Abstract: A chuck for clamping workpieces or tools in a clamping space with a clamping force (F). The chuck includes at least two chuck jaws movable in translation along one clamping plane (E) in the direction of one center Z of the clamping space and a gear train located at least largely within the chuck for transfer of a driving torque of a drive motor, which can be coupled to the gear train by coupling means of the gear train, to the chuck jaws for movement of the chuck jaws. The coupling means able to be coupled to a corresponding coupling connection of the drive motor. The movement from the maximum size of the clamping space to the minimum size of the clamping space is executed via the gear train from the drive motor.

Abstract: A mounting apparatus for handling of a structured substrate which has structures. The mounting apparatus having a soft material layer for accommodating the structured substrate on a receiving surface. The structures of the structured substrate are able to be taken at least partially into the material layer. Fixing means for fixing of the structured substrate on the receiving surface are provided.

Abstract: A workpiece accommodation device for purposes of accommodating a workpiece and for use in a device for the machining of a workpiece with: a tool mounting for purposes of accommodating the tool, a workpiece accommodation device for purposes of accommodating the workpiece, characterized in that during the machining process at least one first oscillation component can be introduced in a Z-direction, and an, in particular simultaneous, second oscillation component can be introduced in an X- and/or Y-direction by means of oscillation components.

Abstract: A chuck for clamping workpieces or tools in a clamping space with a clamping force (F). The chuck includes at least two chuck jaws movable in translation along one clamping plane (E) in the direction of one center Z of the clamping space and a gear train located at least largely within the chuck for transfer of a driving torque of a drive motor, which can be coupled to the gear train by coupling means of the gear train, to the chuck jaws for movement of the chuck jaws. The coupling means able to be coupled to a corresponding coupling connection of the drive motor. The movement from the maximum size of the clamping space to the minimum size of the clamping space is executed via the gear train from the drive motor.

Abstract: A chuck for clamping workpieces or tools in a clamping space with a clamping force (F). The chuck includes at least two chuck jaws movable in translation along one clamping plane (E) in the direction of one center Z of the clamping space and a gear train located at least largely within the chuck for transfer of a driving torque of a drive motor, which can be coupled to the gear train by coupling means of the gear train, to the chuck jaws for movement of the chuck jaws. The coupling means able to be coupled to a corresponding coupling connection of the drive motor. The movement from the maximum size of the clamping space to the minimum size of the clamping space is executed via the gear train from the drive motor.

Abstract: A workpiece accommodation device for purposes of accommodating a workpiece and for use in a device for the machining of a workpiece with: a tool mounting for purposes of accommodating the tool, a workpiece accommodation device for purposes of accommodating the workpiece, characterised in that during the machining process at least one first oscillation component can be introduced in a Z-direction, and an, in particular simultaneous, second oscillation component can be introduced in an X- and/or Y-direction by means of oscillation components.

Abstract: A workholding fixture for holding flat semiconductor substrates with a carrier, a holding body which is fixed or which can be fixed on the carrier with a holding side which faces away from the carrier and at least one negative pressure channel which penetrates the holding body with one suction end on the holding side, the holding side having a defined suction structure of soft material.

Abstract: A mounting apparatus for handling of a structured substrate which has structures. The mounting apparatus having a soft material layer for accommodating the structured substrate on a receiving surface. The structures of the structured substrate are able to be taken at least partially into the material layer. Fixing means for fixing of the structured substrate on the receiving surface are provided.

Abstract: A workpiece holding fixture for receiving a workpiece and for use in a device for the machining of a workpiece with: a tool holding fixture for receiving the tool, a workpiece holding fixture for receiving the workpiece, characterized in that, during the machining, at least one first oscillation component in a Z-direction and a second, in particular simultaneous, oscillation component in the X- and/or Y-direction can be introduced by means of oscillation components.

Abstract: A workpiece holding fixture for receiving a workpiece and for use in a device for the machining of a workpiece with: a tool holding fixture for receiving the tool, a workpiece holding fixture for receiving the workpiece, characterised in that, during the machining, at least one first oscillation component in a Z-direction and a second, in particular simultaneous, oscillation component in the X- and/or Y-direction can be introduced by means of oscillation components.

Abstract: A chuck for clamping workpieces or tools in a clamping space with a clamping force (F). The chuck includes at least two chuck jaws movable in translation along one clamping plane (E) in the direction of and a gear train located at least largely within the chuck for transfer of a driving torque of a drive motor, which can be coupled to the gear train by coupling means of the gear train, to the chuck jaws for movement of the chuck jaws. The coupling means able to be coupled to a corresponding coupling connection of the drive motor. The movement from the maximum size of the clamping space to the minimum size of the clamping space is executed via the gear train from the drive motor.

Abstract: A workholding fixture for holding flat semiconductor substrates with a carrier, a holding body which is fixed or which can be fixed on the carrier with a holding side which faces away from the carrier and at least one negative pressure channel which penetrates the holding body with one suction end on the holding side, the holding side having a defined suction structure of soft material.