Patents by Inventor Herbert Von Hartel

Herbert Von Hartel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 3976555
    Abstract: In a sputtering chamber where there is at least one target of some material comprising at least two elements which are to be sputtered as a compound onto a substrate within the chamber, a target having a plurality of edges is framed by a metallic shield to confine the sputtering to a forward direction and the background gas needed for maintaining stoichiometry of the sputtered material is injected directly inside of the shield so that immediately upon entry into the chamber a substantial portion thereof flows over the target. A perforated manifold running the length of an edge of the target releases the background gas to the target along its length.
    Type: Grant
    Filed: March 20, 1975
    Date of Patent: August 24, 1976
    Assignee: Coulter Information Systems, Inc.
    Inventor: Herbert Von Hartel