasses a collector area of a first conductivity type, which is embedded therein and is bare towards the top. A monocrystalline base area is provided and a base-connecting area of the second conductivity type is provided above the base area. An insulating area is provided above the base-connecting area and a window is formed in the insulating area and the base-connecting area so as to at least partly expose the base area. An insulating sidewall spacer is provided in the window in order to insulate the base-connecting area. An emitter layer which forms a monocrystalline emitter area above the base area and a polycrystalline emitter area above the insulating area and the sidewall spacer is differentially deposited and structured, and a tempering step is carried out.
    Type: Application
    Filed: June 15, 2005
    Publication date: October 20, 2005
    Inventors: Josef Bock, Thomas Meister, Reinhard Stengl, Herbert Schafer
  • Publication number: 20050006723
    Abstract: A bipolar transistor includes a first layer with a collector. A second layer has a base cutout for a base. A third layer includes a lead for the base. The third layer is formed with an emitter cutout for an emitter. An undercut is formed in the second layer adjoining the base cutout. The base is at least partially located in the undercut. In order to obtain a low transition resistance between the lead and the base, an intermediate layer is provided between the first and the second layer. The intermediate layer is selectively etchable with respect to the second layer. At least in the region of the undercut between the lead and the base, a base connection zone is provided that can be adjusted independent of other production conditions. The intermediate layer is removed in a contact region with the base.
    Type: Application
    Filed: August 4, 2004
    Publication date: January 13, 2005
    Inventors: Reinhard Stengl, Thomas Meister, Herbert Schafer, Martin Franosch
  • Publication number: 20040262637
    Abstract: The invention provides a memory device for storing electrical charge, which has, as memory elements, tube elements applied on an electrode layer and connect-connected thereto. The tube elements are provided with a dielectric coating, a filling material for filling the space between the tube elements being provided. A counter-electrode connected to the filling material is formed such that an electrical capacitor for storing electrical charge is formed between the electrode layer and the counter-electrode. The tube elements advantageously comprise carbon nanotubes, as a result of which the capacitance of the capacitor on account of a drastic increase in the area of the capacitor electrode surface.
    Type: Application
    Filed: May 26, 2004
    Publication date: December 30, 2004
    Applicant: Infineon Technologies AG
    Inventors: Hans Reisinger, Reinhard Stengl, Herbert Schafer
  • Publication number: 20030178700
    Abstract: The silicon bipolar transistor (100) comprises a base, with a first highly-doped base layer (105) and a second poorly-doped base layer (106) which together form the base. The emitter is completely highly-doped and mounted directly on the second base layer (106).
    Type: Application
    Filed: May 6, 2003
    Publication date: September 25, 2003
    Inventors: Martin Franosch, Thomas Meister, Herbert Schafer, Reinhard Stengl
  • Publication number: 20030020139
    Abstract: A bipolar transistor includes a first layer with a collector. A second layer has a base cutout for a base. A third layer includes a lead for the base. The third layer is formed with an emitter cutout for an emitter. An undercut is formed in the second layer adjoining the base cutout. The base is at least partially located in the undercut. In order to obtain a low transition resistance between the lead and the base, an intermediate layer is provided between the first and the second layer. The intermediate layer is selectively etchable with respect to the second layer. At least in the region of the undercut between the lead and the base, a base connection zone is provided that can be adjusted independent of other production conditions. The intermediate layer is removed in a contact region with the base.
    Type: Application
    Filed: August 8, 2002
    Publication date: January 30, 2003
    Inventors: Reinhard Stengl, Thomas Meister, Herbert Schafer, Martin Franosch
  • Publication number: 20020168829
    Abstract: The bipolar transistor is produced such that a connection region of its base is provided with a silicide layer, so that a base resistance of the bipolar transistor is small. No silicide layer is produced between an emitter and an emitter contact and between a connection region of a collector and a collector contact. The base is produced by in situ-doped epitaxy in a region in which a first insulating layer is removed by isotropic etching such that the connection region of the base which is arranged on the first insulating layer is undercut. In order to avoid defects of a substrate in which the bipolar transistor is partly produced, isotropic etching is used for the patterning of auxiliary layers, whereby etching is selective with respect to auxiliary layers lying above, which are patterned by anisotropic etching.
    Type: Application
    Filed: June 3, 2002
    Publication date: November 14, 2002
    Inventors: Josef Bock, Wolfgang Klein, Herbert Schafer, Martin Franosch, Thomas Meister, Reinhard Stengl
  • Publication number: 20020126543
    Abstract: A storage capacitor for a DRAM has a dielectric composed of silicon nitride and has at least two electrodes disposed opposite one another across the dielectric. A material having a high tunneling barrier between the Fermi level of the material and the conduction band of the dielectric is used for the electrodes. Suitable materials for the electrodes are metals such as platinum, tungsten and iridium or silicides.
    Type: Application
    Filed: December 11, 2000
    Publication date: September 12, 2002
    Inventors: Hans Reisinger, Volker Lehmann, Reinhard Stengl, Hermann Wendt, Gerrit Lange, Harald Bachhofer, Martin Franosch, Herbert Schafer
  • Publication number: 20020121662
    Abstract: A vertical semiconductor transistor component is built up on a substrate by using a statistical mask. The vertical semiconductor transistor component has vertical pillar structures statistically distributed over the substrate. The vertical pillar structures are electrically connected on a base side thereof to a first common electrical contact. The vertical pillar structures include, along the vertical direction, layer zones of differing conductivity, and have insulation layers on their circumferential walls. An electrically conductive material is deposited between the pillar structures and forms a second electrical contact of the semiconductor transistor component. The pillar structures are electrically contacted to a third common electrical contact on their capping side.
    Type: Application
    Filed: January 16, 2002
    Publication date: September 5, 2002
    Inventors: Wolfgang Rosner, Thomas Schulz, Lothar Risch, Thomas Augle, Herbert Schafer, Martin Franosch