Patents by Inventor Herbert WITUSCHEK

Herbert WITUSCHEK has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Object with an improved suitability for a plasma cleaning treatment
    Patent number: 8780322
    Abstract: An object suitable for a plasma cleaning treatment in a plasma cleaning device, the object including a first outer surface area; a second outer surface area, wherein the object is constructed and arranged to cooperate with a removable cover such that the cover is connectable to the object to cover the second outer surface area, and wherein the object connected with the removable cover is adapted to be cleaned in the plasma cleaning device such that the plasma cleaning device is not exposed to particles of the second outer surface area and wherein the first outer surface area is cleaned in the plasma cleaning device.
    Type: Grant
    Filed: December 14, 2010
    Date of Patent: July 15, 2014
    Assignee: ASML Netherlands B.V.
    Inventors: Johannes Maquiné, Herbert Wituschek
  • OBJECT WITH AN IMPROVED SUITABILITY FOR A PLASMA CLEANING TREATMENT
    Publication number: 20110149256
    Abstract: An object suitable for a plasma cleaning treatment in a plasma cleaning device, the object including a first outer surface area; a second outer surface area, wherein the object is constructed and arranged to cooperate with a removable cover such that the cover is connectable to the object to cover the second outer surface area, and wherein the object connected with the removable cover is adapted to be cleaned in the plasma cleaning device such that the plasma cleaning device is not exposed to particles of the second outer surface area and wherein the first outer surface area is cleaned in the plasma cleaning device.
    Type: Application
    Filed: December 14, 2010
    Publication date: June 23, 2011
    Applicant: ASML Netherlands B.V.
    Inventors: Johannes MAQUINÉ, Herbert WITUSCHEK